GB1380025A - Method for the production of an anti-reflection coating on surfaces of transparent optical elements formed of non-thermostable organic polymers - Google Patents

Method for the production of an anti-reflection coating on surfaces of transparent optical elements formed of non-thermostable organic polymers

Info

Publication number
GB1380025A
GB1380025A GB872273A GB872273A GB1380025A GB 1380025 A GB1380025 A GB 1380025A GB 872273 A GB872273 A GB 872273A GB 872273 A GB872273 A GB 872273A GB 1380025 A GB1380025 A GB 1380025A
Authority
GB
United Kingdom
Prior art keywords
layer
silicon oxide
refractive index
evaporation
reflection coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB872273A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of GB1380025A publication Critical patent/GB1380025A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Eyeglasses (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
GB872273A 1972-03-04 1973-02-22 Method for the production of an anti-reflection coating on surfaces of transparent optical elements formed of non-thermostable organic polymers Expired GB1380025A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2210505A DE2210505A1 (de) 1972-03-04 1972-03-04 Verfahren zur herstellung einer entspiegelungsschicht auf optischen elementen aus transparentem thermisch empfindlichem material, insbesondere aus kunststoff

Publications (1)

Publication Number Publication Date
GB1380025A true GB1380025A (en) 1975-01-08

Family

ID=5837925

Family Applications (1)

Application Number Title Priority Date Filing Date
GB872273A Expired GB1380025A (en) 1972-03-04 1973-02-22 Method for the production of an anti-reflection coating on surfaces of transparent optical elements formed of non-thermostable organic polymers

Country Status (9)

Country Link
JP (1) JPS514865B2 (enrdf_load_stackoverflow)
AT (1) AT322236B (enrdf_load_stackoverflow)
AU (1) AU473789B2 (enrdf_load_stackoverflow)
CH (1) CH549221A (enrdf_load_stackoverflow)
DE (1) DE2210505A1 (enrdf_load_stackoverflow)
ES (1) ES412299A1 (enrdf_load_stackoverflow)
FR (1) FR2174920B1 (enrdf_load_stackoverflow)
GB (1) GB1380025A (enrdf_load_stackoverflow)
IT (1) IT979700B (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4026292A (en) * 1974-09-17 1977-05-31 The Procter & Gamble Company Tampon having a mensesphilic foam treated with a liquid lubricant
DE2457474C3 (de) 1974-12-05 1978-10-19 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Verfahren zur Herstellung von reflexmindernden Mehrfachschichten und durch das Verfahren hergestellter optischer Körper
JPS5226237A (en) * 1975-08-25 1977-02-26 Ulvac Corp Process for treating the surface of a lens made of synthesized plastics
JPS5267647A (en) * 1975-12-03 1977-06-04 Matsushita Electric Ind Co Ltd Optical film
JPS52156643A (en) * 1976-06-23 1977-12-27 Nippon Chemical Ind Optical element of coated synthetic resin substrate
DE2738044C2 (de) * 1976-09-27 1984-11-29 AO Inc., Southbridge, Mass. Linse aus einem synthetischen Polymerisat
JPS5370836A (en) * 1976-12-07 1978-06-23 Ulvac Corp Method of coating nooreflect material onto plastic lens
DE3332872A1 (de) * 1983-09-12 1985-04-04 Optische Werke G. Rodenstock, 8000 München Reflexionsvermindernder belag fuer ein optisches element aus organischem material
DE4128547A1 (de) * 1991-08-28 1993-03-04 Leybold Ag Verfahren und vorrichtung fuer die herstellung einer entspiegelungsschicht auf linsen
DE102022207068A1 (de) * 2022-07-11 2024-01-11 Carl Zeiss Smt Gmbh Linse für eine zum Betrieb im DUV ausgelegte mikrolithographische Projektionsbelichtungsanlage, sowie Verfahren und Anordnung zum Ausbilden einer Antireflexschicht

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356523A (en) * 1964-02-10 1967-12-05 Mc Donnell Douglas Corp Polystyrene film containing an antireflection coating

Also Published As

Publication number Publication date
ES412299A1 (es) 1976-01-01
FR2174920B1 (enrdf_load_stackoverflow) 1976-06-11
AU473789B2 (en) 1976-07-01
AT322236B (de) 1975-05-12
JPS514865B2 (enrdf_load_stackoverflow) 1976-02-16
JPS48104555A (enrdf_load_stackoverflow) 1973-12-27
FR2174920A1 (enrdf_load_stackoverflow) 1973-10-19
DE2210505A1 (de) 1973-09-20
CH549221A (de) 1974-05-15
IT979700B (it) 1974-09-30
AU5265473A (en) 1974-08-29

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee