GB1312266A - Optical measuring systems - Google Patents

Optical measuring systems

Info

Publication number
GB1312266A
GB1312266A GB1312266DA GB1312266A GB 1312266 A GB1312266 A GB 1312266A GB 1312266D A GB1312266D A GB 1312266DA GB 1312266 A GB1312266 A GB 1312266A
Authority
GB
United Kingdom
Prior art keywords
signals
photo
pattern
cells
relative movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ferranti International PLC
Original Assignee
Ferranti PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ferranti PLC filed Critical Ferranti PLC
Publication of GB1312266A publication Critical patent/GB1312266A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)

Abstract

1312266 Measuring displacement photoelectrlcally FERRANTI Ltd 19 April 1971 [17 Dec 1969 26 March 1971] 61506/69 and 7958/ 71 Heading G1A [Also in Division G4] In an apparatus for monitoring the relative movement of two members in one or other of two opposite directions and in which a light radiation wave pattern is arranged to vary cyclically with the relative movement of the members, e. g. a fixed scale grating 4 and a movable index grating 5, three photo-cells 7-9 responsive to the varying pattern have their outputs differentially arranged- Fig. 1- to provide two signals whose phase relationship is indicative of the relative movement. Collinated light from a slit 2 is received by three photo-voltaic cells after passage through the two gratings, which preferably have different pitches. The photo-cells are located so that the signals from differential amplifiers 10, 11 are in phase quadrature. These two signals are then supplied to a bi-directional counter which displays the number of quarter cycles of the signals. For measuring angular movement, the gratings may be of the radial or drum variety. In a further embodiment, the light pattern is derived from a laser interferometer having an optical wedge (25) in the fixed-length reference path Fig. 6, (not shown). A corner cube mirror (27) is attached to the object whose movement is to be monitored, this mirror defining the measuring path. The interference pattern is observed by three detectors whose outputs are arranged as shown in Fig. 1.
GB1312266D 1969-12-17 1969-12-17 Optical measuring systems Expired GB1312266A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB6150669 1969-12-17

Publications (1)

Publication Number Publication Date
GB1312266A true GB1312266A (en) 1973-04-04

Family

ID=10487112

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1312266D Expired GB1312266A (en) 1969-12-17 1969-12-17 Optical measuring systems

Country Status (1)

Country Link
GB (1) GB1312266A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0147514A1 (en) * 1983-08-02 1985-07-10 Dr. Johannes Heidenhain GmbH Photoelectric length or angle measuring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0147514A1 (en) * 1983-08-02 1985-07-10 Dr. Johannes Heidenhain GmbH Photoelectric length or angle measuring device

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee