GB1286598A - Optical device for examining profile or roughness of a surface of a specimen by an optical intersection method - Google Patents

Optical device for examining profile or roughness of a surface of a specimen by an optical intersection method

Info

Publication number
GB1286598A
GB1286598A GB618470A GB618470A GB1286598A GB 1286598 A GB1286598 A GB 1286598A GB 618470 A GB618470 A GB 618470A GB 618470 A GB618470 A GB 618470A GB 1286598 A GB1286598 A GB 1286598A
Authority
GB
United Kingdom
Prior art keywords
specimen
optical
examining
images
feb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB618470A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Publication of GB1286598A publication Critical patent/GB1286598A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
GB618470A 1969-02-08 1970-02-09 Optical device for examining profile or roughness of a surface of a specimen by an optical intersection method Expired GB1286598A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP44009005A JPS4925223B1 (https=) 1969-02-08 1969-02-08

Publications (1)

Publication Number Publication Date
GB1286598A true GB1286598A (en) 1972-08-23

Family

ID=11708526

Family Applications (1)

Application Number Title Priority Date Filing Date
GB618470A Expired GB1286598A (en) 1969-02-08 1970-02-09 Optical device for examining profile or roughness of a surface of a specimen by an optical intersection method

Country Status (2)

Country Link
JP (1) JPS4925223B1 (https=)
GB (1) GB1286598A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2299624A1 (fr) * 1974-09-26 1976-08-27 Anvar Procede et dispositif pour la determination des etats de surface

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5484852U (https=) * 1977-11-28 1979-06-15
SG164292A1 (en) * 2009-01-13 2010-09-29 Semiconductor Technologies & Instruments Pte System and method for inspecting a wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2299624A1 (fr) * 1974-09-26 1976-08-27 Anvar Procede et dispositif pour la determination des etats de surface

Also Published As

Publication number Publication date
JPS4925223B1 (https=) 1974-06-28

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees