GB1372885A - X-ray topography equipment - Google Patents

X-ray topography equipment

Info

Publication number
GB1372885A
GB1372885A GB4855971A GB4855971A GB1372885A GB 1372885 A GB1372885 A GB 1372885A GB 4855971 A GB4855971 A GB 4855971A GB 4855971 A GB4855971 A GB 4855971A GB 1372885 A GB1372885 A GB 1372885A
Authority
GB
United Kingdom
Prior art keywords
ray
crystal
intensity
integrator
pulse generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4855971A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1372885A publication Critical patent/GB1372885A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/205—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials using diffraction cameras

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

1372885 X-ray diffraction apparatus SIEMENS AG 19 Oct 1971 [20 Oct 1970] 48559/71 Heading H5R [Also in Division G3] In X-ray diffraction equipment for detection of lattice faults in a crystal the mean position of oscillations applied to the crystal are automatically varied by a control system to maintain the incident X-ray at a predetermined angle to the crystal surface, the control system including a counter tube measuring the intensity of the emergent diffracted X-ray whose output is fed under the control of a pulse generator through an integrator to a differential stage. The crystal wafer 1, Fig. 1, is fed past a collimated incident X-ray beam 5 simultaneously with film 10, the intensity of the diffracted ray 6 varying with the lattice faults. A control system 31, 32, 41, 51, 52 comprises a counter tube 16, which monitors the intensity of the diffracted ray and is switchably connected by a cyclic timing pulse generator 41, for equal but time lagged intervals, e.g. 4 sees., to capacitors (35 or 135), Fig. 3 (not shown), in integrator 31. Any change in intensity produces different charges on the capacitors, the charges being compared by amplifier 32, whose output controls the position of a motor 25, Fig. 2, in a direction 28, thus adjusting the mean position of oscillations 22 of the crystal about axis 21. As in Figs. 4 and 5 (not shown), pulse generator 41 comprises monostable multivibrators, each with an adjustable delay, connected in cyclic cascade and to integrator 31 using relays.
GB4855971A 1970-10-20 1971-10-19 X-ray topography equipment Expired GB1372885A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702051511 DE2051511B2 (en) 1970-10-20 1970-10-20 ROENTGENTOPOGRAPHY DEVICE

Publications (1)

Publication Number Publication Date
GB1372885A true GB1372885A (en) 1974-11-06

Family

ID=5785657

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4855971A Expired GB1372885A (en) 1970-10-20 1971-10-19 X-ray topography equipment

Country Status (6)

Country Link
US (1) US3751662A (en)
CH (1) CH532785A (en)
DE (1) DE2051511B2 (en)
FR (1) FR2111520A5 (en)
GB (1) GB1372885A (en)
SE (1) SE368626B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2166630A (en) * 1984-10-27 1986-05-08 Mtu Muenchen Gmbh Method and apparatus for inspecting a crystalline object

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3992624A (en) * 1975-04-29 1976-11-16 The United States Of America As Represented By The Secretary Of The Army Apparatus and method of X-ray topography at cryogenic temperature
DE4100680A1 (en) * 1991-01-11 1992-07-23 Siemens Ag Non-destructive detection of deformations of semiconductor crystal in housing - using goniometer to excite crystal by X=ray beam penetrating housing via shutter

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2829268A (en) * 1952-05-05 1958-04-01 Industrial Nucleonics Corp Standardization system
US3177360A (en) * 1962-09-14 1965-04-06 Norton Co Diffractometer with a rotatable support to hold plural samples for automatic analysis of crystalline material
US3435219A (en) * 1967-01-30 1969-03-25 Atomic Energy Commission Neutron spectrometer for high neutron flux

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2166630A (en) * 1984-10-27 1986-05-08 Mtu Muenchen Gmbh Method and apparatus for inspecting a crystalline object

Also Published As

Publication number Publication date
SE368626B (en) 1974-07-08
FR2111520A5 (en) 1972-06-02
DE2051511A1 (en) 1972-05-31
US3751662A (en) 1973-08-07
DE2051511C3 (en) 1973-11-29
CH532785A (en) 1973-01-15
DE2051511B2 (en) 1973-05-03

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee