DE1961361C3 - Control device - Google Patents

Description

6. Device according to claim 1 to 5, characterized in that the photosensitive receiver (32, 41) include photo multiplier tubes.

7. Use of a device according to claim 1 to 6 for attaching leads on semiconductor components (21) by means of a working device (17).

55

The invention relates to a device for automatically adjusting the position of a device with a scanning device mechanically connected working device relative to a workpiece in which a Scanning beam to a selected area of a special area for attaching leads Semiconductor components is intended,

F i g. 2 a schematic representation of the control device according to the invention,

Reference unit scans and two partial beams fotoelcktrischen Receivers are fed, which form the manipulated variable.

From British patent specification 873 790, a control device is also already known, which with two partial beams work, one of which images the reference unit and the other the workpiece, wherein the two partial beams are fed to photoelectric receivers, where subsequently one Correlation is brought about to form a manipulated variable. The known device is used to to compare the outline shape of a workpiece with that of a template and control a Tool in the sense that a match between the outlines of Template and workpiece is brought about.

A similar control device is already known from German Auslegeschrift 1 292 903. In the known control device, the scanning device is guided along a curve from a predetermined starting position.

In contrast, the present invention is based on the object, initially in an undefined Starting position located object, for example a workpiece, automatically opposite another object, for example a. Tool to align precisely. The invention gives way So in terms of their task significantly different from the usual sequential controls with photoelectric Scanning devices from which, in principle, a fixed starting position is assumed. Such Sequence controls are in addition to the above-mentioned disclosure document, for example, in the German Auslegeschrift 1 255 185 described.

The problem posed is achieved by a control device of the type described at the outset, which is characterized according to the invention that a true workpiece image that with the Working device is firmly connected, of which one of the two partial beams is scanned, which already formed prior to scanning from an oscillating scanning beam controlled by a raster generator are, while at the same time the workpiece itself is scanned by the other partial beam, and that A correlator is connected to the two photoelectric receivers, each of which is supplied with a partial beam Analyzer is connected, which converts the converted measurement signals into proportional control values for position control converts.

It has proven to be advantageous if the scanning beam is generated by means of a cathode ray tube and if a generator circuit for constant voltage rise is connected to the deflection circuit of the tube is connected, which the size of the surface grid during the scanning continuously up to a limit value maximum control accuracy.

Control devices according to the invention are preferably used for contacting semiconductor components used where there is an exceptionally high level of precision when attaching the leads arrives at the metallized contact surfaces or connecting surfaces.

The invention is described below with reference to preferred exemplary embodiments shown in the drawing explained in more detail. In the drawing shows

Fig. 1 is a perspective view of a control device according to the invention, which ins-

Ait, ·.

Fig. 3 is a partial view of the control device according to F i g. 2 in a special operating mode,

F i g. 4 is a block diagram of a raster generator Eür a control device according to the invention,

Fig. 5 is a block diagram of a deflection amplifier for a control device according to the invention,

F i g. 6 is a circuit diagram of an opposite of the amplifier circuit according to FIG. 5 modified amplifier circuit for a control device according to the invention,

Fig. 7 <? In circuit diagram of a video amplifier for a control device according to the invention,

F i g. 8 is a block diagram of a correlator with analyzer for a control device according to the invention;

9 shows a perspective illustration of a semiconductor component in the form of an integrated one Circuit and

10 is a circuit diagram of a generator circuit or a magnification control circuit for a regulating device according to the invention.

The control device shown in Fig. 1 includes a scanning device 15, a control unit 16, a Working device 17 and a transport device 18. The working device 17, which for attaching of leads to semiconductor components is used, and the transport device 18 is used for transport the semiconductor components can be commercially available devices, the working device 17 differs from commercially available devices of this type only insofar as they are with the Scanning device 15 is rigidly connected and operatively connected to control unit 16 via a light guide 35 stands. The working device 17 has a boom-like arm 19, which in the vertical Direction with respect to a to the transport device

18 associated clamping device 20 can be moved up and down is to work on a workpiece or a semiconductor component, for example a transistor, To fasten the supply lines at the points provided for this purpose. The wire for the supply lines if necessary, from a spool 22 on the arm

19 is withdrawn and advanced through a hollow, tubular wire feed 23 on the arm 19 downwards.

In order to ensure an exact alignment of the tip 24 of the wire feed 23 with respect to the respective connection surface To achieve on the semiconductor device 21 is a relative movement between the jig 2 · and the arm 19, which is normally brought about by an operator which semiconductor device 21 and tip 24 are observed through a microscope. Every time When a lead is attached to the semiconductor device 21, the wire is cut by means of a flame cutter 25 cut off, with a droplet forming at its end, which during the next working cycle is pressed onto the aligned connection surface, whereby the mechanical and electrical connection established between the lead and the connection surface will.

The semiconductor components 21 are suitably arranged on the jig 2x. In the case of a practically used clamping device 20, as shown in FIG. 1 shows, there is a carrier 26, which has two carrier tapes 27 and 28 which receive and hold a plurality of semiconductor components 21 which are aligned along the carrier 26 at a distance from one another. To this end, assigns the upper carrier tape 27 has a plurality of openings spaced apart from one another in the longitudinal direction, in each of which a semiconductor component 21 is inserted, which protrudes upward through the opening. Each semiconductor component 21 has a widened edge 29 between the upper and the our carrier tape 27 or 28 is located. At the bottom

jo carrier tape openings are provided through which Conductors 30 of the semiconductor components 21 are passed downward. The carrier 26 moves the individual Semiconductor components 21, which are arranged on it, one after the other in a suitable position in the area of the jig 20, where there is an alignment between the semiconductor component 21 and the tip 24 of the wire feed 23 can take place.

The scanning device 15 is in vertical and

ao movable in the horizontal direction with respect to the clamping device 29, so that the wire feed 23 the working device 17, which is rigidly connected to the scanning device 15, is in the correct position with respect to of the semiconductor component 21, which is

»5 lying case the workpiece forms, can be adjusted can. The scanning device IS comprises devices in order to illuminate the semiconductor component 21 and light-sensitive devices that receive the light reflected from the semiconductor component 21. The reflected light is converted into electrical signals, and those contained in these signals Positional information on the semiconductor device 21 is related to similar positional information set or correlated, which is derived from a reference unit, to an error information which result in a misalignment between the workpiece or the semiconductor component 21 and a tool associated with this workpiece, the tool in the present Case is formed by the wire feed 7.3. Correction signals are generated from the error information, and the correction signals are fed to the working device 17 in order to achieve the desired mutual Align workpiece 21 and tool 23 to bring about.

The basic structure of such a control device for the automatic position control of a Tool relative to a workpiece is to be used below with reference to FIG. 2 will be explained in more detail.

It can be seen that the control device in the present case is a scanning device from the combination two tubes 31 and 32, the tube 31 being a light spot scanner and the Tube 32 is a photomultiplier tube. In such a scanning device is to at any point in time only a small area is illuminated by the scanning beam, which of one Raster generator 51 is controlled in such a way that it points the workpiece in a predetermined cycle for

Point. The tube 3%, which below For convenience, referred to as phototube 32, receives during each scan cycle the reflected light from any point on the workpiece. It goes without saying that, for example,

Before scanning devices using a Büdorthikon or Vtdikon tube can be used. In such a system, the entire workpiece would be constantly illuminated by suitable lighting.

are illuminated while the surface of the work. via deflection amplifiers 52 and 53 and the like.
Objective lens 33 to a limited area of the case shown in FIG. The control device shown in FIG. 2 is focused on the semiconductor component 21. One part of the reference unit 40 is brought into the path of one part of the beam reflected by the semiconductor component 21 so that it can be scanned through this point for light by a lens 34 onto one end of a point. At the same time, the semiconductor light guide 35 is focused, which consists of a bundle of io component 21 through the second partial beam syn light-guiding fibers. The other end of the chron is scanned with the reference unit 40. Part of the light guide 35 is arranged opposite the end face of the tube 32 reflected by the semiconductor component 21. In this case, in certain scanning light falling through the lens 34 and the light cases, it can be advantageous to bring a color filter between the conductor 35 on the end face of the phototube 32. In the light guide 35 and the phototube 32, in order to get through the To prevent the phototube 32 from scattered light unit 40 (slide) passing light is reached. The color filter can, for example, be the end face of the second photo tube 41.
serve to pass only light from one to the phototube 32. The two phototubes 32 and 41 each work to transmit a specific wavelength, which is so that they generate output signals which are generated in each of the tubes 31. For example, at the moment of the intensity of the incident light, only blue light can be let through. correspond. These output signals are the input

A portion of the scanning 44 generated by the tube 31 is fed to the corresponding error beam is generated via a mirror 38 for an objective signal which the servo device 45 feeds 39, which directs the light to a reference unit. As soon as the error signals through the 40 focussed, the example of the considered execution »5 adjusting movements of the servo device to zero is a slide. The fact that the slide is wrinkled is a command to the person passing through the work device Light is passed to a tube 41, device 17, through which a working cycle of the which is a photomultiplier tube and is set in motion after the same, in the course of which a should be referred to as the second phototube standing upright. Feed line at the selected connection surface The semiconductor component 21 is attached by the scanning 30 which is divided into two partial beams. In the beam become an object at the same time the control device is considered possible (workpiece or semiconductor device 21) and a ability to produce a reference unit, what after-reference unit (Diapositive 40) scanned and the from standing on hand of the F i g. 3 should be explained, The light reflected from the object is directed onto the forehead. This figure shows a control device which is im surface of a first phototube 32 directed, while 35 essentially as the rule described above light means passing through the reference unit is constructed, with the exception that reaches the end face of a second phototube 41. first an exact alignment between the

The output signals of the phototubes 32 and 41 semiconductor device 21 (which is an object of the

or the photoelectric receiver will be used to produce video production of the reference unit)

amplifiers 42 and 43 respectively supplied, which takes place the reinforced 40 and the wire feed 23, which is shown in FIG. 3

Output signals of a unit 44 from a Kor- is not shown. The exact alignment can be based on

feed relator with an analyzer. Which the Kor- any way can be realized and happens

The part of the unit 44 which forms the relator compares the one that is usually formed by the relative

Output signals with each other and generated from them to be prepared parts observed and guided by hand

Error signals from which the 45 forming the analyzer become.

Part of the unit 44 the necessary corrections in front of the tube 31 is a diffusing surface in generated door signals, which are a servo device 45 to form a small projection screen 60 attached which the working device 17 to the net on which an image of the semiconductor device 21 Attaching leads controls so that that can be generated. Located in front of the photo tube 32 Semiconductor component 21 and the wire feed 23 50 have a light source 61, which consists of a small, white are aligned relative to each other so that the luminous lamp with a arranged behind it Error signals are reduced to zero. When the reflector can exist. That from the light source 61 The intended embodiment, the unit 44 generates emitted light enters the light guide 35 and three output signals that the servo device 45 leaves this at the other end, where it is through the are supplied and form these output signals, 55 lens 34 is focused on the semiconductor component 21 in a Cartesian coordinate system becomes a. Part of the light emitted by the semiconductor x-axis correction signal, which is reflected via a line 46 component 21 is passed through which a y-axis correction signal which is transmitted via objective lens 33 onto the diffusing projection Line 47 is guided, and directed a rotating screen 60, and the image generated on this Correction signal Θ, which is carried 60 via a line 48 with the aid of the mirror 38 and the objective lens will. 39 projected onto film, creating a negative 62

The control device shown in FIG. 2 of the semiconductor component 21 is obtained. In retains also a control tube ("monitor") 49, and in certain cases the projection screen 60 can be removed a cathode ray tube whose video input is left and imaging can be optional through a selector switch 50 with either 65 devices on the tube 3t (i.e., the one on the inner end Exit of the photo tube 32 or with the surface of the tube face applied phosphorus duct the second phototube 42 connected to the coating) can be used to create a visible can. The scanning raster for the tube 31 and the reproduction of the image projected thereon from the outside

7 «8

to generate, since the tube 31 during this steadiness of the scanning pattern is approximately equal to the operating state can be switched off. This difference between the output frequencies of the drive has the advantage that there are no problems with both counting circles. In the case of the particular depicted exist to obtain an exact figure, since the cladding is the division ratios of the face of the tube 31 is of course arranged so 5 the channels 29 and 31, whereby on a that on her a sharp image of the semiconductor diagonal scan approximately 29 lines and on the component 21 appears. others result in approximately 31 lines. The frequency

The film is located exactly at the point where the reference unit 40 is located at zen of the output signals on the two counting circuits which are in normal operation of the control device (ie the x and y scanning signals) amount to 1451.5 Hz, and an over-io and 1551.75 Hz, so that the difference between the dielectric film is used, which is normally about 100 Hz, and is protected from light and exposed in the usual way at a field repetition speed. After exposure, the approximately 100 Hz obtained is developed with a single interlaced negative 62 to produce a film slide of two fields per frame,
to produce, which will later be used as reference unit 40 of FIG. The circuit shown in FIG. 4 is subdivided into main components by dashed lines using broken lines, which can have the same structure as the workpiece or the output signal from the oscillator in all essential points Aufleiterbauelement, which takes during manufacture and generates an amplified pulse output, of the negative 62 as a template or as a reference object, which served approximately the same frequency as that of the oscilloscope. By making the reference, two counting or divider channels 65 and unit 40 in the same device, in which 66 (of which the first the oscillator frequency is to be used later) results in note 29 and the second the oscillator frequency through 31 advantages, since a whole series of error divides), two additional dividers 67 and 68, which are automatically switched off to the sources, which are assigned to each other in the case of 5 channels 65 and 66, in order to enable the production of the reference unit in one other output frequencies of these two channels could further result through 2 devices and which have to be shared, and a synchronizing device 69 formation of precisely working and expensive compensations, which with the two divider channels 65 and 66 would require addition devices. works together to create a permanent, synchronous relationship

To maintain the scanning between these channels used in the control device, the raster has a double diagonal pattern. that the scanning pattern is formed from an interweaving of several interlaced fields, which is two fields per frame,
Together a complete frame or sampling cycle is formed in the particular circuit shown, which is then repeated at a predetermined speed, the output frequency of the oscillator 63 180 kHz. In a special 35 and the channel 65 divides this frequency by 29, so the case that was considered sufficient that at the output terminal 70 a signal with a scanning pattern forms a generally square frequency of approximately 3103.5 Hz appears. The shaped grid, which has a repetition frequency divider 67, divides this output signal from the channel by 50 frames per second, each 65 further by 2, so that at the output terminals there is an interlacing of two fields on 40 71 and 72 signals, which a frequency of has. In such a case, each field will be off at approximately 1551.75Hz. The signals appearing at the external 30 lines for the partial or diagonal-aisle terminals 71 and 72 are framed and made up of a total of 60 lines phase-shifted by 180 ° for a full 180 °, and formed by these outstanding frames. It has been found that output signals can alternatively be used one or the other, that a scanning pattern with about 60 lines per 45 of them can be used as the y-scanning signal, which has an acceptable signal-to-noise ratio over frames from the deflection amplifiers 52 and 54 to the tube 31 and, this ratio is generally given to the control tube 49. As can be seen, the signal that is at the output terminal is proportional to the number of scanning lines per frame. 70 appears, a frequency that is twice as great

In Fig. 4 is a raster generator circuit like that of the y-scan signal.

In a similar manner, channel 66 divides the oscillators necessary to produce the desired two-port frequency by 31, so that diagonal scanning is required at the output bin. At this terminal 73 a signal with a frequency of on-connection will occur a relatively high frequency approaching 2903 Hz. The divider 68 divides the Freter oscillator and two counting circuits or divider channels 55 related to this output signal from the channel 66, which independently of each other continue to divide the two by 2, so that at the output terminals generate signals that occur for the axis deflection (in 74 and 75 signals , which have a frequency of the following for the sake of simplicity as x- and y-Ab- approximately 1451.5 Hz. Marked on the output steering axles) are necessary. In this jam occurring signals 74 and 75 are for switching arrangement, the phase relationship between 60 180 ° out of phase, and it can and y waveforms period overall to period neither the selectively controlled entden x- one or the signal other than Jc-Abtastnau, and the two counting circuits share the signal that is used, which is sent via the deflection amplifier oscillator frequency through successive numbers 53 and 55 to the tube 31 and the control even numbers, tube 49. Of course,

The number of scanning lines on each diagonal 65 then the signal that is rasterized at the output terminal 73 while each field is approximately the same occurs, can be used as a signal with a frequency the division ratio or the number of associated parts, which is twice as large as the frequency of the scanning Counting circles, and the field repetition speed signals.

9 10

The synchronizer are called one-flops. In an analogous manner, the channel 66 includes the

* Extend the output signals from channels 65 and divide by 31 five integrated in series

66 via lines 76 and 77, respectively, and the circuits 107 to 111 and the

The synchronization device accordingly gives the ordered divider 68 forms a continuation of this

sen signals also as many input pulses on 5 channels and contains the integrated circuits 112

the channel 65 as necessary to the eriorder and 113. The integrated circuits 107 to 113

The synchronous relationship between the channels 65 also consists of binary elements in the form of

and 66 so that these oscillate ./-K-Flip-Flops.

Share gate frequency in the right proportions. The synchronization device 69 includes a

The oscillator 63 consists of a self-energizing io integrated circuit 114, which is a double OR-the Oscillator, which in all essential parts forms on gate, which with the counting channel 65 via a conventional manner. and integrated circuit 115 is connected to the one of these The oscillator contains a transistor 78 which forms the output stage for this channel. As above has an emitter, which was mentioned about a current limit, the output signal from the switching resistor 79 and a divider stage connected in series therewith, which is generated by the integrated circuit 105 switched winding 80 of a transformer 81 gi · - of the counting channel 65 is formed, via the signal grounded is through which the emitter is inductively connected to a line 76 and a capacitor 116 to one of the matched circuit in the collector circuit of the Tran inputs of the double OR gate of the integriersistor is coupled, given in the tuned th circuit 114; and in a similar way Circle the other winding 82 of the transformer ao gets the output from the divider stage that and a capacitor 83 are shunted through the integrated circuit 112 of the counting channel is connected to this winding. The base of the 66 is formed via the channel line 77 and a The transistor is connected to the junction of two capacitors 117 the other input of the two voltage divider resistors 84 and 85 connected, times the OR gate of the integrated circuit 114 which is fed between the supply voltage and ground. The double OR gate that goes through are switched, and through a capacitor 86, which the integrated circuit 114 is formed, is through is connected in parallel to the resistor, a plurality of resistors 118 to 121 and capacitors Alternating current path from the base to the earth is 123 and 124 modified so that a twofold create. A voltage smoothing network formed from monostable multivibrator that, if a resistor 87 and a capacitor 88 before it is put into operation, narrow output pulses stands, connects the supply voltage with the chip generated. Such output pulses are on voltage divider resistor 84 and the collector of the two-input AND gate given, Transistor through the tuned circuit 82, 83. that by two diodes 125 and 126 and one

The amplifier unit 64 includes an integrated resistor 127 that is formed with the anodes

Circuit 89 connecting a double OR gate 35 of these diodes; and the output signals

det, and it is connected to the emitter circuit of the transistor of this AND gate (125, 126 and 127)

78 coupled via a capacitor 90. An additional synchronization pulse if required

output signal from the oscillator 63 to one on the conductor 122, via which this pulse to

Half of the amplifier unit 64 is given to the input stage 115 of the counting channel 65

stands from a sine wave, and one of the signals that becomes 4 °.

through the first half of integrated circuit 89. Synchronizer 69 generates a

corresponding to this sine wave input signal field synchronization for the counting channels 65 and

consists of a square wave from 66, and if the leading flanks of the positive

output signal, that of the second half of the integrated outgoing waveforms or output signals,

Circuit via a line 91 and a capacitor 45 that occur on the conductors 76 and 77, precisely timed

Sator 92 is supplied. Such a square wave Hch coincide, so do the resulting ones

signal is used by this circuit to generate two narrow output pulses from the

pulsed output signal that is applied to circuit 114 to the AND gate (i.e., the diodes

an output signal line 93 of the amplifier unit 126 and 125 and the resistor 127)

64 appears. The pulsed output signal has to be 5 °, together, and it appears on the conductor

essentially the same frequency as the sine 122 an output sync pulse, the uei

Wave output signal from the oscillator 63. Additional- this line of the circuit 115 is supplied. the

loaned to the capacitors 90 and 92 and the in- circuit 115 consists of a double OR

Integrated circuit 89 has the amplifier gate, and one half of this gate is used

voltage divider resistors 94 and 95, biasing 55 a signal line 128 and a capacitor 129

resistors 96 and 97, a resistor 98 and and a signal line 130 and a capacitor

a capacitor 99 on. The integrated circuit 131 the differentiated output pulses or signals

89 can be fed from a simple OR gate from the flip-flops, which are fed through the inte

stand. integrated circuits 103 and 104 are formed

The channel 65 for dividing by 29 contains five ^6o. Corresponding to these input signals, dl

serially connected integrated circuits having integrated circuit 115 at one of their output

100, 101, 102, 103 and 104 are designated, and clamp output pulses that the reset terminal

the divider 67 assigned to this channel forms in the integrated circuit 100,

functional meaning a continuation of this channel, During each complete counting cycle of the Ka

and it comprises the integrated circuits 105 and 65 nals 65 become the circuit 100 three such Im 106. The integrated circuits 100 to 106 are supplied in pulses; and in detail the switching

all the same, and each of these integrated circuits 100 is supplied with an output pulse once if d £ forms a binary element in the form of a J-K flip output from circuit 104 to positive

11 ^M 12

is shifted (which is the case once in each counting cycle), if it should be desired to shift the phase down and once each time the output signal sample pattern by 180 ° in order to go positive from circuit 103 ( which is the case in the system of changes in the optical paths twice every counting cycle). Adapt these three of the scanning system. The signals that are applied to additional reset pulses that appear on the flip-flop 5 lines 73 and 70 and the respective circuit 100 from the OR gate circuit 115 are fed to twice the frequency of the x and y scanning signals, that the counting channel 65 of FIG. 2 are used for the unit 44, which is converted from a counter that divides by 31 into a counter that divides by 29, to be described in greater detail below. target.

At the input of the other half of the double io. The deflection amplifiers 52 and 53 are just like OR gates which, through the integrated circuit, make the deflection amplifiers 54 and 55 equal to one another; it 115 is formed, occur on the line 93, but there is a slight difference between the amplified output signals mentioned above, which are assigned to the two amplifiers 52, 53, which are derived from the tube 31 of the oscillator 63 and a frequency on the one hand, and the two have a deflection frequency of 180 kHz. The amplified and amplified 15 amplifiers 54, 55, the oscillator input signal, which is applied to the control tube 49 and which is integrated into the other part, which is supplied in detail from the integrated circuit 115 on the line 93, and which becomes clear synchronization signal corresponding to the inte- the deflection amplifier 54 and 55 are in Fig. 5 dargrierten circuit 115 provided züge- via line 122, which is a schematic circuit of one of these will lead, are indicated by the circuit on one of the ao two amplifiers, and only transmitted for the purpose of input terminals of the circuit 100 , so the explanation is to be assumed that this continues to count. Whenever one is concerned with the amplifier that is assigned to the x-sampling synchronization pulse on line 122 auf- signal. Accordingly, whatever happens when the input signals to this amplifier are accurate depending on the two input signals which are optionally applied to circuit 114 on either line 74 or lines 76 and 77 75 removed and the first stage of the VerPhase are, that the counting channel 65 is fed to amplifier 55 , which registers a square-wave converter an additional count, as a result of which this has, to which the square wave of the x-scan is fed in the desired state of synchronization with the output signals and the the amplitude counting channel 66 is fed back, in which one of these signals is limited as desired in order to reduce or eliminate any nesting of the x and y scan lines appearing on the face of the tube 31 which is guaranteed in such input signals ,
is. This synchronization state lasts without the The square-wave converter gives two output signals

Additional impulses are generated until they are 180 ° out of phase with each other, the synchronization is out of phase for some reason. B. by energy jumps, energy collectors of two transistors 137 and 138. These losses or similar electrical disturbances can occur on both output signals from the square-wave converter. If the synchronization is lost, the circuit 69 reacts immediately via lines 139 and 140 via coupling capacitors 141 and 142 to the bases by again supplying a synchronization pulse 40 to the transistors 143 a and 1436 , which are supplied via line 122 integrated amplifier circuit components separate to the integrated circuit 115. genes that are connected in push-pull circuit,

In a divider channel of the type described, with and through these transistors, on which the divider consists of an odd number (ie assigned output signal lines 144a or 29 in one case and 31 in the other), 45 1446 sawtooth toggle signals are generated, which by 180 ° one obtains an output signal which is not symmetrically out of phase with one another and which is symmetrical; However, since a non-symmetrical, opposing deflection plate access signal is carried in the alignment under consideration, which the x-scan deflection system of the besystem is undesirable, the output stages 67 would form observation cathode ray tube 49. The two and 68, which divide by 2, are added 50 integrating amplifiers are equal to each other, and added, so that an even-numbered divider for they generate output sampling signals, which results by 180 ° output stage, whereby a symmetrical phase-shifted against each other as the two receives output signal. the input signals applied to it have an opposing

As shown in FIG. 2 will have a set phase relationship. Since one of the amplifiers integrating the x and y scan signals from the raster generator 55 is a duplicate of the other 51 via the tube 31 and the control tube 49, the corresponding elements are pairs of deflection amplifiers 52, 53 and 54 and 55, respectively each amplifier is given the same reference numerals assigned to those tubes. This is characterized, but the Inx scanning signal can, as already mentioned above, dices α and b are appended to the reference symbols in order to distinguish between these parts either on the signal line 74 or 75 removed.

men will be; Similarly, the y-scan viewing the amplifier, which receives the input signal from either signal line 71 or 72, signal line 139 and coupling capacitor 141 can be tapped. Although the Ab- is assigned for operation, it has a transistor 143 o scanning of the tubes 31 and 49 only an x- and, whose emitter is grounded and whose output a y-scanning signal is required, it can be useful to signal directly the base be fed to an output stage, an additional x- and an additional y-Ab-, which is formed by a transistor 145 a , to have scanning signal available, which with the above- whose emitter with the above-mentioned output-mentioned x- and y-scanning signals 180 ° phase signal line 144a via a capacitor 146a

13 14

is bound. The collectors of the transistors 143 α 54, 55 for the control tube 49 and the deflection and 145 a are shown with the supply voltage through amplifiers 52, 53 for the tube 31. From load resistors 147 a and 148 a connected, and for this reason the two terminals T ₁ and T _{2 are} the emitter of the transistor 145 "is also shown in Fig. 6, on the following resistor. 149 a grounded. The base of transistor 5 should be referred to. 143a is connected to a negative voltage supply. The circuit shown in FIG. 6 is connected through a bias resistor 150a; Rectangular converter, which is essentially the same and the base is still connected with two in series in FIG. 5 is rectangular converter shown, and terminated resistors 151a and 152a connected, which accordingly two transistors 137 'and 138' are connected in parallel to a capacitor 153a. io contains, where the collector of the first transistor A leading to earth alternating current path is formed for with the terminal T ₁ and its base depending on the this base by a capacitor 154 a, circumstances with the output signal line 74 or with the connection point of the resistors 75 of the Raster generator 51 is connected. The Emit-151 α and 152 α is connected. The transistors 137 'and 138' are common. The rectangular converter has, in addition to the 15 connected to the collector of a transistor 160 ', transistors 137 and 138 current limiting resistors whose emitters with the positive potential of a stand 155 and 156, respectively, which are the collectors of these Connect the low supply voltage via a fixed resistor with the above-mentioned low supply voltage 161 'and an adjustable potentiometer 162' voltage, and the square-wave converter is connected to change the size of the scanning grid which furthermore has several chip tubes 31 connected in series .

voltage divider resistors 157, 158 and 159, which The base of transistor 138 'is connected to the unifying DC path between ground and a connection point of the series connected voltage positive potential of a low voltage source divider resistors 163 and 164 which form between. The base of the transistor 138 is connected to the ground and since ^c positive potential of a low connection point of the resistors 158 and 159 »5 are connected to the supply voltage. The base of the connected; and similarly the base of a transistor 160 'isi is connected to a magnification control transistor 160 at the junction point of the circuit connected to the reference numeral 165 to resistors 157 and 158. The collector draws, and which serves to reduce the scanning pitch of the transistor 160 is directly connected to the emitters of the tube 31, thereby connecting a limited two transistors 137 and 138, and 30 area of the semiconductor device 21 to increase the emitter of the transistor 160 with the positive or, correspondingly, a rubber lens effect, »her potential of the low voltage source can be obtained through one«. As can be seen from FIG. 6, the fixed current consuming resistor 161 and a magnification control circuit 165 are also connected to the potentiometer 162. y-deflection amplifier 52 connected - if one assumes that the potentiometer 162 is set to 35 that the one shown in FIG. The amplification partially shown in FIG. 6 changed the current intensity, which in the emitter circuit ker the ^ deflection amplifier 53, of the transistor 160 flows, and thereby a magnification control circuit 165 (whose single grid is formed on the Jt axis of the control tube 49 is described below should be) has it. Since the deflection amplifier 54 is a duplicate of the function, automatically the size of the grid amplifier 55, an in-40 of the tube 31 is of course also provided in place of a continuously progressive replacement device to approximate the size of the scanning grid along the y -Axis of the control tube to set the x, y and 0 correction signals, of which 49 can be optionally changed. changing sizes result from the fact that the deflection amplifiers 54 and 55 are fed to the object and the tool relative to each other square wave output signals from the raster generator 45 in the direction of the desired aligned actuator 51, and these deflection amplifiers are shifted when the The object is to limit the signals so that their noise level can once be detected by the scanning system. ring, and they form amplified triangular waves. When exercising this function, the Verdie generates the scanning signals for controlling the scanning raster enlargement control circuit of a progressively forming on the observation cathode ray tube 49. As already mentioned above, a varying output voltage or a linear chip is generated by the increase in the gain, which causes the scanning areas 54 and 55 to generate two separate scanning signals for each stepping from an initially large, detected raster axis, and the two signals for each area through to a final, small amplified amplifier are changed by 180 ° against each other in phase-aligned area. Such postponed. In the tubes 31 and 49, which are used in the general approximation between the rise or the intended embodiment, the size of the change in the voltage rise is determined by the use of two scanning signals and the changing sizes of the correction signals with mutually opposite phase for each ( and a corresponding change in the size of the raster axis (a de-scanning raster caused by the deflection) is advantageous in that the control focussing is prevented, and the necessary correlation signals with a smaller amplitude can continuously be used in the scanning device, which is carried out in the unit 44 than it would be possible if only one tilt could "hold" or maintain what was not intended for each deflection axis. would be ensured if z. B. the area scanned by the tube at the collectors of transistors 137 and 138 31 would be reduced before they are shown in FIG. 5 terminals T ₁ and T ₂ shown, the 65 x, y and 0 correction signals in corresponding for the purpose of easier explanation of the in F i g. 6 dimensions would be reduced.

shown circuit are shown, on the basis of which With such a mode of operation of the

the difference between the deflection amplifiers of the magnification control circuit is the pitch of the tube 31

15 16

at the beginning ί. B. perhaps two or three times as large and the operating potentials for the various such as the area of the semiconductor component 21, and dynodes are determined by a voltage divider network, the correction signals from the unit 44 are 170, which has a resistor 171, this time usually extremely large . The the in series between resistor 169 (but on earth magnification control circuit 165 decreases potential) and the last or end dynode of ten continuously increases the size of the area connected by tube dynodes 168 which is scanned at the 31 illustrated when the correction signals are provided by phototube. The voltage divider 170 the actuation of the servo device in size further comprises nine reducers connected in series until the scanned area is reduced to a level, each indicated by 172 and reduced in each case to such a size that just sufficient 10 between the ten dynodes of the phototube 32 is large enough that they only switch the pad. Another resistor 173, 1-jz to the semiconductor component, while that belongs to the voltage divider 170, is in series between edge parts on the outer circumference not to be detected see the first or control dynode of the photo tubes. When such a reduction is carried out and its photocathode switched. The voltage has become, the semiconductor component or its 15 divider network 170 has smoothing capacitors metallized connection surface exactly with the tip 174 and 175, which is aligned parallel to the resistor 24 of the wire feed 23. 171 and five of the resistors 172 or in parallel to the control circuit, the control device is able to be switched through this mode of operation of the enlarging resistor 173 and four of the resistors 172.

20 The output signals taken at the anode 166 of the phototube 32 minus the respective connection area on the output signals are to be aligned via a Kop semiconductor component. 9 shows the pelcapacitor 176 on the base of a transistor, an enlargement of a semiconductor component 177 which provides the input stage of the amplifier, which is formed from an integrated circuit. The collector of the transistor 177 is above the protruding component or "platelet", 25 a load resistor 178 to which the upper surface of the entire component is connected in the mentioned positive potential of the low feed of the order of 0.258 cm ² and the thick voltage; and similarly, the device may be on the order of the collectors of transistors 179 and 180 over 0.0127 cm. The entire, with metal load resistors 181 or 182 to this supply-coated connection surface is connected to a voltage somewhat less than 30. The collector current, which and is within the in Fig. 9 with dashed lines forms the output signal of the transistor 180, flows lines. through the primary winding 183 of an output Trans-The entire device is referred to in this figure with formators 184 whereby the secondary windings of the reference numeral 21 ', while those with 185, 186a and 186 of this transformer b excitable metal coated surface of the device are protected by the 35, wherein the the first of these secondary windings is denoted by reference numeral 21 α. of the unit 44 (and the selector switch 50). While the area 21a is circumferentially quite the same, while the last two secondary windings are sharply defined, the edge parts of the overall part of an automatic reinforcement element can be somewhat irregular. Such controls form, which generally occur with 188 denoting irregularities due to the nature of the 40 net.

Manufacturing process in which several plates The amplifier 42 is essentially known

at the same time in a coherent body and it acts in such a way that it is connected to the output transformer

per, which is extremely fragile, where 184 emits amplified replicas of the signals,

at the body then with the help of a sharp which are fed to it from the photo tube 32. the

Work device between the various construction 45 emitters of transistors 177, 179 and 180 are in

elements and finally in the customary manner via resistors 189, 190 and

NEN components or platelets is broken. It 191 connected to ground, the latter being the latter

it is clear that the outer edges of the entire construction resistor a capacitor 192 is connected in parallel.

elements 21 'for this reason not for the purpose. In addition, the base of the transistor 177 is through

accurate alignment should be used, 50 a bias resistor 193 across the resistor

as there are inevitable inaccuracies in the output 178 with the positive supply voltage and over a

direction as a result of these edge irregularities capacitor 194, which forms an alternating current path.

would result. The considered control device det, connected to ground; the base of the transistor

avoids such errors as it is able to observe the 179 is via a resistor 195 with ground ver progressing on straight 55 bound and at the same time through a capacitor 196

special area to reduce that opposite to the emitter of transistor 177 and over a

to be aligned with the feed wire. Resistor 197 to the emitter of transistor 180

The photo tubes 32 and 41 and the video amplifiers coupled; and the collector of transistor 180 is

Ker 42 and 43 associated with them are on to the emitter of transistor 179 via an off other essentially the same, and the details 60 parallel branches existing circle coupled, where

of such a phototube-amplifier combination the one branch of a resistor 198 and the

are in Fig. 7, and for explanation purposes, another branch consisting of a resistor 199 and a

only the phototube 32 and its associated condenser 200 are connected in series with one another

more strongly 42 are described. As shown in FIG. 7 are switched to.

As can be seen, the phototube 32 has an anode 166,65

a photocathode 167 and several dynodes, the two substantially equal branches 201 α and 201 b

are all designated by the reference numeral 168. Those in which the above-mentioned transforma-

Anode 166 is grounded through a resistor 169, gate windings 186 a and 186 b are. Because of these

17 18

The similarity of the two branches increases as the output signal increases, reference numerals are used to denote the corresponding voltage drop on branches 201 of the autochthonous parts of the two branches, and matic gain control (i.e. a distinction between these two branches Two-Zener diodes 206), by which the size of the gene was made, that the book 5 voltage, which was appended to the phototube 32 for "a" or "b" was reduced. In the branch lies; and since the output signal of this phototube 201a is the winding 186a between the base and is determined by the level of the voltage which is connected to the emitter of a transistor 202a, which is applied to it, the output signal is reduced to an amplifier for the DC voltage component a reduction in the applied component of the feedback signal constitutes this io voltage. In the circuit under consideration, the voltage applied to the amplifier via a rectifier, the voltage applied to the phototube 32 is formed from the value of the series-connected diodes 203 a and the supply voltage of approximately 1.40 kilovolts to 204 a, which is formed in the base circuit of the Tran- to a value of about 760 volts, sistors lie. If a larger voltage drop is required, the voltage feedback signal from the rectifier is 15, additional branches 201 for the automatic de ripple through a smoothing capacitor gain control are switched into the circuit.
205η eliminated, which is connected between the base and the emitter of the transistor in the control device according to the invention. Hine Span- no compensation for any errors of the second order voltage limiting device 206a in the form of a scale error or first order required, so the Zener diode is connected between the emitter and the KoI- ao that only .r-skew and y-skew error detector of the transistor 202 a and Preventing signals need to be generated, which means that the rotation or δ-error lying between these electrodes is the algebraic sum of the voltage the performance of the transistor .v-skew and y-skew signals.
exceeds. A bias resistor 207 a is connected to the generation of the correction signals, which appear between the ground and the base of the transistor 202 a 25 the lines 46, 47 and 48, observed, whereby the normal operating state the unit 44 the signals that are on this from the this transistor is fixed. Video amplifiers 42 and 43 are given, and

The automatic gain branch 201 ft poses any differences in such signals As has already been explained above, control has the time occurrence between corresponding indices same elements as the branch 201 α, and 30 details on the two video channels that the the outputs of the two branches are interrelated in subject matter, as is the case with the multiplier photo tube Connected in series; For this reason the collective 32 is seen, or the reference unit as it is gate of the transistor 202 a with the emitter of the Tran- is seen through the multiplier photo tube 41, sistors 202 ft, and represent the Zener diodes 206a. The unit 44 also receives reference and 206 & are connected in series. The collector 35 signals from the raster generator 51, and this Bedes Transistor 202ft is connected to the photosensitive train signals giving the position of the scanning point of the Cathode 167 of the phototube 32 via a counter tube 31 in the "λ" and "y" directions separately. stood 208 connected, and although this consid- From these input signals the unit calculates if it was not essential, it is used to identify 44 the direction of any misalignment any inrush currents or current spikes occurring between the object and the reference unit, and from the DC amplifiers to the transi- it expresses this information in the form of correction gates 202a and 202ft are outputted on signals sent to the servo unit 45 to limit the signal acceptable value. Leads 46, 47 and 48 are fed.

During the operation of the automatic control, the unit 44 is for purposes of illustration as the gain control is part of the reinforced 45 block diagram in FIG. 8, to which reference is made in the fol-simulation of the output signal of the phototube 32 lowing, the actual given to each of the two transistors 202, the correlator of the unit should normally include those components associated with them, those outlined with dashed lines and ins resistors 207 are biased in the conductive operating state as a whole with the reference numeral 210, which means that essentially 50 The analyzer of the unit is not caused by the remaining voltage drop on the circuit, in FIG. 8 is formed, where the applied voltage (in which the magnitude of these components is symmetrical with respect to the order of 1.40 kilovolts) are fully arranged on the phototube correlator 210. Unit 44 appears. The rectifier, which has three outputs at which diodes 203 and 204 are formed via the lines 46, generate the Jc correction signal, the y correction signal and the direct current signals that the transistor or reverse bias the Θ or rotation correction signal to 202; such direct current signals are output in the servo unit 45 under consideration, as shown in FIG. 2 circuits. As input signals to the unit, the transistors block when the output 44 occurs, the signals from the reference unit and the return signal from the phototube 32 reach a level of unsubject from the phototubes 41 and 32 and about 1 volt of peak Peak exceeds. So-time reference signals from the raster generator 51, as soon as the transistors are blocked, the equation rises steeply in the present case due to the 2 .V and 2 Y voltage drops at the Zener diodes 206, scanning signals that are formed the lines when the output of the phototube 32 to 73 and 70 appear. When further input signals value exceeds 1 volt from peak to peak. 65, the x and y deflection signals are sent to the unit 44

The DC voltage drop across diodes 206 is given on lines 74 and 71 or in

substantially proportional to the voltage of the alternate form on lines 75 and 72

Output signal from the phototube 32. Thus occur, with these deflection signals to synchronize

/ ι

can be used for ionization purposes, and that goes further to be described in detail below.

Looking at that in FIG. 8 shown in more detail, it can be seen that the correlator 210 of the unit 44 band-pass filters 211 and

212 which determine the particular portion of the video spectrum to which the correlator is responsive. In addition to the band-pass filters 211 and 212 , the correlator part 210 contains networks 213 and 214 which carry out a phase shift by 90 ° and which are assigned to the band-pass filters 211 and 212 , respectively, and a multiplier 215, on whose two inputs the output signals from the phase shifters

213 and 214 are given. The output signal appearing at the multiplier 215 is applied via a signal line 216 to both the x and the y channels of the analyzer part of the unit 44 .

The correlator 210 generates an output signal on the line 216 , the properties of which depend on the relative temporal occurrence between the output signals of the phototubes 41 and 32. In order to generate such an output signal, as already indicated above, the band-pass filters 211 and 212 select such frequencies of the video spectrum in a predetermined range and only allow these frequencies through, so that the two signals emitted by the filters each have essentially the same frequencies have, and the phase shifters 213 and 214 shift the phase of the input signals, which change around a reference voltage, in each case by 90 ^c , but in mutually opposite directions, so that the two output signals are phase-shifted approximately 180 ° from each other. The multiplier 215 outputs a product signal to the output line 216 , the factors of which are formed by the input signals which the multiplier receives from the phase shifters 213 and 214. Of course, such a product signal is equal to zero if one of the signals forming the factors is zero, and negative if one of the two signals forming the factors has a negative value, and positive if the two signals forming the factors are both positive or both are negative.

The analyzer of unit 44 detects the x and y reference channels which are symmetrical with respect to the correlator 210 in FIG. 8 are arranged. From this figure it can be seen that the x time reference input signal is derived from the raster generator 51 and consists of a replica of the signal in the Jc deflection system of the tube 31 . Since the coordinate position of the scanning beam in the grid of the tube 31 at any given moment is essentially a linear function of the x and y scanning waveforms, the x and y reference signals on the lines 73 and 70 each give the current position of the scanning beam in one Cartesian coordinate system whose origin is in the center of the grid. Consequently, the sign and the amplitude of the x reference signals on the input line 73 determine the position of the scanning beam in the scanning raster in the x coordinate direction. Correspondingly, the sign and the amplitude of the y reference signal on the input line 70 indicate the position of the scanning beam in the scanning raster in the y coordinate direction.

As in Fig. 8 is indicated, the signals appearing on lines 73 and 70 have a two-

times as high a frequency as the x and y scanning signals, which is why they are used as lAV deflection reference signals or. are designated as 2 Y deflection reference signals. Such higher frequency signals are used because they increase the accuracy and stability of the correction signals appearing on lines 46, 47 and 48 , and it should be noted that these higher frequency signals correspond to the sample signal frequency before they are finally used.

To F i g. Returning to FIG. 8, it can be seen that the ZA 'deflection reference signal is fed on line 73 to a delay line 217 which outputs a delayed mapping of the ZÄ' reference signal to output signal slide 218. In a similar manner, the 2 Y deflection reference signal on line 70 is fed to a delay line 219 , which outputs a delayed image of the 2 Y reference signal on output signal line 220. The reason for using these delay lines 217 and 219 is to compensate the timing reference signals for signal delays in the video amplifiers 42 and 43. As a result of the functioning of the delay lines 217 and 219 , the reference signals that appear on the lines 218 and 220 precisely indicate the position of the scanning beam in terms of time, as a result of which information about an error-free alignment is created, which appears on the output line 216 of the corrector 210 .

The Ar reference signal on line 218 is fed to a divider circuit 221 which divides the frequency of this input signal by 2, whereupon the reference signal appearing on output line 222 from the divide by 2 circuit 211 has the same frequency as the .x sample signal . The signal line 222 forms one of the inputs to a multiplier 233, at the output of which the above-mentioned x-correction signal appears, which is applied to the line 46 . As also from FIG. 8 can be seen, the output signal line 218 from the delay line 217 is connected to the input of an inverter 224 , the output of which appears on a line 225 , which forms the input to a further divider circuit 221 dividing by a factor of 2, the output of which is via a signal line 227 a Multiplier 228 is supplied. The output of the multiplier 228 appears on a line 229 which is connected to a summation point 230 which is on the correction signal line 48 mentioned above.

Due to the two dividing circuits 221 and 226 , which are divided by a factor of 2, the signal appearing on line 227 has essentially the same frequency as the signal appearing on line 222 (ie the frequency of the * -sample signal), but this signal becomes reversed with respect to the latter signal or substantially 180 ° out of phase with this signal. The two networks, which are formed by the dividing circuit 221 and the multiplier 223 and by the inverter 224, which are formed by the dividing circuit 226 and the multiplier 228 , are formed by a synchronization signal in the form of the x-deflection reference signal or the x-scanning signal from the signal line 74 to each of the two divider circuits 221 and 226

21 22

is given, are switched in positive synchronization, and this voltage divider is between keep. Earth and the positive supply voltage of 15VoIt A fully corresponding and analog turned on, and the base of transistor 238 is connected to Order is provided for the y reference channel, and connected to the wiper of the potentiometer 46, the accordingly, the output signal line 220 5 is used to determine the final potential of the at off of delay line 219 to change the voltage rise that occurs thereupon, The circuit contains a capacitor 248, the two-divider circuit 229, whose output see a signal earth and the collector of transistor 237 Line 230 is fed to a multiplier 231, is switched, so that it is passed through this collector Output the above-mentioned y-correction signal io is fed. The output signal line of the delays generates that appears on line 47. The signaling control circuit is denoted by 249 and Line 220 is also connected to the connection point of capacitor 248 with an inverter 232 bunden, which has an output signal line 233, connected to the collector of transistor 237, which is divided by a factor of 2 with the input of the output signal line 249 is also about Lenden divider circuit 234 is connected, the output 15 of a resistor 250 and a switch 251 with output signal connected to a multi-earth via a line 235.

The transistor 237 forms a generator for a signal line 237 with the above-mentioned sum constant current, which is used to connect the capacitor 230. Accordingly, to charge 248 whose charge corresponds to the voltage, the output signal waveforms from the 20 surge are generated on output line 249. The multipliers 228 and 236 at the summation transistors 238 and 239 are limiting transition point 230 algebraically added, and as the resultant sistoren, the beginning and the end potential of the signal appear on the line 48 determine the Θ-correction voltage rise, these potentials signal. optionally by adjusting the potentiometer 243 each of the multipliers 223, 228, 231 and 236 »5 and 246 can be changed. The magnitude of the necessarily has two input signals, and the voltage rise determines the size of the area, in the case of multipliers 223 and 231, the second which is scanned by the tube 31. Usually the input signal through the output signal of the corrector, the potentiometer 246 is set in such a way that Iators210 are formed on the line 216. In the case of such a voltage rise that the an multiplier 228 consists of the second input signal 30 area scanned by the tube 31 and the y-correction signal, which is emitted by the multiplier four times as large as the total area of the gizzard 231; while the second item is when the item is an output signal to the multiplier 236 through the one semiconductor component. When the same Gex correction signal is formed that is generated by the multiple unit, the potentiometer 243 is set in such a way that the multiplier 223 is output. 35 that the smallest and finally through the tube The divider circuit 31 scanned area of the semiconductor device dividing by a factor of 2 in the genes 221, 226, 234 and 229 can be the same as essentially the entire, metal-coated divider circuit area dividing by a factor of 2 21 α of the same. By being potent, as can be described in connection with the raster generator 51 shown in FIG. 4, as has already been stated above. For this reason, the speed or the slope of the span should be adjusted for further details of the voltage rise, and the switch] of various analyzer components is not used further to 251 the voltage rise. and turn off.

In Fig. 10, the enlargement control circuit is The output signal line 249 is connected to the x-unc

or the generator circuit shown, or the 45 y-deflection amplifiers for the tube 31 connected, unc

has a plurality of transistors 237, 238 and 239, respectively. such a connection with the x-deflection gain

The emitter of transistor 237 is connected via a resistor 53 in FIG. 6 shown.

stand 240 and a potentiometer 241 with the posi- During the operation of the size control

tive supply voltage of 15 volts connected, with approximate circuit when an object 21, about a half

The potentiometer is used to adjust the bias of the 50 conductor component on the transport device 18 in

To set the transistor 237 in order to thereby determine the essentials with respect to the scanning device 15

To control the dizziness of a voltage rise, the switch 251 is closed, where

which the output signal of the magnification control by appearing on the output line 249 «

forms a circle. Signal brought to its most negative value or fixed

A voltage divider connected to a resistor 242, a 55, which in the present example is

Potentiometer 243 and resistor 244 to approximately -0.6 volts with respect to the potentia

which are connected in series with one another is located at the tap of potentiometer 246 (i.e.

between earth and the positive pole of the supply voltage- the base of transistor 239) occurs The servo

ming of 15 volts, and the base electrode device 45 is then actuated and the switch:

of transistors 237 and 238 are open with this voltage 60 251, which is essentially the same as de:

voltage divider connected. The tapping of the potentio- actuation of the servo device or something late

Meter 243 can be carried out with the base of transistor 238. The capacitor 241

bound. The potentiometer 243 serves to control the input through the one constant current

setpoint or the starting potential of the generator which is to be delivered and which contains the transistor 237

to change the voltage rise that appears. 65 charged, and by this charging of the condensate Similarly, a voltage divider sators will be on the output signal 249 de

a resistor 245, a potentiometer 246 and voltage rise is generated

a resistor 247 connected in series with each other

23 I 24

Value of approximately + 0.4VoIt can be determined in relation to the location; and the reference-being-potential at the tap of the potentiometer 243 (i.e. consists of a photographic slide, obder Base of transistor 238), the same begins, as has already been indicated, a large one To conduct transistor 238, thereby preventing a plurality of reference units including one that the increase in tension can be related to an even higher body, which is an actual one Value increases. The transistor 238 can represent from a "model" of the object. Germanium transistor, which is chosen so that the scanning device is a device with that it has a large base-emitter-breakdown chip-variable field of view, since it has a large capture having. The sungbereich on the output signal line 249, which in a reduced Occurring potentials of the voltage rise are io or limited range can be changed by a as shown in FIG. 6 is shown to reinforce the deflecting object and a reference unit very close 52 and 53 created. By being able to progress to the desired exact Ausend to be able to carry out changing voltage at the output of the amplifier. Such a trading control circuit the output signals change the image area becomes the main through the deflection amplifiers 52 and 53 for the tube 31 reach the magnification control circuit through changes, so that the area which is moved by the scanning surface which is covered by the tube 31 Light point is traversed, progressively Chen is, optionally from a large area that serves between the above-mentioned larger initial and for the detection of an object, to one the smaller end scanning area is changed. reduced area necessary for precise alignment

The exact function of the various components used can be changed. The scanning Control device in a working cycle of the device, which are the same in the embodiment should be clearly drawn from the above explanation, includes a cathode ray tube and proceed and therefore does not need to repeat a photomultiplier tube, but what could will. Therefore, in summary, other scanning positions should only be stated - already mentioned above that the control device can be used as systems, and in certain cases suitable for connecting an object with a reference unit, the scanning device can also be designed in such a way that compare and according to any deviation that they are on a different energy than that in the sight between responds to these two by a wave spectrum which can be determined in advance and that one of them is based relative position the alignment state intermediate energy is used, see the object and a tool that 30 Each scanning system has the property that Related to this or the object in another a drift occurs (e.g. a drift from ver-way is assigned, correcting for any shifts or slight dislocations in the Desired state of precise alignment to the grid of a light point scanning tube, as they exist. change. The tool is in a predetermined position, for example by stray magnetic fields and / or a Relationship to either the reference unit or the 35 thermal expansion of the various elements Object, and with which the tube can be effected in detail), which usually Desired embodiment of the present earth installation of a drift stabilization circuit in a finding such a relationship between any multiple scanning system requires the tool and the reference unit, and it is at which the scanning function must be accurate. In the There is a fixed spatial relationship, since the scanning device under consideration is both the device 15, which carries the reference unit, and the article 21 as well as the reference unit 40 through Wire feed 23 which forms the tool (or a single light spot scanner or tube this carries when the lead wire is scanned as a tool 31, which is extremely advantageous as is considered), structurally firmly connected to each other, the system is free from a positional error that occurs on are, as shown in FIG. 1 is shown and above 45 a drift is based without a complicated rod written became. Must be used with this special execution circuit. Demrungsform According to the invention, the wire will be correspondingly in the control device according to guide 23 when actuating the servo device of the invention, as long as the two optical axes, tion 45 with respect to the object 21 displaced, in the one case by the tube 31 and the wherein the scanning device 15 is during this 50 objective lens 33, which the scanning beam on the GeDisplacement with the wire feed moved object 21 focused, and in the other case

When correcting a misalignment by the tube 31 and the objective lens 39, the

are focused by the object and the reference unit of the scanning beam on the reference unit 40,

receive comparable characters from which the position can be determined, in a fixed relative position,

of the object remain fixed in relation to the reference unit, there are no positional errors in the system due to a

can be asked; and from these signs, drift is introduced in the tube 31. Very obvious-

derives correction information that is any but related to these optical axes

misalignment between the object set on each other.

and the reference unit. If found in certain applications the invention may

If there is a misalignment, 60 it may be desirable to have two or more leads

Correction information is generated by means of which the gene can be applied to a semiconductor component,

a corrective, relative movement between that without changing the reference unit 40 or on others

The object and the tool is effected to be in the workflow of the manner described above

to intervene in the desired aligned state of the two devices. If you take z. B. to manufacture the parts. In the above training 65 ^{Fail to> that} a semiconductor device that overall the

The reference unit and the object, consisting of a transistor, are formed with

gensland scanned at the same time to the comparative base and emitter separate feeds

possible characters, on the basis of which the relative are to be connected, can, as it is in

F i g. 2, a reference unit 40 and a Photo tube 41 can be provided for attaching to control a lead on one of the contacts, and a second reference unit and a further photo tube can be provided to gen, to a feed line at another contact steer.

In addition to the second reference unit and the associated phototube, the control device would suitably contain a beam splitting device between the objective lens 39 and the two reference units is used in such a way that the two optical paths from the lens 39 to the both reference units have substantially the same length; and the device would further expediently include an additional video amplifier for such an additional phototube and contain a switching device, such as a relay, which is connected to the output circuits of the two video amplifiers, each of which is connected to the two reference units are assigned to one or the other amplified output signal, each from one Amplifier is output to connect to the unit 44, so that the system is optionally on the one or can address the other reference unit. At as of the embodiment described and illustrated here, a semiconductor component on which multiple leads are to be attached to different contacts, progressing through one Series of successive stations are advanced, each of which consists of a control device through which a feed line is connected a special, predetermined or preprogrammed element or contact of the semiconductor component is attached.

The expression "circuit for controlling the grid size" is also intended to include a magnification control circuit. For the light point scanning tubes and the control tubes can various commercially available tubes can be used.

In the following, the values for the elements of the typical circuits shown are given for a special embodiment: Raster generator shown in FIG. 4:

Integrated Circuits 110

up to 113 LU 320

Integrated Circuits 114

and 115 LU 332

Capacitor 116 47 pF Capacitor 117 47 pF Resistor 118 4.7 kΩ Resistor 119 4.7 kΩ Resistance 120 4.7 kΩ Resistor 121 4.7 kΩ Capacitor 123 100 pF Capacitor 124 100 pF

Diode 125 FD 6193

Diode 126 FD 6193

Resistance 127 IkQ Capacitor 129 100 pF Capacitor 131 100 pF Resistor 132 4.7 kΩ Resistor 133 4.7 kΩ Capacitor 135 100 pF Resistor 136 4.7 kΩ Deflection amplifier shown in FIG. Transistor 137 Transistor 138 Capacitor 141 Capacitor 142

Transistors 143 ο and 1436 ... Transistors 145 a and 1456 ... capacitors 146 a and 1466 Resistors 147 a and 1476 .. Resistors 148 a and 1486 Resistors 149 a and 1496 resistors 150 a and 1506 Resistors 151a and 1516, resistors 152 a and 1526 .. capacitors 153 a and 1536 Capacitors 154 α and 154 6 resistor 155

Resistance 156 .. Resistance 157 .. Resistance 158 .. Resistance 159 ..

Transistor 160 ... Resistance 161 ..

Potentiometer 162 Transistor 78 2 N 3565 Resistance 79 1.2 kΩ transformer

80 16 turns

81 # 34 wire

82 50 turns

Capacitor 83 3300 pF. Resistance 84 1OkQ Resistance 5, IkQ Capacitor 86 0.01 μΡ Resistance 87 100 Q Capacitor 88 2.2 μΡ Integrated circuit 89 LU 332 Capacitor 90 0.0047 μΡ Capacitor 92 33 pF Resistor 94 4.7 kΩ Resistance 95 4.7 kΩ Resistor 96 4.7 kΩ Resistor 97 4.7 kΩ Resistance 98 1, OkQ Capacitor 99 47 pF

2N3638A 2 N 3638 A 4.7 μΈ 4.7 μΡ 2 N 3440 2 N 3440 0.1 μΡ 15OkQ 2.7 kQ 39 kQ 82 kQ 30OkQ 10OkQ 0.0015 μΡ 0.01 μΡ 10 kO 1OkQ

9.1 kQ 3.9 kQ 2, OkQ

2N3638A

8.2 kQ 5OkQ

Deflection amplifier shown in FIG. Resistance 163 13 kΩ Resistance 164 2, OkQ Transistor 137 '2 N 3638 A. Transistor 138 '2 N 3638 A. Transistor 160 '2 N 3638 A. Resistor 161 '8.2 kΩ Potentiometer 162 '5OkQ Video amplifier shown in FIG. Multiplier 32 Resistance 169 10OkQ Resistance 171 24OkQ Resistance 172 33OkQ Resistance 173 47OkQ Capacitor 174 0.05 μΡ Capacitor 175 0.05 μΡ Capacitor 176 0.0033 μΡ Transistor 177 2 N 3565 Resistance 178 1OkQ Transistor 179 2 N 3565 Transistor 180 Resistance 181 Resistance 182 Resistance 183 Transformers

184

185

186a and 1866

Resistance 189 Resistance 190 Resistance 191 Capacitor 192 Resistance 193 Capacitor 194 Resistance 195 Capacitor 196 Resistance 197 Resistance 198 Resistance 199 Capacitor 200 Transistors 202 a and 2026 .. Diodes 203a and 2036 Diodes 204a and 2046

Capacitor 205 a and 2056 .. Zener diodes 206 a and 2066

2 N 3565 resistors 207α and 207 6 .. 22 MQ

12 kQ resistor 208 33 kQ

2.7 kQ

400 turns of magnification control circuit shown in FIG.

# 38 wire transistor 237 2 N 3638 A

130 turns transistor 238/1 2 N 1307

130 turns transistor 239 2 N 3565

1OkΩ resistor 240 1.5 kΩ

100 Q to potentiometer 241 20 kQ

1, OkQ resistor 242 2, OkQ

4.7 μΡ potentiometer 243 5, OkQ

2.7MQ resistor 244 8.06 kQ

4.7 μΡ resistor 245 3.0IkQ

68 kQ is potentiometer 246 5.0 kQ

4.7 μΡ resistor 247 6.98 kΩ

12OkQ capacitor 248 100 μΡ

10OkQ resistor 250 1, OkQ

3.3 kQ

15 pF «o The values given here for a special

2 N 3439 circuit are not critical and can be rolled into one

FD 6193 wide range can be changed depending on the interior FD 6193 and external parameters, the choice of transistor

33 pF ^ ren, the special intended function for the

UZ 232 * as switching for a special application, etc. In addition 8 sheets of drawings

Claims (5)

Patent claims: 1. Device for automatically adjusting the position of a working device mechanically connected to a scanning device relative to a workpiece, in which a scanning beam scans a selected area of a reference unit and two partial beams are fed to photoelectric receivers which form the manipulated variable, characterized in that "> a true workpiece image (40), which is firmly connected to the working device (17), of which one of the two partial beams is scanned, which are formed before scanning from an oscillating scanning beam controlled by a raster generator (Sl), while simultaneously the workpiece (21) itself is scanned by the other partial beam, and that a correlator with analyzer (44) is connected to the two photoelectric receivers (32, 41), each of which is supplied with a partial beam, which converts the converted measurement signals into converts proportional steep values for the position control. 2. Device according to claim 1 with a cathode ray tube for generating the scanning as Beam, characterized in that a generator circuit is attached to the deflection circuit (each, y) of the tube (31) (Magnification control circuit 165 in Fig. 10) connected for continuous voltage increase is that the size of the surface grid during the scan continuously up to a limit value maximum control accuracy. 3. Device according to claim 2, characterized in that the generator circuit (magnification control circuit 165 in FIG. 10) is a constant increasing in the course of a control cycle Voltage can be generated. 4. Device according to claim 2 uvüd 3, characterized characterized that the voltage rise at least approximately at the speed of the «o mutual alignment of workpiece (21) and working device (17) is adaptable. 5. Device according to claim 1 to 4, characterized in that the image ("reference unit" 40 in Fig. 2) is a slide of the workpiece (21).