GB1286598A - Optical device for examining profile or roughness of a surface of a specimen by an optical intersection method - Google Patents

Abstract

1286598 Optical devices for examining surfaces NIPPON KOGAKU K K 9 Feb 1970 [8 Feb 1969] 6184/70 Heading G2J In an optical device for examining surface irregularities of a specimen, which comprises a lamp 1, slit 5, semi-reflecting surface 6, eye-piece 11 and objective 7, light after passing through the objective 7 is divided and directed by a pair of intersecting reflecting surfaces 8 unto reflecting surfaces 9 to illuminate a specimen 10, each subsequently reflected beam returning along the path of the other incident beam, and the resultant images of the specimen's surface are observed in the same field of view. To facilitate comparison of the images which appear as wavy lines, the specimen 10 can be moved by an observer until it is perpendicular to the optical oris of the system 11, 7 resulting in images which are parallel, Fig. 5 (not shown). In a modification, Fig. 4 (not shown), the surfaces 9 are movable along an elliptical path and the surfaces 8 are movable, so that the angle of incidence of each beam on the specimen 10 may be adjusted. Selection of a smaller angle of incidence results in increased image magnification and hence examination is made easier. The surfaces 6, 8, 9 may be of mirrors or prisms.