GB201008064D0 - Surface coating on ion source - Google Patents

Surface coating on ion source

Info

Publication number
GB201008064D0
GB201008064D0 GBGB1008064.6A GB201008064A GB201008064D0 GB 201008064 D0 GB201008064 D0 GB 201008064D0 GB 201008064 A GB201008064 A GB 201008064A GB 201008064 D0 GB201008064 D0 GB 201008064D0
Authority
GB
United Kingdom
Prior art keywords
ion source
surface coating
coating
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB1008064.6A
Other versions
GB2471156B (en
GB2471156A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micromass UK Ltd
Original Assignee
Micromass UK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micromass UK Ltd filed Critical Micromass UK Ltd
Publication of GB201008064D0 publication Critical patent/GB201008064D0/en
Publication of GB2471156A publication Critical patent/GB2471156A/en
Application granted granted Critical
Publication of GB2471156B publication Critical patent/GB2471156B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/145—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using chemical ionisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
GB201008064A 2009-05-13 2010-05-13 Surface coating on ion source Active GB2471156B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0908246A GB0908246D0 (en) 2009-05-13 2009-05-13 Surface coating on ion source

Publications (3)

Publication Number Publication Date
GB201008064D0 true GB201008064D0 (en) 2010-06-30
GB2471156A GB2471156A (en) 2010-12-22
GB2471156B GB2471156B (en) 2014-04-23

Family

ID=40833946

Family Applications (2)

Application Number Title Priority Date Filing Date
GB0908246A Ceased GB0908246D0 (en) 2009-05-13 2009-05-13 Surface coating on ion source
GB201008064A Active GB2471156B (en) 2009-05-13 2010-05-13 Surface coating on ion source

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB0908246A Ceased GB0908246D0 (en) 2009-05-13 2009-05-13 Surface coating on ion source

Country Status (2)

Country Link
GB (2) GB0908246D0 (en)
WO (1) WO2010130999A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT14861U1 (en) * 2015-03-02 2016-07-15 Plansee Se ion implanter
GB2567853B (en) * 2017-10-26 2020-07-29 Isotopx Ltd Gas-source mass spectrometer comprising an electron source

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356843A (en) * 1965-02-01 1967-12-05 Gen Electric Mass spectrometer electron beam ion source having means for focusing the electron beam
JPH01255140A (en) * 1988-04-05 1989-10-12 Denki Kagaku Kogyo Kk Arc chamber for ion source
US5340983A (en) * 1992-05-18 1994-08-23 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University Method and apparatus for mass analysis using slow monochromatic electrons
JP3066783B2 (en) * 1992-11-16 2000-07-17 東京エレクトロン株式会社 Electrode material and plasma processing apparatus using the same
US6239440B1 (en) * 1996-03-27 2001-05-29 Thermoceramix, L.L.C. Arc chamber for an ion implantation system
US7838842B2 (en) * 1999-12-13 2010-11-23 Semequip, Inc. Dual mode ion source for ion implantation
JP3787549B2 (en) * 2002-10-25 2006-06-21 株式会社日立ハイテクノロジーズ Mass spectrometer and mass spectrometry method
US20080223409A1 (en) * 2003-12-12 2008-09-18 Horsky Thomas N Method and apparatus for extending equipment uptime in ion implantation

Also Published As

Publication number Publication date
GB2471156B (en) 2014-04-23
GB0908246D0 (en) 2009-06-24
GB2471156A (en) 2010-12-22
WO2010130999A1 (en) 2010-11-18

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