GB0908246D0 - Surface coating on ion source - Google Patents

Surface coating on ion source

Info

Publication number
GB0908246D0
GB0908246D0 GB0908246A GB0908246A GB0908246D0 GB 0908246 D0 GB0908246 D0 GB 0908246D0 GB 0908246 A GB0908246 A GB 0908246A GB 0908246 A GB0908246 A GB 0908246A GB 0908246 D0 GB0908246 D0 GB 0908246D0
Authority
GB
United Kingdom
Prior art keywords
ion source
surface coating
coating
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0908246A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micromass UK Ltd
Original Assignee
Micromass UK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micromass UK Ltd filed Critical Micromass UK Ltd
Priority to GB0908246A priority Critical patent/GB0908246D0/en
Publication of GB0908246D0 publication Critical patent/GB0908246D0/en
Priority to PCT/GB2010/000958 priority patent/WO2010130999A1/en
Priority to GB201008064A priority patent/GB2471156B/en
Priority to US13/294,715 priority patent/US8476587B2/en
Priority to US13/928,515 priority patent/US8742337B2/en
Ceased legal-status Critical Current

Links

GB0908246A 2009-05-13 2009-05-13 Surface coating on ion source Ceased GB0908246D0 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB0908246A GB0908246D0 (en) 2009-05-13 2009-05-13 Surface coating on ion source
PCT/GB2010/000958 WO2010130999A1 (en) 2009-05-13 2010-05-13 Surface coating on ion source
GB201008064A GB2471156B (en) 2009-05-13 2010-05-13 Surface coating on ion source
US13/294,715 US8476587B2 (en) 2009-05-13 2011-11-11 Ion source with surface coating
US13/928,515 US8742337B2 (en) 2009-05-13 2013-06-27 Ion source with surface coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0908246A GB0908246D0 (en) 2009-05-13 2009-05-13 Surface coating on ion source

Publications (1)

Publication Number Publication Date
GB0908246D0 true GB0908246D0 (en) 2009-06-24

Family

ID=40833946

Family Applications (2)

Application Number Title Priority Date Filing Date
GB0908246A Ceased GB0908246D0 (en) 2009-05-13 2009-05-13 Surface coating on ion source
GB201008064A Expired - Fee Related GB2471156B (en) 2009-05-13 2010-05-13 Surface coating on ion source

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB201008064A Expired - Fee Related GB2471156B (en) 2009-05-13 2010-05-13 Surface coating on ion source

Country Status (2)

Country Link
GB (2) GB0908246D0 (en)
WO (1) WO2010130999A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT14861U1 (en) * 2015-03-02 2016-07-15 Plansee Se ion implanter
GB2567853B (en) * 2017-10-26 2020-07-29 Isotopx Ltd Gas-source mass spectrometer comprising an electron source

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356843A (en) * 1965-02-01 1967-12-05 Gen Electric Mass spectrometer electron beam ion source having means for focusing the electron beam
JPH01255140A (en) * 1988-04-05 1989-10-12 Denki Kagaku Kogyo Kk Arc chamber for ion source
US5340983A (en) * 1992-05-18 1994-08-23 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University Method and apparatus for mass analysis using slow monochromatic electrons
JP3066783B2 (en) * 1992-11-16 2000-07-17 東京エレクトロン株式会社 Electrode material and plasma processing apparatus using the same
US6239440B1 (en) * 1996-03-27 2001-05-29 Thermoceramix, L.L.C. Arc chamber for an ion implantation system
US7838842B2 (en) * 1999-12-13 2010-11-23 Semequip, Inc. Dual mode ion source for ion implantation
JP3787549B2 (en) * 2002-10-25 2006-06-21 株式会社日立ハイテクノロジーズ Mass spectrometer and mass spectrometry method
US20080223409A1 (en) * 2003-12-12 2008-09-18 Horsky Thomas N Method and apparatus for extending equipment uptime in ion implantation

Also Published As

Publication number Publication date
GB2471156A (en) 2010-12-22
GB2471156B (en) 2014-04-23
WO2010130999A1 (en) 2010-11-18
GB201008064D0 (en) 2010-06-30

Similar Documents

Publication Publication Date Title
TWI366647B (en) Surface light source
EP2123136A4 (en) Improved plasma source
GB0904870D0 (en) Optical coating
EP2460861A4 (en) Surface conditioner for coating agents
EP2321009B8 (en) Radiotherapy apparatus
GB0800278D0 (en) Surface functionalisation
GB2489761B (en) Surface coatings
GB0803026D0 (en) External surface treatment system
GB0913485D0 (en) Surface modification
GB0904803D0 (en) Coated substrate
EP2596152A4 (en) Surface treatment
GB201019522D0 (en) Surface coating for inspection
EP2528744A4 (en) Paper with surface treatment
GB201305721D0 (en) Surface multiple well
TWI372659B (en) Coating apparatus
PL2268408T3 (en) Showerhead
EP2243555A4 (en) Coating device
GB2470469B (en) Surface coating on ion source
GB2471156B (en) Surface coating on ion source
GB0922407D0 (en) Coated substrate
GB0807528D0 (en) Surface coatings
GB0921791D0 (en) Ion beam source
GB2470296B (en) Surface coating on ion source
GB0908245D0 (en) Surface coating on ion source
GB0819296D0 (en) Coating II

Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)