GB1296641A - - Google Patents

Info

Publication number
GB1296641A
GB1296641A GB1296641DA GB1296641A GB 1296641 A GB1296641 A GB 1296641A GB 1296641D A GB1296641D A GB 1296641DA GB 1296641 A GB1296641 A GB 1296641A
Authority
GB
United Kingdom
Prior art keywords
axes
bridge
plane
orthogonal
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1296641A publication Critical patent/GB1296641A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
GB1296641D 1970-05-20 1971-05-20 Expired GB1296641A (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US3894070A 1970-05-20 1970-05-20

Publications (1)

Publication Number Publication Date
GB1296641A true GB1296641A (enExample) 1972-11-15

Family

ID=21902782

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1296641D Expired GB1296641A (enExample) 1970-05-20 1971-05-20

Country Status (6)

Country Link
US (1) US3641812A (enExample)
JP (1) JPS5232236B1 (enExample)
DE (1) DE2123690B2 (enExample)
FR (1) FR2091825A5 (enExample)
GB (1) GB1296641A (enExample)
SE (1) SE380623B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2000639A (en) * 1977-06-29 1979-01-10 Tokyo Shibaura Electric Co Semiconductor device

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2146339B2 (de) * 1971-09-16 1975-04-03 Industrie-Automation Gmbh & Co, 6900 Heidelberg Elektromechanischer Kraft- oder Druckmeßwandler
US3780588A (en) * 1972-03-31 1973-12-25 Honeywell Inc Differential pressure responsive apparatus
US3930412A (en) * 1975-01-03 1976-01-06 Kulite Semiconductor Products, Inc. Electrically scanned pressure transducer configurations
US4050313A (en) * 1975-06-04 1977-09-27 Hitachi, Ltd. Semiconductor pressure transducer
JPS54113379A (en) * 1978-02-23 1979-09-04 Nec Corp Pressure gauge
US4205556A (en) * 1979-02-12 1980-06-03 Rockwell International Corporation Circuitry for strain sensitive apparatus
US4321832A (en) * 1980-03-07 1982-03-30 Rockwell International Corporation High accuracy measuring apparatus
DE3532333A1 (de) * 1985-09-11 1987-03-19 Degussa Elektrischer fuehler fuer druck- und kraftmessungen
US4896098A (en) * 1987-01-08 1990-01-23 Massachusetts Institute Of Technology Turbulent shear force microsensor
DE3702412A1 (de) * 1987-01-28 1988-08-18 Philips Patentverwaltung Druckaufnehmer mit einem siliziumkoerper
EP0625701A1 (en) * 1987-04-24 1994-11-23 Enplas Laboratories, Inc. Force detector using piezoresistive elements
US5397911A (en) * 1991-04-02 1995-03-14 Honda Giken Kogyo Kabushiki Kaisha Semiconductor sensor with plural gate electrodes
JP3009239B2 (ja) * 1991-04-02 2000-02-14 本田技研工業株式会社 半導体センサ
JP3131642B2 (ja) * 1994-09-14 2001-02-05 日本電子工業株式会社 応力複合化センサ及びこれを用いた構造体の応力測定装置
WO2016159245A1 (ja) * 2015-03-31 2016-10-06 株式会社ＮｅｊｉＬａｗ 通電路付部材及び通電路のパターニング方法、部材変化計測方法
DE102018125079B4 (de) * 2018-10-10 2023-12-28 Schaeffler Technologies AG & Co. KG Spannungswellengetriebe und Übertragungselement hierfür sowie Roboterarm und Verfahren zum Messen eines Drehmomentes

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3123788A (en) * 1964-03-03 Piezoresistive gage
US3049685A (en) * 1960-05-18 1962-08-14 Electro Optical Systems Inc Electrical strain transducer
US3186217A (en) * 1960-12-02 1965-06-01 Bell Telephone Labor Inc Piezoresistive stress transducer
US3251222A (en) * 1961-04-20 1966-05-17 Gen Electric Strain sensitive apparatus and elements therefor
US3292128A (en) * 1961-12-26 1966-12-13 Gen Electric Semiconductor strain sensitive devices
US3230763A (en) * 1962-12-27 1966-01-25 Honeywell Inc Semiconductor pressure diaphragm
US3402609A (en) * 1964-09-29 1968-09-24 Tokota Chuo Kenkyusho Kk Semiconductor mechanical-to-electrical transducer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2000639A (en) * 1977-06-29 1979-01-10 Tokyo Shibaura Electric Co Semiconductor device
GB2000639B (en) * 1977-06-29 1982-03-31 Tokyo Shibaura Electric Co Semiconductor device

Also Published As

Publication number Publication date
SE380623B (sv) 1975-11-10
US3641812A (en) 1972-02-15
JPS5232236B1 (enExample) 1977-08-19
DE2123690A1 (de) 1971-12-09
FR2091825A5 (enExample) 1972-01-14
DE2123690B2 (de) 1979-04-05

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee