GB1335311A - Variable aperture photoexposure device - Google Patents

Variable aperture photoexposure device

Info

Publication number
GB1335311A
GB1335311A GB2750871A GB2750871A GB1335311A GB 1335311 A GB1335311 A GB 1335311A GB 2750871 A GB2750871 A GB 2750871A GB 2750871 A GB2750871 A GB 2750871A GB 1335311 A GB1335311 A GB 1335311A
Authority
GB
United Kingdom
Prior art keywords
spot
directions
size
light spot
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2750871A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GERBER SCIENT INDSTRUMENT CO
Original Assignee
GERBER SCIENT INDSTRUMENT CO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GERBER SCIENT INDSTRUMENT CO filed Critical GERBER SCIENT INDSTRUMENT CO
Publication of GB1335311A publication Critical patent/GB1335311A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B9/00—Exposure-making shutters; Diaphragms
    • G03B9/08—Shutters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Control For Cameras (AREA)
GB2750871A 1970-09-15 1971-06-11 Variable aperture photoexposure device Expired GB1335311A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7235970A 1970-09-15 1970-09-15

Publications (1)

Publication Number Publication Date
GB1335311A true GB1335311A (en) 1973-10-24

Family

ID=22107076

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2750871A Expired GB1335311A (en) 1970-09-15 1971-06-11 Variable aperture photoexposure device

Country Status (4)

Country Link
US (1) US3695154A (enExample)
JP (1) JPS519617B1 (enExample)
FR (1) FR2098005A5 (enExample)
GB (1) GB1335311A (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836916A (en) * 1973-02-26 1974-09-17 Ibm Apparatus for exposing lines on a photosensitive surface
US3950763A (en) * 1974-10-29 1976-04-13 California Computer Products, Inc. Cathode ray tube lighthead
US4176926A (en) * 1976-09-28 1979-12-04 Quest Automation Limited Optical projection apparatus
US4231659A (en) * 1979-04-11 1980-11-04 The Gerber Scientific Instrument Company Method of making an overlay mask and a printing plate therefrom
US4249808A (en) * 1979-08-10 1981-02-10 The Gerber Scientific Instrument Company Photoplotting in color with exposure budgeting
US4363539A (en) * 1981-07-20 1982-12-14 Gerber Scientific, Inc. Photohead with flashing beam
US4500182A (en) * 1982-12-27 1985-02-19 Nicolet Instrument Corporation Photoplotter
US4573779A (en) * 1983-12-30 1986-03-04 International Business Machines Corporation Variable size circular aperture camera
US4566015A (en) * 1984-06-07 1986-01-21 Polaroid Corporation Image recording apparatus with adjustable mask
US4675702A (en) * 1986-03-14 1987-06-23 Gerber Scientific Inc. Photoplotter using a light valve device and process for exposing graphics
DE3620017A1 (de) * 1986-06-13 1987-12-17 Mivatec Gmbh Fotoplotverfahren und fotoplotter zum belichten eines films
DE8804625U1 (de) * 1988-04-08 1988-06-09 Winter, Hans-Joachim, 2000 Hamburg Zeichenmaschine mit Zeichenstift
DE102008018763A1 (de) * 2008-04-14 2009-11-05 Kristin Bartsch Lithografiebelichtungseinrichtung

Also Published As

Publication number Publication date
DE2136504A1 (de) 1972-03-16
DE2136504B2 (de) 1975-08-21
JPS519617B1 (enExample) 1976-03-29
US3695154A (en) 1972-10-03
FR2098005A5 (enExample) 1972-03-03

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee