GB1341759A - Film deposition - Google Patents
Film depositionInfo
- Publication number
- GB1341759A GB1341759A GB2334371A GB2334371A GB1341759A GB 1341759 A GB1341759 A GB 1341759A GB 2334371 A GB2334371 A GB 2334371A GB 2334371 A GB2334371 A GB 2334371A GB 1341759 A GB1341759 A GB 1341759A
- Authority
- GB
- United Kingdom
- Prior art keywords
- source
- substrate
- silicon
- electrodes
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/221—Ion beam deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3178—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for applying thin layers on objects
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
1341759 Sputtering and evaporation apparatus WHITTAKER CORP 19 April 1971 [20 March 1970] 23343/71 Heading C7F [Also in Division H1] Apparatus for depositing a film 21 upon a substrate 22 comprises an ion source 10, a deposition chamber 20 having holder means (not shown) for containing the substrate 22, an apertured constricting member 26 between said ion source 10 and deposition chamber 20, and an apertured extracting electrode 24 situated between said constricting member 26 and said means for containing the substrate 22. To deposit a silicon film 21 on a single crystal silicon substrate 22, the ion source electrodes 14 and 15 are made of silicon and are connected across a power supply 34 to establish a discharge. A neutral gas such as A, H or He, or a more active gas such as N or O, or a mixture thereof, is introduced through a pipe 12 and ionized to sputter or vaporize atoms of silicon from the cathode electrode into the discharge where they are ionized. Electron paths are constrained by the magnetic field of a coil 30 to increase the likelihood of ionizing the silicon atoms. Pressure in the ion source is determined by a vacuum pump connected to pipe 13. The main function of the member 26 is to separate the higher pressure source chamber 10 from the deposition chamber 20 which is maintained at a pressure of about 10<SP>-6</SP> torr, by a vacuum line 29. Deposition of compounds, e.g. aluminium oxide, silicon dioxide, or silicon nitride can be achieved either by using electrodes of Si or Al and introducing the necessary O or N gas through the pipe 12, or by making the electrodes 14 and 15 of the necessary materials e.g. silicon oxide or nitride. Tungsten carbide can be deposited by using W and C electrodes or by introducing a tungsten compound in gaseous form and a hydrocarbon gas into the chamber 10. Insulating films of carbon in diamond-like form can be deposited by using C electrodes and a hydro-carbon gas, e.g. methane. Electrode 24 is biased positively with respect to the source 10 by a supply 36 and operates as an anode to extract electrons from the source. The electric field generated by the extracted electrons pulls positive ions along with them. Electrode 26 is connected to a potential divider comprising resistors 40 and 42 connected across supply 36, or may be left floating. A discharge restricting insulating shield 17 in the source 10 may also be left floating. A focussing electrode 19 is shown connected to the anode 24 but may be connected to a separate biasing supply. An A.C. or R.F. voltage from an oscillator 54 is superimposed by a transformer 52 on to the D.C. supply 50 to the substrate 22 to prevent the build up of a positive charge when the deposited film or the substrate is an insulator. In a modified form of the apparatus Fig. 2 (not shown) a vaporizing source of the material to be deposited is located in the deposition chamber. This may be a sputtering source, a crucible type source, or a resistively heated ribbon. Atoms from this source impinging on the substrate are then energized by a beam of gaseous ions, e.g. A, from the source 10.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US2128270A | 1970-03-20 | 1970-03-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1341759A true GB1341759A (en) | 1973-12-25 |
Family
ID=21803338
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2334371A Expired GB1341759A (en) | 1970-03-20 | 1971-05-19 | Film deposition |
Country Status (5)
Country | Link |
---|---|
DE (1) | DE2113375A1 (en) |
ES (1) | ES389693A1 (en) |
FR (1) | FR2084956A5 (en) |
GB (1) | GB1341759A (en) |
ZA (1) | ZA711702B (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2127439A (en) * | 1982-09-27 | 1984-04-11 | Konishiroku Photo Ind | Vacuum depositing compound semi conductors in activated hydrogen |
GB2128637A (en) * | 1982-09-28 | 1984-05-02 | Technion Res & Dev Foundation | Depositing a carbon film on a substrate |
GB2171726A (en) * | 1985-03-01 | 1986-09-03 | Balzers Hochvakuum | A method for reactive evaporation deposition of layers of oxides nitrides oxynitrides and carbides |
GB2182350A (en) * | 1985-07-01 | 1987-05-13 | Atomic Energy Authority Uk | Sputter ion plating |
GB2194555A (en) * | 1986-07-31 | 1988-03-09 | Nippon Telegraph & Telephone | Method of manufacturing thin compound oxide film and apparatus for manufacturing thin oxide film |
GB2178061B (en) * | 1985-07-01 | 1989-04-26 | Atomic Energy Authority Uk | Coating improvements |
GB2213501A (en) * | 1987-12-11 | 1989-08-16 | Plessey Co Plc | Production of superconducting thin films by ion beam sputtering from a single ceramic target |
US7608151B2 (en) * | 2005-03-07 | 2009-10-27 | Sub-One Technology, Inc. | Method and system for coating sections of internal surfaces |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE2909T1 (en) * | 1978-07-08 | 1983-04-15 | Wolfgang Kieferle | METHOD OF LAYING A METAL OR ALLOY LAYER ON AN ELECTRICALLY CONDUCTIVE WORKPIECE AND APPARATUS FOR CARRYING OUT THE SAME. |
US4822466A (en) * | 1987-06-25 | 1989-04-18 | University Of Houston - University Park | Chemically bonded diamond films and method for producing same |
US4816291A (en) * | 1987-08-19 | 1989-03-28 | The Regents Of The University Of California | Process for making diamond, doped diamond, diamond-cubic boron nitride composite films |
-
1971
- 1971-03-16 ZA ZA711702A patent/ZA711702B/en unknown
- 1971-03-17 ES ES389693A patent/ES389693A1/en not_active Expired
- 1971-03-19 DE DE19712113375 patent/DE2113375A1/en active Pending
- 1971-03-19 FR FR7109878A patent/FR2084956A5/fr not_active Expired
- 1971-05-19 GB GB2334371A patent/GB1341759A/en not_active Expired
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2127439A (en) * | 1982-09-27 | 1984-04-11 | Konishiroku Photo Ind | Vacuum depositing compound semi conductors in activated hydrogen |
GB2128637A (en) * | 1982-09-28 | 1984-05-02 | Technion Res & Dev Foundation | Depositing a carbon film on a substrate |
GB2171726A (en) * | 1985-03-01 | 1986-09-03 | Balzers Hochvakuum | A method for reactive evaporation deposition of layers of oxides nitrides oxynitrides and carbides |
GB2182350A (en) * | 1985-07-01 | 1987-05-13 | Atomic Energy Authority Uk | Sputter ion plating |
GB2182350B (en) * | 1985-07-01 | 1989-04-26 | Atomic Energy Authority Uk | Coating improvements |
GB2178061B (en) * | 1985-07-01 | 1989-04-26 | Atomic Energy Authority Uk | Coating improvements |
GB2194555A (en) * | 1986-07-31 | 1988-03-09 | Nippon Telegraph & Telephone | Method of manufacturing thin compound oxide film and apparatus for manufacturing thin oxide film |
GB2194555B (en) * | 1986-07-31 | 1991-02-13 | Nippon Telegraph & Telephone | Method of manufacturing thin compound oxide film and apparatus for manufacturing thin oxide film |
US5016563A (en) * | 1986-07-31 | 1991-05-21 | Nippon Telegraph And Telephone Corporation | Method of manufacturing thin compound oxide film and apparatus for manufacturing thin oxide film |
GB2213501A (en) * | 1987-12-11 | 1989-08-16 | Plessey Co Plc | Production of superconducting thin films by ion beam sputtering from a single ceramic target |
US7608151B2 (en) * | 2005-03-07 | 2009-10-27 | Sub-One Technology, Inc. | Method and system for coating sections of internal surfaces |
Also Published As
Publication number | Publication date |
---|---|
DE2113375A1 (en) | 1971-10-07 |
ZA711702B (en) | 1971-12-29 |
FR2084956A5 (en) | 1971-12-17 |
ES389693A1 (en) | 1974-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PLNP | Patent lapsed through nonpayment of renewal fees |