GB1366748A - Silicon nitride layers - Google Patents
Silicon nitride layersInfo
- Publication number
- GB1366748A GB1366748A GB4585372A GB4585372A GB1366748A GB 1366748 A GB1366748 A GB 1366748A GB 4585372 A GB4585372 A GB 4585372A GB 4585372 A GB4585372 A GB 4585372A GB 1366748 A GB1366748 A GB 1366748A
- Authority
- GB
- United Kingdom
- Prior art keywords
- silicon nitride
- nitride layers
- layers
- silicon
- nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
- H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
- H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
- H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712149898 DE2149898A1 (de) | 1971-10-06 | 1971-10-06 | Verfahren zur herstellung passivierter halbleiterbauelemente |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1366748A true GB1366748A (en) | 1974-09-11 |
Family
ID=5821635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB4585372A Expired GB1366748A (en) | 1971-10-06 | 1972-10-05 | Silicon nitride layers |
Country Status (5)
| Country | Link |
|---|---|
| DE (1) | DE2149898A1 (enExample) |
| FR (1) | FR2156016B1 (enExample) |
| GB (1) | GB1366748A (enExample) |
| IT (1) | IT968555B (enExample) |
| NL (1) | NL7213432A (enExample) |
-
1971
- 1971-10-06 DE DE19712149898 patent/DE2149898A1/de not_active Ceased
-
1972
- 1972-10-03 IT IT30006/72A patent/IT968555B/it active
- 1972-10-04 NL NL7213432A patent/NL7213432A/xx unknown
- 1972-10-04 FR FR7235130A patent/FR2156016B1/fr not_active Expired
- 1972-10-05 GB GB4585372A patent/GB1366748A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| IT968555B (it) | 1974-03-20 |
| DE2149898A1 (de) | 1973-04-12 |
| FR2156016A1 (enExample) | 1973-05-25 |
| NL7213432A (enExample) | 1973-04-10 |
| FR2156016B1 (enExample) | 1977-04-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |