GB1381485A - Multilayer anti-reflection film for ultraviolet rays - Google Patents

Multilayer anti-reflection film for ultraviolet rays

Info

Publication number
GB1381485A
GB1381485A GB6013471A GB6013471A GB1381485A GB 1381485 A GB1381485 A GB 1381485A GB 6013471 A GB6013471 A GB 6013471A GB 6013471 A GB6013471 A GB 6013471A GB 1381485 A GB1381485 A GB 1381485A
Authority
GB
United Kingdom
Prior art keywords
layer
refractive index
thickness
ultraviolet rays
reflection film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB6013471A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Publication of GB1381485A publication Critical patent/GB1381485A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • G02B5/283Interference filters designed for the ultraviolet
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • G02B5/285Interference filters comprising deposited thin solid films
    • G02B5/286Interference filters comprising deposited thin solid films having four or fewer layers, e.g. for achieving a colour effect

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Optical Filters (AREA)
  • Laminated Bodies (AREA)

Abstract

1381485 Anti-reflection coatings NIPPON KOGAKU KK 23 Dec 1971 [29 Dec 1970] 60134/71 Heading G2J Anti-reflection coatings effective in the ultraviolet range are composed of three layers (one of which may be an outer part of the substrate). The refractive index of the third layer differs from that of the first layer in such a way as to satisfy one of the following sets of conditions:- (a) and G=2# α #s/#, where α = m/4. or (b) and G=2# α #s/# where X is a specific wavelength in the UV; #s is the centre wavelength in the UV; m is an integer; n, and d, are the refractive index and thickness of the first layer; n 2 , d 2 are the refractive index and thickness of the second layer; and (n 1 + #n), d are the refractive index and thickness of the third layer. Other layers may also be incorporated in the film, e.g. between the substrate and the threelayer stack.
GB6013471A 1970-12-29 1971-12-23 Multilayer anti-reflection film for ultraviolet rays Expired GB1381485A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45120942A JPS5040668B1 (en) 1970-12-29 1970-12-29

Publications (1)

Publication Number Publication Date
GB1381485A true GB1381485A (en) 1975-01-22

Family

ID=14798768

Family Applications (1)

Application Number Title Priority Date Filing Date
GB6013471A Expired GB1381485A (en) 1970-12-29 1971-12-23 Multilayer anti-reflection film for ultraviolet rays

Country Status (4)

Country Link
JP (1) JPS5040668B1 (en)
DE (1) DE2165315B2 (en)
FR (1) FR2120137B1 (en)
GB (1) GB1381485A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1184685A2 (en) * 2000-08-29 2002-03-06 Hoya Corporation Optical element having anti-reflection film

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5994095U (en) * 1982-12-17 1984-06-26 サッポロビール株式会社 corkscrew
DE3444793A1 (en) * 1984-12-08 1986-06-12 Evb Entwicklungs Und Vertriebs BROWNING DEVICE
DE10064143A1 (en) 2000-12-15 2002-06-20 Zeiss Carl Anti-reflection coating for ultraviolet light at large angles of incidence
DE10101017A1 (en) 2001-01-05 2002-07-11 Zeiss Carl Optical component used in microlithographic systems for manufacturing highly integrated semiconductor components comprises a substrate with a multiple layer system with layers arranged on the surface of the substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1184685A2 (en) * 2000-08-29 2002-03-06 Hoya Corporation Optical element having anti-reflection film
EP1184685A3 (en) * 2000-08-29 2004-04-14 Hoya Corporation Optical element having anti-reflection film

Also Published As

Publication number Publication date
JPS5040668B1 (en) 1975-12-25
FR2120137A1 (en) 1972-08-11
FR2120137B1 (en) 1974-06-07
DE2165315A1 (en) 1973-07-12
DE2165315B2 (en) 1977-09-22

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee