GB1375211A - - Google Patents
Info
- Publication number
- GB1375211A GB1375211A GB348171A GB348171A GB1375211A GB 1375211 A GB1375211 A GB 1375211A GB 348171 A GB348171 A GB 348171A GB 348171 A GB348171 A GB 348171A GB 1375211 A GB1375211 A GB 1375211A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cathode
- gun
- arc
- discharge
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/241—High voltage power supply or regulation circuits
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
- H02H7/20—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for electronic equipment
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Power Engineering (AREA)
- Electron Sources, Ion Sources (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Abstract
1375211 Supply circuits for electron guns GENERAL ELECTRIC CO Ltd 28 Jan 1972 [29 Jan 1971] 3481/71 Heading H2H A glow discharge electron gun 1 is supplied by a circuit comprising a capacitance C in series with an inductance L2, so that in the event of an arc discharge occurring in the gun, the capacitor discharges to momentarily reverse the voltage applied to the gun thereby extinguishing the arc discharge. In normal operation, a D.C. supply circuit 6 causes a glow discharge between the cathode 3 and anode 4 of the gun, ions from the discharge bombarding the cathode which emits an electron beam 12 for heating a target 8 in an argon filled enclosure 2. When an arc discharge occurs between the cathode and anode the capacitor C, the capacitance of which is much greater than the self capacitance of the gun, discharges and undergoes damped resonance with the inductor L2 so that the anode 4 becomes negative with respect to the cathode thereby extinguishing the arc. The cathode is therefore protected against excessive arc current.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB348171A GB1375211A (en) | 1972-01-28 | 1972-01-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB348171A GB1375211A (en) | 1972-01-28 | 1972-01-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1375211A true GB1375211A (en) | 1974-11-27 |
Family
ID=9759136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB348171A Expired GB1375211A (en) | 1972-01-28 | 1972-01-28 |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1375211A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2456384A1 (en) * | 1979-05-08 | 1980-12-05 | Leybold Heraeus Gmbh & Co Kg | HIGH VOLTAGE SUPPLY DEVICE FOR ELECTRONIC POWER GUNS |
EP2073243A1 (en) * | 2007-12-21 | 2009-06-24 | Applied Materials, Inc. | Linear electron source, evaporator using linear electron source, and applications of electron sources |
EP2088612A1 (en) * | 2007-12-21 | 2009-08-12 | Applied Materials, Inc. | Method of heating or cleaning a web or foil |
-
1972
- 1972-01-28 GB GB348171A patent/GB1375211A/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2456384A1 (en) * | 1979-05-08 | 1980-12-05 | Leybold Heraeus Gmbh & Co Kg | HIGH VOLTAGE SUPPLY DEVICE FOR ELECTRONIC POWER GUNS |
EP2073243A1 (en) * | 2007-12-21 | 2009-06-24 | Applied Materials, Inc. | Linear electron source, evaporator using linear electron source, and applications of electron sources |
WO2009080411A1 (en) * | 2007-12-21 | 2009-07-02 | Applied Materials, Inc. | Linear electron source, evaporator using linear electron source, and applications of electron sources |
EP2088612A1 (en) * | 2007-12-21 | 2009-08-12 | Applied Materials, Inc. | Method of heating or cleaning a web or foil |
US8294115B2 (en) | 2007-12-21 | 2012-10-23 | Applied Materials, Inc. | Linear electron source, evaporator using linear electron source, and applications of electron sources |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |