GB1522048A - Method and apparatus for operating an evaporable getter pump - Google Patents

Method and apparatus for operating an evaporable getter pump

Info

Publication number
GB1522048A
GB1522048A GB3808876A GB3808876A GB1522048A GB 1522048 A GB1522048 A GB 1522048A GB 3808876 A GB3808876 A GB 3808876A GB 3808876 A GB3808876 A GB 3808876A GB 1522048 A GB1522048 A GB 1522048A
Authority
GB
United Kingdom
Prior art keywords
vaporization
control
getter pump
vaporizing
intervals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3808876A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Publication of GB1522048A publication Critical patent/GB1522048A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
GB3808876A 1975-10-29 1976-09-14 Method and apparatus for operating an evaporable getter pump Expired GB1522048A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752548302 DE2548302A1 (de) 1975-10-29 1975-10-29 Verfahren und vorrichtung zum betrieb einer titanverdampferpumpe

Publications (1)

Publication Number Publication Date
GB1522048A true GB1522048A (en) 1978-08-23

Family

ID=5960313

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3808876A Expired GB1522048A (en) 1975-10-29 1976-09-14 Method and apparatus for operating an evaporable getter pump

Country Status (4)

Country Link
DE (1) DE2548302A1 (fi)
FR (1) FR2330141A1 (fi)
GB (1) GB1522048A (fi)
IT (1) IT1075879B (fi)

Also Published As

Publication number Publication date
IT1075879B (it) 1985-04-22
DE2548302A1 (de) 1977-05-05
FR2330141B3 (fi) 1979-07-13
FR2330141A1 (fr) 1977-05-27

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee