GB2470469B - Surface coating on ion source - Google Patents
Surface coating on ion sourceInfo
- Publication number
- GB2470469B GB2470469B GB201008062A GB201008062A GB2470469B GB 2470469 B GB2470469 B GB 2470469B GB 201008062 A GB201008062 A GB 201008062A GB 201008062 A GB201008062 A GB 201008062A GB 2470469 B GB2470469 B GB 2470469B
- Authority
- GB
- United Kingdom
- Prior art keywords
- ion source
- surface coating
- coating
- ion
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/145—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using chemical ionisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0908247.0A GB0908247D0 (en) | 2009-05-13 | 2009-05-13 | Surface coating on ion source |
GB0908245A GB0908245D0 (en) | 2009-05-13 | 2009-05-13 | Surface coating on ion source |
Publications (3)
Publication Number | Publication Date |
---|---|
GB201008062D0 GB201008062D0 (en) | 2010-06-30 |
GB2470469A GB2470469A (en) | 2010-11-24 |
GB2470469B true GB2470469B (en) | 2014-04-23 |
Family
ID=42334765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB201008062A Active GB2470469B (en) | 2009-05-13 | 2010-05-13 | Surface coating on ion source |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB2470469B (en) |
WO (1) | WO2010131008A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102789953A (en) * | 2011-05-19 | 2012-11-21 | 安徽中科大建成海晟科技有限责任公司 | Novel ion source for time-of-flight mass spectrometer |
CN105632871B (en) * | 2014-10-28 | 2017-09-26 | 中国科学院大连化学物理研究所 | A kind of mass spectrum chemical ionization source based on UV LED |
WO2023139532A1 (en) * | 2022-01-21 | 2023-07-27 | Cisterni Marco | Ion source |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01255140A (en) * | 1988-04-05 | 1989-10-12 | Denki Kagaku Kogyo Kk | Arc chamber for ion source |
US6683317B1 (en) * | 2002-10-24 | 2004-01-27 | Applied Materials, Inc. | Electrically insulating vacuum coupling |
US20040079881A1 (en) * | 2002-09-18 | 2004-04-29 | Fischer Steven M. | Multimode ionization source |
US20050211911A1 (en) * | 2002-09-18 | 2005-09-29 | Fischer Steven M | Apparatus and method for sensor control and feedback |
US20070023677A1 (en) * | 2005-06-29 | 2007-02-01 | Perkins Patrick D | Multimode ionization source and method for screening molecules |
GB2428871A (en) * | 2005-06-22 | 2007-02-07 | Univ Muenchen Tech | An electron-permeable membrane for use in a charge-particle spectroscopy device |
GB2453702A (en) * | 2006-08-29 | 2009-04-15 | Inficon Gmbh | Mass spectrometer |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7838842B2 (en) * | 1999-12-13 | 2010-11-23 | Semequip, Inc. | Dual mode ion source for ion implantation |
WO2009052176A1 (en) * | 2007-10-15 | 2009-04-23 | Excellims Corporation | Compact pyroelectric sealed electron beam |
-
2010
- 2010-05-13 GB GB201008062A patent/GB2470469B/en active Active
- 2010-05-13 WO PCT/GB2010/000968 patent/WO2010131008A1/en active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01255140A (en) * | 1988-04-05 | 1989-10-12 | Denki Kagaku Kogyo Kk | Arc chamber for ion source |
US20040079881A1 (en) * | 2002-09-18 | 2004-04-29 | Fischer Steven M. | Multimode ionization source |
US20050211911A1 (en) * | 2002-09-18 | 2005-09-29 | Fischer Steven M | Apparatus and method for sensor control and feedback |
US6683317B1 (en) * | 2002-10-24 | 2004-01-27 | Applied Materials, Inc. | Electrically insulating vacuum coupling |
GB2428871A (en) * | 2005-06-22 | 2007-02-07 | Univ Muenchen Tech | An electron-permeable membrane for use in a charge-particle spectroscopy device |
US20070023677A1 (en) * | 2005-06-29 | 2007-02-01 | Perkins Patrick D | Multimode ionization source and method for screening molecules |
GB2453702A (en) * | 2006-08-29 | 2009-04-15 | Inficon Gmbh | Mass spectrometer |
Also Published As
Publication number | Publication date |
---|---|
GB201008062D0 (en) | 2010-06-30 |
GB2470469A (en) | 2010-11-24 |
WO2010131008A1 (en) | 2010-11-18 |
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