GB1304534A - - Google Patents

Info

Publication number
GB1304534A
GB1304534A GB3242470A GB3242470A GB1304534A GB 1304534 A GB1304534 A GB 1304534A GB 3242470 A GB3242470 A GB 3242470A GB 3242470 A GB3242470 A GB 3242470A GB 1304534 A GB1304534 A GB 1304534A
Authority
GB
United Kingdom
Prior art keywords
holes
vacuum
floor
articles
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3242470A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1304534A publication Critical patent/GB1304534A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
GB3242470A 1969-07-25 1970-07-03 Expired GB1304534A (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US84491869A 1969-07-25 1969-07-25

Publications (1)

Publication Number Publication Date
GB1304534A true GB1304534A (enExample) 1973-01-24

Family

ID=25293966

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3242470A Expired GB1304534A (enExample) 1969-07-25 1970-07-03

Country Status (5)

Country Link
US (1) US3717381A (enExample)
JP (1) JPS5021342B1 (enExample)
CA (1) CA945518A (enExample)
FR (1) FR2053154B1 (enExample)
GB (1) GB1304534A (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6076652A (en) 1971-04-16 2000-06-20 Texas Instruments Incorporated Assembly line system and apparatus controlling transfer of a workpiece
US3947236A (en) * 1971-11-29 1976-03-30 Lasch Jr Cecil A Fluid bearing transfer and heat treating apparatus and method
US3923342A (en) * 1974-06-10 1975-12-02 Motorola Inc Apparatus and method for handling frangible objects
US3976329A (en) * 1974-09-09 1976-08-24 Texas Instruments Incorporated Vacuum braking system for semiconductor wafers
DK604074A (da) * 1974-11-20 1976-05-21 Chemical Reactor Equip As Apparat til beroringsfri transport af sarbare, hovedsageligt skiveformede objekter, navnlig tyndfilmbelagte halvledersubstrater
US3975057A (en) * 1975-02-06 1976-08-17 The Motch & Merryweather Machinery Company Stopping device for air conveyor
US3976330A (en) * 1975-10-01 1976-08-24 International Business Machines Corporation Transport system for semiconductor wafer multiprocessing station system
DD151387A1 (de) * 1980-06-02 1981-10-14 Erich Adler Verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte
US4600936A (en) * 1983-07-12 1986-07-15 International Business Machines Corporation Chip registration mechanism
FR2620113B1 (fr) * 1987-08-11 1989-11-17 Commissariat Energie Atomique Transporteur de tranches empilables dans des cassettes
DE4038587A1 (de) * 1990-12-04 1992-06-11 Hamatech Halbleiter Maschinenb Transportvorrichtung fuer substrate
US6864570B2 (en) * 1993-12-17 2005-03-08 The Regents Of The University Of California Method and apparatus for fabricating self-assembling microstructures
JPH10129886A (ja) * 1996-10-15 1998-05-19 Heidelberger Druckmas Ag 枚葉紙処理機械の自動給紙機における枚葉紙用紙差し板
GB2353269A (en) * 1999-08-20 2001-02-21 Markem Tech Ltd Method and apparatus for conveying lamina objects
KR101234473B1 (ko) * 2005-06-20 2013-02-18 엘지디스플레이 주식회사 비접촉 반송 장치에서의 지지플랫폼
EP2815982B1 (en) * 2013-06-21 2018-06-20 Airbus Operations GmbH Cargo compartment and method for loading a cargo compartment
US10373858B2 (en) 2016-04-06 2019-08-06 Lam Research Corporation Chuck for edge bevel removal and method for centering a wafer prior to edge bevel removal
KR102300934B1 (ko) * 2016-06-21 2021-09-13 코아 플로우 리미티드 에지 리프팅을 동반한 비접촉 지지 플랫폼
DE102022116484A1 (de) 2022-07-01 2024-01-04 Deutsche Post Ag Vorrichtung zum Ausrichten von Objekten

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3180688A (en) * 1963-05-22 1965-04-27 Rudolph E Futer Air-lift conveying of solids

Also Published As

Publication number Publication date
DE2036337A1 (de) 1971-02-04
FR2053154A1 (enExample) 1971-04-16
CA945518A (en) 1974-04-16
FR2053154B1 (enExample) 1974-03-22
JPS5021342B1 (enExample) 1975-07-22
US3717381A (en) 1973-02-20
DE2036337B2 (de) 1977-02-03

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PE20 Patent expired after termination of 20 years