GB1319025A - Removal of surface projections - Google Patents

Removal of surface projections

Info

Publication number
GB1319025A
GB1319025A GB2278971A GB2278971A GB1319025A GB 1319025 A GB1319025 A GB 1319025A GB 2278971 A GB2278971 A GB 2278971A GB 2278971 A GB2278971 A GB 2278971A GB 1319025 A GB1319025 A GB 1319025A
Authority
GB
United Kingdom
Prior art keywords
wafer
vacuum
plate
spikes
projections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2278971A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1319025A publication Critical patent/GB1319025A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0428—Apparatus for mechanical treatment or grinding or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B39/00—Burnishing machines or devices, i.e. requiring pressure members for compacting the surface zone; Accessories therefor
    • B24B39/06—Burnishing machines or devices, i.e. requiring pressure members for compacting the surface zone; Accessories therefor designed for working plane surfaces
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00—Severing by tearing or breaking
    • Y10T225/10—Methods
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00—Severing by tearing or breaking
    • Y10T225/30—Breaking or tearing apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00—Severing by tearing or breaking
    • Y10T225/30—Breaking or tearing apparatus
    • Y10T225/371—Movable breaking tool

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
GB2278971A 1970-03-16 1971-04-19 Removal of surface projections Expired GB1319025A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1967570A 1970-03-16 1970-03-16

Publications (1)

Publication Number Publication Date
GB1319025A true GB1319025A (en) 1973-05-31

Family

ID=21794452

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2278971A Expired GB1319025A (en) 1970-03-16 1971-04-19 Removal of surface projections

Country Status (4)

Country Link
US (1) US3656671A (enExample)
DE (1) DE2104671A1 (enExample)
FR (1) FR2083971A5 (enExample)
GB (1) GB1319025A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3990925A (en) * 1975-03-31 1976-11-09 Bell Telephone Laboratories, Incorporated Removal of projections on epitaxial layers
JPS5612723A (en) * 1979-07-11 1981-02-07 Fujitsu Ltd Manufacture of semiconductor device
JPS56152562A (en) * 1980-04-24 1981-11-26 Fujitsu Ltd Grinder
US4347957A (en) * 1980-04-30 1982-09-07 Universal Maschinen-U Apparatebau Gmbh & Co., Kg Apparatus for de-burring of workpieces
US4540109A (en) * 1983-11-21 1985-09-10 Monsanto Company Process for severing a tube sheet
US6511914B2 (en) * 1999-01-22 2003-01-28 Semitool, Inc. Reactor for processing a workpiece using sonic energy

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US237221A (en) * 1881-02-01 Assianoe of
US2280204A (en) * 1941-04-24 1942-04-21 Owens Illinois Glass Co Method and means for removing flash

Also Published As

Publication number Publication date
US3656671A (en) 1972-04-18
FR2083971A5 (enExample) 1971-12-17
DE2104671A1 (de) 1971-09-30

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees