FR2124998A5 - - Google Patents

Info

Publication number
FR2124998A5
FR2124998A5 FR7203288A FR7203288A FR2124998A5 FR 2124998 A5 FR2124998 A5 FR 2124998A5 FR 7203288 A FR7203288 A FR 7203288A FR 7203288 A FR7203288 A FR 7203288A FR 2124998 A5 FR2124998 A5 FR 2124998A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7203288A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of FR2124998A5 publication Critical patent/FR2124998A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
FR7203288A 1971-02-01 1972-02-01 Expired FR2124998A5 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11159671A 1971-02-01 1971-02-01

Publications (1)

Publication Number Publication Date
FR2124998A5 true FR2124998A5 (enrdf_load_stackoverflow) 1972-09-22

Family

ID=22339394

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7203288A Expired FR2124998A5 (enrdf_load_stackoverflow) 1971-02-01 1972-02-01

Country Status (6)

Country Link
CA (1) CA950657A (enrdf_load_stackoverflow)
DE (1) DE2201194B2 (enrdf_load_stackoverflow)
FR (1) FR2124998A5 (enrdf_load_stackoverflow)
GB (1) GB1375091A (enrdf_load_stackoverflow)
IT (1) IT950612B (enrdf_load_stackoverflow)
SE (1) SE383780B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0053199A1 (de) * 1980-12-02 1982-06-09 Dr. Johannes Heidenhain GmbH Verfahren zum schrittweisen Messen von geometrischen Grössen und Vorrichtungen zur Durchführung des Verfahrens

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4509858A (en) * 1983-01-17 1985-04-09 Gca Corporation/Tropel Division Compact, linear measurement interferometer with zero abbe error
DE3421213C2 (de) * 1984-06-07 1986-08-28 Daimler-Benz Ag, 7000 Stuttgart Zweikanal-Zweifrequenz-Laserinterferometer
DE3835892C1 (en) * 1988-10-21 1990-01-11 Daimler-Benz Aktiengesellschaft, 7000 Stuttgart, De Long-path laser interferometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0053199A1 (de) * 1980-12-02 1982-06-09 Dr. Johannes Heidenhain GmbH Verfahren zum schrittweisen Messen von geometrischen Grössen und Vorrichtungen zur Durchführung des Verfahrens

Also Published As

Publication number Publication date
DE2201194B2 (de) 1973-01-04
SE383780B (sv) 1976-03-29
DE2201194A1 (de) 1972-08-17
GB1375091A (enrdf_load_stackoverflow) 1974-11-27
CA950657A (en) 1974-07-09
IT950612B (it) 1973-06-20
AU3752271A (en) 1973-09-27

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