GB1375091A - - Google Patents

Info

Publication number
GB1375091A
GB1375091A GB13672A GB13672A GB1375091A GB 1375091 A GB1375091 A GB 1375091A GB 13672 A GB13672 A GB 13672A GB 13672 A GB13672 A GB 13672A GB 1375091 A GB1375091 A GB 1375091A
Authority
GB
United Kingdom
Prior art keywords
beam splitter
reflector
light
members
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB13672A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1375091A publication Critical patent/GB1375091A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
GB13672A 1971-02-01 1972-01-03 Expired GB1375091A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11159671A 1971-02-01 1971-02-01

Publications (1)

Publication Number Publication Date
GB1375091A true GB1375091A (enrdf_load_stackoverflow) 1974-11-27

Family

ID=22339394

Family Applications (1)

Application Number Title Priority Date Filing Date
GB13672A Expired GB1375091A (enrdf_load_stackoverflow) 1971-02-01 1972-01-03

Country Status (6)

Country Link
CA (1) CA950657A (enrdf_load_stackoverflow)
DE (1) DE2201194B2 (enrdf_load_stackoverflow)
FR (1) FR2124998A5 (enrdf_load_stackoverflow)
GB (1) GB1375091A (enrdf_load_stackoverflow)
IT (1) IT950612B (enrdf_load_stackoverflow)
SE (1) SE383780B (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3069083D1 (en) * 1980-12-02 1984-10-04 Heidenhain Gmbh Dr Johannes Process for incrementally measuring geometrical dimensions, and devices to perform the process
US4509858A (en) * 1983-01-17 1985-04-09 Gca Corporation/Tropel Division Compact, linear measurement interferometer with zero abbe error
DE3421213C2 (de) * 1984-06-07 1986-08-28 Daimler-Benz Ag, 7000 Stuttgart Zweikanal-Zweifrequenz-Laserinterferometer
DE3835892C1 (en) * 1988-10-21 1990-01-11 Daimler-Benz Aktiengesellschaft, 7000 Stuttgart, De Long-path laser interferometer

Also Published As

Publication number Publication date
IT950612B (it) 1973-06-20
DE2201194A1 (de) 1972-08-17
AU3752271A (en) 1973-09-27
DE2201194B2 (de) 1973-01-04
FR2124998A5 (enrdf_load_stackoverflow) 1972-09-22
SE383780B (sv) 1976-03-29
CA950657A (en) 1974-07-09

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Legal Events

Date Code Title Description
PS Patent sealed
PE20 Patent expired after termination of 20 years