GB1472099A - Method of transferring positioning and exposing semiconductor slices in a positioning and contact printing machine - Google Patents

Method of transferring positioning and exposing semiconductor slices in a positioning and contact printing machine

Info

Publication number
GB1472099A
GB1472099A GB5564174A GB5564174A GB1472099A GB 1472099 A GB1472099 A GB 1472099A GB 5564174 A GB5564174 A GB 5564174A GB 5564174 A GB5564174 A GB 5564174A GB 1472099 A GB1472099 A GB 1472099A
Authority
GB
United Kingdom
Prior art keywords
slice
stencil
mount
positioning
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5564174A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat VEB
Original Assignee
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat VEB filed Critical Elektromat VEB
Publication of GB1472099A publication Critical patent/GB1472099A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
GB5564174A 1974-01-09 1974-12-23 Method of transferring positioning and exposing semiconductor slices in a positioning and contact printing machine Expired GB1472099A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD17590474A DD109125A1 (enrdf_load_stackoverflow) 1974-01-09 1974-01-09

Publications (1)

Publication Number Publication Date
GB1472099A true GB1472099A (en) 1977-04-27

Family

ID=5494267

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5564174A Expired GB1472099A (en) 1974-01-09 1974-12-23 Method of transferring positioning and exposing semiconductor slices in a positioning and contact printing machine

Country Status (5)

Country Link
CS (1) CS177580B1 (enrdf_load_stackoverflow)
DD (1) DD109125A1 (enrdf_load_stackoverflow)
DE (1) DE2455817A1 (enrdf_load_stackoverflow)
FR (1) FR2257146B3 (enrdf_load_stackoverflow)
GB (1) GB1472099A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
CS177580B1 (enrdf_load_stackoverflow) 1977-07-29
FR2257146A1 (enrdf_load_stackoverflow) 1975-08-01
DE2455817A1 (de) 1975-07-17
DD109125A1 (enrdf_load_stackoverflow) 1974-10-12
FR2257146B3 (enrdf_load_stackoverflow) 1977-09-23

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee