GB1282468A - Alignment system - Google Patents

Alignment system

Info

Publication number
GB1282468A
GB1282468A GB4745969A GB4745969A GB1282468A GB 1282468 A GB1282468 A GB 1282468A GB 4745969 A GB4745969 A GB 4745969A GB 4745969 A GB4745969 A GB 4745969A GB 1282468 A GB1282468 A GB 1282468A
Authority
GB
United Kingdom
Prior art keywords
tube
fed
photo
semi
scanner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4745969A
Inventor
Alan John Adler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Priority to GB4745969A priority Critical patent/GB1282468A/en
Priority to DE19691961361 priority patent/DE1961361C3/en
Priority to US56126A priority patent/US3643018A/en
Publication of GB1282468A publication Critical patent/GB1282468A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/20—Control of position or direction using feedback using a digital comparing device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

1282468 Template-followers TEXAS INSTRUMENTS Inc 26 Sep 1969 47459/69 Heading G3N A predetermined alignment between a particular area of an object scene and a work implement employs an arrangement whereby the area of a raster scan is reduced until a comparison determines that the predetermined condition of alignment has been achieved. As shown, a semi-conductor 21 is mounted on a jig, (not shown), and is scanned by a flying spot scanner 31, mounted in an inspection module supported by an arm of a lead-wire cutting and attaching mechanism, (not shown), through a lens 33. Part of the light reflected from the semiconductor 21 is fed through an objective lens 34 and a fibre-optic tube 35 to a multiplier photo-tube 32. Part of the view of the scanner 31 is fed via a mirror 38 and lens 39 through a reference standard, comprising a photographic transparency, to a multiplier photo-tube 41. The output signals from the photo-tubes 32, 41 are compared in an analyzer unit 44 producing quadrature and rotational error signals x, y which are fed to a servo unit 45 producing a mechanical movement aligning the lead-mechanism with the semi-conductor device. The signals from the multiplier photo-tubes 32, 41 are alternatively fed, through a switch 50, to a viewing monitor tube 49. The size of the raster on scanner 31 is adjusted by a zoom control 165 whereby the scanned area of the semi-conductor device is reduced as the misalignment decreases.
GB4745969A 1966-07-13 1969-09-26 Alignment system Expired GB1282468A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB4745969A GB1282468A (en) 1969-09-26 1969-09-26 Alignment system
DE19691961361 DE1961361C3 (en) 1969-09-26 1969-12-06 Control device
US56126A US3643018A (en) 1966-07-13 1970-07-06 Alignment system using an electronic scanner

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB4745969A GB1282468A (en) 1969-09-26 1969-09-26 Alignment system
DE19691961361 DE1961361C3 (en) 1969-09-26 1969-12-06 Control device
US5612670A 1970-07-06 1970-07-06

Publications (1)

Publication Number Publication Date
GB1282468A true GB1282468A (en) 1972-07-19

Family

ID=27182269

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4745969A Expired GB1282468A (en) 1966-07-13 1969-09-26 Alignment system

Country Status (2)

Country Link
DE (1) DE1961361C3 (en)
GB (1) GB1282468A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3042980A1 (en) * 1979-12-13 1981-09-03 Akademie Der Wissenschaften Der Ddr, Ddr 1199 Berlin TEMPORAL DISPERSE SENSOR TUBE

Also Published As

Publication number Publication date
DE1961361B2 (en) 1974-10-10
DE1961361A1 (en) 1971-07-15
DE1961361C3 (en) 1975-05-28

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees