GB1497432A - Apparatus for producing masks - Google Patents

Apparatus for producing masks

Info

Publication number
GB1497432A
GB1497432A GB329475A GB329475A GB1497432A GB 1497432 A GB1497432 A GB 1497432A GB 329475 A GB329475 A GB 329475A GB 329475 A GB329475 A GB 329475A GB 1497432 A GB1497432 A GB 1497432A
Authority
GB
United Kingdom
Prior art keywords
scan
amplitude
squares
marker
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB329475A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of GB1497432A publication Critical patent/GB1497432A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
GB329475A 1974-01-25 1975-01-24 Apparatus for producing masks Expired GB1497432A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7402572A FR2259383B1 (enrdf_load_stackoverflow) 1974-01-25 1974-01-25

Publications (1)

Publication Number Publication Date
GB1497432A true GB1497432A (en) 1978-01-12

Family

ID=9134012

Family Applications (1)

Application Number Title Priority Date Filing Date
GB329475A Expired GB1497432A (en) 1974-01-25 1975-01-24 Apparatus for producing masks

Country Status (4)

Country Link
JP (1) JPS6022496B2 (enrdf_load_stackoverflow)
DE (1) DE2502720C2 (enrdf_load_stackoverflow)
FR (1) FR2259383B1 (enrdf_load_stackoverflow)
GB (1) GB1497432A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
FR2259383B1 (enrdf_load_stackoverflow) 1977-06-24
DE2502720A1 (de) 1975-07-31
JPS50105383A (enrdf_load_stackoverflow) 1975-08-20
JPS6022496B2 (ja) 1985-06-03
DE2502720C2 (de) 1986-05-28
FR2259383A1 (enrdf_load_stackoverflow) 1975-08-22

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Legal Events

Date Code Title Description
PS Patent sealed
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee