GB2470469B - Surface coating on ion source - Google Patents

Surface coating on ion source

Info

Publication number
GB2470469B
GB2470469B GB201008062A GB201008062A GB2470469B GB 2470469 B GB2470469 B GB 2470469B GB 201008062 A GB201008062 A GB 201008062A GB 201008062 A GB201008062 A GB 201008062A GB 2470469 B GB2470469 B GB 2470469B
Authority
GB
United Kingdom
Prior art keywords
ion source
surface coating
coating
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB201008062A
Other versions
GB2470469A (en
GB201008062D0 (en
Inventor
Gordon A Jones
David S Douce
Amir Farooq
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micromass UK Ltd
Original Assignee
Micromass UK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB0908247.0A external-priority patent/GB0908247D0/en
Priority claimed from GB0908245A external-priority patent/GB0908245D0/en
Application filed by Micromass UK Ltd filed Critical Micromass UK Ltd
Publication of GB201008062D0 publication Critical patent/GB201008062D0/en
Publication of GB2470469A publication Critical patent/GB2470469A/en
Application granted granted Critical
Publication of GB2470469B publication Critical patent/GB2470469B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/145—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using chemical ionisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
GB201008062A 2009-05-13 2010-05-13 Surface coating on ion source Active GB2470469B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0908247.0A GB0908247D0 (en) 2009-05-13 2009-05-13 Surface coating on ion source
GB0908245A GB0908245D0 (en) 2009-05-13 2009-05-13 Surface coating on ion source

Publications (3)

Publication Number Publication Date
GB201008062D0 GB201008062D0 (en) 2010-06-30
GB2470469A GB2470469A (en) 2010-11-24
GB2470469B true GB2470469B (en) 2014-04-23

Family

ID=42334765

Family Applications (1)

Application Number Title Priority Date Filing Date
GB201008062A Active GB2470469B (en) 2009-05-13 2010-05-13 Surface coating on ion source

Country Status (2)

Country Link
GB (1) GB2470469B (en)
WO (1) WO2010131008A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102789953A (en) * 2011-05-19 2012-11-21 安徽中科大建成海晟科技有限责任公司 Novel ion source for time-of-flight mass spectrometer
CN105632871B (en) * 2014-10-28 2017-09-26 中国科学院大连化学物理研究所 A kind of mass spectrum chemical ionization source based on UV LED
WO2023139532A1 (en) * 2022-01-21 2023-07-27 Cisterni Marco Ion source

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01255140A (en) * 1988-04-05 1989-10-12 Denki Kagaku Kogyo Kk Arc chamber for ion source
US6683317B1 (en) * 2002-10-24 2004-01-27 Applied Materials, Inc. Electrically insulating vacuum coupling
US20040079881A1 (en) * 2002-09-18 2004-04-29 Fischer Steven M. Multimode ionization source
US20050211911A1 (en) * 2002-09-18 2005-09-29 Fischer Steven M Apparatus and method for sensor control and feedback
US20070023677A1 (en) * 2005-06-29 2007-02-01 Perkins Patrick D Multimode ionization source and method for screening molecules
GB2428871A (en) * 2005-06-22 2007-02-07 Univ Muenchen Tech An electron-permeable membrane for use in a charge-particle spectroscopy device
GB2453702A (en) * 2006-08-29 2009-04-15 Inficon Gmbh Mass spectrometer

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7838842B2 (en) * 1999-12-13 2010-11-23 Semequip, Inc. Dual mode ion source for ion implantation
US7960704B2 (en) * 2007-10-15 2011-06-14 Excellims Corporation Compact pyroelectric sealed electron beam

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01255140A (en) * 1988-04-05 1989-10-12 Denki Kagaku Kogyo Kk Arc chamber for ion source
US20040079881A1 (en) * 2002-09-18 2004-04-29 Fischer Steven M. Multimode ionization source
US20050211911A1 (en) * 2002-09-18 2005-09-29 Fischer Steven M Apparatus and method for sensor control and feedback
US6683317B1 (en) * 2002-10-24 2004-01-27 Applied Materials, Inc. Electrically insulating vacuum coupling
GB2428871A (en) * 2005-06-22 2007-02-07 Univ Muenchen Tech An electron-permeable membrane for use in a charge-particle spectroscopy device
US20070023677A1 (en) * 2005-06-29 2007-02-01 Perkins Patrick D Multimode ionization source and method for screening molecules
GB2453702A (en) * 2006-08-29 2009-04-15 Inficon Gmbh Mass spectrometer

Also Published As

Publication number Publication date
GB2470469A (en) 2010-11-24
WO2010131008A1 (en) 2010-11-18
GB201008062D0 (en) 2010-06-30

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