GB201201380D0 - Gas transfer vacuum pump - Google Patents

Gas transfer vacuum pump

Info

Publication number
GB201201380D0
GB201201380D0 GBGB1201380.1A GB201201380A GB201201380D0 GB 201201380 D0 GB201201380 D0 GB 201201380D0 GB 201201380 A GB201201380 A GB 201201380A GB 201201380 D0 GB201201380 D0 GB 201201380D0
Authority
GB
United Kingdom
Prior art keywords
channel
perforated
vacuum pump
gas molecules
perforated element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB1201380.1A
Other versions
GB2498768A (en
GB2498768B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1201380.1A priority Critical patent/GB2498768B/en
Priority to GB1202698.5A priority patent/GB2498816A/en
Publication of GB201201380D0 publication Critical patent/GB201201380D0/en
Priority to JP2014553801A priority patent/JP6354105B2/en
Priority to PCT/GB2013/050149 priority patent/WO2013110936A2/en
Priority to US14/374,106 priority patent/US10337517B2/en
Priority to KR1020147020868A priority patent/KR102098412B1/en
Priority to EP13702095.4A priority patent/EP2807377B1/en
Priority to CN201380006640.7A priority patent/CN104066999B/en
Publication of GB2498768A publication Critical patent/GB2498768A/en
Application granted granted Critical
Publication of GB2498768B publication Critical patent/GB2498768B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/38—Blades
    • F04D29/384—Blades characterised by form
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

A vacuum pump 10 comprising a perforated element 14 arranged to intersect a channel formed on a surface of a channel element 12, such that the channel is arranged to guide gas molecules from an inlet 16 of the pump towards an outlet 18, wherein the perforated element and channel element are arranged to move relative to one another so that, during use, gas molecules are urged along the channel towards the outlet. The perforated element is arranged to allow gas molecules to pass through it. Preferably the perforated element fits within a slot 40 in the channel element and divides the channel completely. The channel element may be formed as a helix and the perforated element is disk-shaped or the channel element may be configured as a spiral and the perforated element as a cylindrical skirt. A rotor, stator and permeable element are also claimed.
GB1201380.1A 2012-01-27 2012-01-27 Gas transfer vacuum pump Active GB2498768B (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB1201380.1A GB2498768B (en) 2012-01-27 2012-01-27 Gas transfer vacuum pump
GB1202698.5A GB2498816A (en) 2012-01-27 2012-02-16 Vacuum pump
US14/374,106 US10337517B2 (en) 2012-01-27 2013-01-24 Gas transfer vacuum pump
PCT/GB2013/050149 WO2013110936A2 (en) 2012-01-27 2013-01-24 Gas transfer vacuum pump
JP2014553801A JP6354105B2 (en) 2012-01-27 2013-01-24 Gas transport vacuum pump
KR1020147020868A KR102098412B1 (en) 2012-01-27 2013-01-24 Gas transfer vacuum pump
EP13702095.4A EP2807377B1 (en) 2012-01-27 2013-01-24 Gas transfer vacuum pump
CN201380006640.7A CN104066999B (en) 2012-01-27 2013-01-24 gas transfer vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1201380.1A GB2498768B (en) 2012-01-27 2012-01-27 Gas transfer vacuum pump

Publications (3)

Publication Number Publication Date
GB201201380D0 true GB201201380D0 (en) 2012-03-14
GB2498768A GB2498768A (en) 2013-07-31
GB2498768B GB2498768B (en) 2016-07-27

Family

ID=45876171

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1201380.1A Active GB2498768B (en) 2012-01-27 2012-01-27 Gas transfer vacuum pump

Country Status (1)

Country Link
GB (1) GB2498768B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114901950A (en) * 2020-01-09 2022-08-12 爱德华兹有限公司 Vacuum pump

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2568066A (en) * 2017-11-02 2019-05-08 Edwards Ltd Stator blade unit for a turbomolecular pump

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB811858A (en) * 1956-02-02 1959-04-15 Pfeiffer Arthur Improvements in or relating to molecular pumps
GB885954A (en) * 1960-03-08 1962-01-03 Arthur Pfeiffer G M B H Improvements in or relating to molecular pumps
RU2016256C1 (en) * 1991-06-28 1994-07-15 Товарищество с ограниченной ответственностью фирмы "Томирис" Molecular pump stage
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JP3013083B2 (en) * 1998-06-23 2000-02-28 セイコー精機株式会社 Turbo molecular pump
US6126391A (en) * 1999-04-01 2000-10-03 Atraghji; Edward Fluid flow machine
US6932564B2 (en) * 2002-12-19 2005-08-23 Forced Physics Corporation Heteroscopic turbine
CA2717698A1 (en) * 2008-03-06 2009-09-11 Heraldo Da Silva Couto Tesla-pelton device and use of the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114901950A (en) * 2020-01-09 2022-08-12 爱德华兹有限公司 Vacuum pump

Also Published As

Publication number Publication date
GB2498768A (en) 2013-07-31
GB2498768B (en) 2016-07-27

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