GB1386173A - Sensing head for automatic multi-dimensional measurement of specimen - Google Patents

Sensing head for automatic multi-dimensional measurement of specimen

Info

Publication number
GB1386173A
GB1386173A GB2543672A GB2543672A GB1386173A GB 1386173 A GB1386173 A GB 1386173A GB 2543672 A GB2543672 A GB 2543672A GB 2543672 A GB2543672 A GB 2543672A GB 1386173 A GB1386173 A GB 1386173A
Authority
GB
United Kingdom
Prior art keywords
tube
sleeve
sensor
ordinate
sensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2543672A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Priority to GB2543672A priority Critical patent/GB1386173A/en
Publication of GB1386173A publication Critical patent/GB1386173A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012Contact-making feeler heads therefor

Abstract

1386173 Co-ordinate measuring machine CARL ZEISS JENA VEB 31 May 1972 25436/72 Heading GIM A sensing head 1, Fig.1, to be mounted on the carrier of a machine movable in three co-ordinates, comprises a housing part 4 provided with trunnions 2, 2' carrying a gimbal ring 5 and an outer tube 6 tiltable about trunnions 3, 3', Fig. 3 ao that the suspended system may tilt about co-ordinate axes x and y respectively. The tube 6 rotatably supports an inner tube 8 on ball bearings 7 and 8 carries rollers 9 for guiding a sleeve 10 and sensor 15 along a z axis. The parts 4 and 5 carry sensors 13, 14; 11, 12 attached to a frame 16 on the tube 8 which sensors maybe locked in mid position by stop levers 17-20. Disengagement of the tilting system in one of the co-ordinate directions is effected by lifting magnets 21-24 connected to slides 25-28. For example, operation of magnet 22 releases the stop lever 18, lifts the gear 26 which is fixed to a joint 30 between springs 35, 36 in a cage 48, and lifts an element 49 fast with the sleeve 10, so that sensor 15 within the sleeve is slid up or down along the z axis. Other magnets are arranged to move the sensors about their axes 2, 2'; 3, 3' or rotate the frame 16 on the tube 8 about the axis z. Rotation of the tilting system about any of the three co-ordinate axes is transmitted to one of the transducers 50-53 through parts such as 54, 55, Fig.3, transforming the amount of movement into electrical values. The weight of the sleeve 10 is balanced by an equalizer 58 and the frame 16 carrying the sensors 11-14 may be inverted. In operation the head is mounted in a carrier of the measuring machine which is displaceable along three co-ordinate axes by hand or automatically. One of the magnets is caused to move out or tilt out a sensor which is then moved into contact with the body to be measured. As advance of the machine continues the sensor is moved back to a mid position by contact with the surface of the specimen and in so doing causes the transducers to reduce the velocity of the sensing head until the approach to mid position and then produce control signals which correspond to the measured value. These values may then be fed to display or calculating machines.
GB2543672A 1972-05-31 1972-05-31 Sensing head for automatic multi-dimensional measurement of specimen Expired GB1386173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB2543672A GB1386173A (en) 1972-05-31 1972-05-31 Sensing head for automatic multi-dimensional measurement of specimen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2543672A GB1386173A (en) 1972-05-31 1972-05-31 Sensing head for automatic multi-dimensional measurement of specimen

Publications (1)

Publication Number Publication Date
GB1386173A true GB1386173A (en) 1975-03-05

Family

ID=10227643

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2543672A Expired GB1386173A (en) 1972-05-31 1972-05-31 Sensing head for automatic multi-dimensional measurement of specimen

Country Status (1)

Country Link
GB (1) GB1386173A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2509899A1 (en) * 1975-03-07 1976-09-23 Stiefelmayer Kg C PROBE
GB2468766B (en) * 2009-03-18 2013-03-27 Helmut Fischer Gmbh Inst Fa R Elektronik Und Messtechnik Measurement stand and method of its electrical control

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2509899A1 (en) * 1975-03-07 1976-09-23 Stiefelmayer Kg C PROBE
GB2468766B (en) * 2009-03-18 2013-03-27 Helmut Fischer Gmbh Inst Fa R Elektronik Und Messtechnik Measurement stand and method of its electrical control
GB2495868A (en) * 2009-03-18 2013-04-24 Helmut Fischer Gmbh Inst Fa R Elektronik Und Messtechnik Measurement Stand and Method of its Electrical Control for Measuring Thin Layers
GB2495869A (en) * 2009-03-18 2013-04-24 Helmut Fischer Gmbh Inst Fa R Elektronik Und Messtechnik A Method for Electrically Controlling a Measurement Stand with a Measurement Probe for Measuring the Thickness of Thin Layers
GB2496065A (en) * 2009-03-18 2013-05-01 Helmut Fischer Gmbh Inst Fauer Elektronik Und Messtechnik Measurement Stand with means for Controlling Advancement of the Measurement Probe for Measuring the Thickness of Thin Layers
GB2496065B (en) * 2009-03-18 2013-10-23 Helmut Fischer Gmbh Inst Fur Elektronik Und Messtechnik Measurement stand and method of its electrical control
GB2495868B (en) * 2009-03-18 2013-10-23 Helmut Fischer Gmbh Inst Fur Elektronik Und Messtechnik Measurement stand and method of its electrical control
GB2495869B (en) * 2009-03-18 2013-10-23 Helmut Fischer Gmbh Inst Fur Elektronik Und Messtechnik Measurement stand and method of its electrical control

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee