GB1289645A - - Google Patents

Info

Publication number
GB1289645A
GB1289645A GB1289645DA GB1289645A GB 1289645 A GB1289645 A GB 1289645A GB 1289645D A GB1289645D A GB 1289645DA GB 1289645 A GB1289645 A GB 1289645A
Authority
GB
United Kingdom
Prior art keywords
wafer
filter
mask
patterns
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1289645A publication Critical patent/GB1289645A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/46—Systems using spatial filters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
GB1289645D 1969-05-01 1970-04-15 Expired GB1289645A (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US82098369A 1969-05-01 1969-05-01

Publications (1)

Publication Number Publication Date
GB1289645A true GB1289645A (enExample) 1972-09-20

Family

ID=25232195

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1289645D Expired GB1289645A (enExample) 1969-05-01 1970-04-15

Country Status (4)

Country Link
US (1) US3612698A (enExample)
DE (1) DE2019092A1 (enExample)
FR (1) FR2046697B1 (enExample)
GB (1) GB1289645A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2194353A (en) * 1986-08-04 1988-03-02 Hugle William Bell Holographic positional detection of objects

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2016815C3 (de) * 1970-04-08 1973-10-11 Siemens Ag, 1000 Berlin U. 8000 Muenchen Holographisches Justierverfahren und Anordnungen hierzu
US3729634A (en) * 1971-09-20 1973-04-24 Recognition Systems Automatic beam ratio control system for holography
US3796497A (en) * 1971-12-01 1974-03-12 Ibm Optical alignment method and apparatus
US3865483A (en) * 1974-03-21 1975-02-11 Ibm Alignment illumination system
US3980879A (en) * 1974-06-24 1976-09-14 Hughes Aircraft Company Adaptive imaging telescope with nonlinear quadrant sensing and electro-optical phase shifting
US4111526A (en) * 1977-05-12 1978-09-05 General Motors Corporation Rotationally independent optical correlation for position determination
US4321747A (en) * 1978-05-30 1982-03-30 Tokyo Shibaura Denki Kabushiki Kaisha Method of manufacturing a solid-state image sensing device
FR2504281A1 (fr) * 1981-04-16 1982-10-22 Euromask Appareil de projection a dispositif de mise au point
US4972498A (en) * 1988-07-07 1990-11-20 Grumman Aerospace Corporation Alignment system for an optical matched filter correlator
US7466411B2 (en) * 2005-05-26 2008-12-16 Inphase Technologies, Inc. Replacement and alignment of laser
CN117367273A (zh) * 2023-09-25 2024-01-09 北京航空航天大学 一种光斑位置定位方法、装置及晶圆磁光检测装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2194353A (en) * 1986-08-04 1988-03-02 Hugle William Bell Holographic positional detection of objects
GB2194353B (en) * 1986-08-04 1990-02-21 Hugle William Bell The method of and apparatus for the holographic positional detection of objects

Also Published As

Publication number Publication date
FR2046697A1 (enExample) 1971-03-12
FR2046697B1 (enExample) 1973-12-21
US3612698A (en) 1971-10-12
DE2019092A1 (de) 1970-11-12

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee