GB1432797A - Aligning a radiation beam of predetermined cross-section with a detector mark of like cross-section - Google Patents

Aligning a radiation beam of predetermined cross-section with a detector mark of like cross-section

Info

Publication number
GB1432797A
GB1432797A GB2666373A GB2666373A GB1432797A GB 1432797 A GB1432797 A GB 1432797A GB 2666373 A GB2666373 A GB 2666373A GB 2666373 A GB2666373 A GB 2666373A GB 1432797 A GB1432797 A GB 1432797A
Authority
GB
United Kingdom
Prior art keywords
signals
alignment
electromagnets
wafer
fundamental
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2666373A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westinghouse Electric Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of GB1432797A publication Critical patent/GB1432797A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Electron Sources, Ion Sources (AREA)
GB2666373A 1972-06-20 1973-06-05 Aligning a radiation beam of predetermined cross-section with a detector mark of like cross-section Expired GB1432797A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00264699A US3811069A (en) 1972-06-20 1972-06-20 Signal stabilization of an alignment detection device

Publications (1)

Publication Number Publication Date
GB1432797A true GB1432797A (en) 1976-04-22

Family

ID=23007226

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2666373A Expired GB1432797A (en) 1972-06-20 1973-06-05 Aligning a radiation beam of predetermined cross-section with a detector mark of like cross-section

Country Status (3)

Country Link
US (1) US3811069A (enExample)
JP (1) JPS5222508B2 (enExample)
GB (1) GB1432797A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2739502C3 (de) * 1977-09-02 1980-07-03 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zur Belichtung durch Korpuskularstrahlen-Schattenwurf und Vorrichtung zur Durchführung des Verfahrens
US4431923A (en) * 1980-05-13 1984-02-14 Hughes Aircraft Company Alignment process using serial detection of repetitively patterned alignment marks
US4595836A (en) * 1984-06-29 1986-06-17 International Business Machines Corporation Alignment correction technique
US4871919A (en) * 1988-05-20 1989-10-03 International Business Machines Corporation Electron beam lithography alignment using electric field changes to achieve registration
US6541770B1 (en) * 2000-08-15 2003-04-01 Applied Materials, Inc. Charged particle system error diagnosis
DE102011052924A1 (de) * 2011-08-23 2013-02-28 Universität Regensburg Vorrichtung und Verfahren zur Messung der Strahlablenkung mittels Frequenzanalyse

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3358239A (en) * 1965-07-27 1967-12-12 Transformatoren & Roentgenwerk Equipment for controlling and monitoring the electron beam of a horizontaltype particle accelerator
US3519788A (en) * 1967-01-13 1970-07-07 Ibm Automatic registration of an electron beam
US3463900A (en) * 1967-07-10 1969-08-26 Gen Electric Electron beam welding apparatus

Also Published As

Publication number Publication date
JPS5222508B2 (enExample) 1977-06-17
JPS4958776A (enExample) 1974-06-07
US3811069A (en) 1974-05-14

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]