GB1275577A - Arrangement and method for controlling the displacements of a wafer or like sample in electronic apparatus - Google Patents

Arrangement and method for controlling the displacements of a wafer or like sample in electronic apparatus

Info

Publication number
GB1275577A
GB1275577A GB5122669A GB5122669A GB1275577A GB 1275577 A GB1275577 A GB 1275577A GB 5122669 A GB5122669 A GB 5122669A GB 5122669 A GB5122669 A GB 5122669A GB 1275577 A GB1275577 A GB 1275577A
Authority
GB
United Kingdom
Prior art keywords
wafer
circuit
specimen
interferometers
servo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5122669A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie Francaise Thomson Houston SA
Original Assignee
Compagnie Francaise Thomson Houston SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Francaise Thomson Houston SA filed Critical Compagnie Francaise Thomson Houston SA
Publication of GB1275577A publication Critical patent/GB1275577A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/20—Control of position or direction using feedback using a digital comparing device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
GB5122669A 1968-10-25 1969-10-17 Arrangement and method for controlling the displacements of a wafer or like sample in electronic apparatus Expired GB1275577A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR171342 1968-10-25

Publications (1)

Publication Number Publication Date
GB1275577A true GB1275577A (en) 1972-05-24

Family

ID=8656116

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5122669A Expired GB1275577A (en) 1968-10-25 1969-10-17 Arrangement and method for controlling the displacements of a wafer or like sample in electronic apparatus

Country Status (4)

Country Link
DE (1) DE1953712C3 (xx)
FR (1) FR1587573A (xx)
GB (1) GB1275577A (xx)
SE (1) SE362987B (xx)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2133930A (en) * 1983-01-08 1984-08-01 Canon Kk Workpiece carriages
WO2007001900A1 (en) * 2005-06-23 2007-01-04 Lewis George C System and method for positioning an object
CN107665827A (zh) * 2016-07-29 2018-02-06 上海微电子装备（集团）股份有限公司 芯片键合装置和方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8204450A (nl) * 1982-11-17 1984-06-18 Philips Nv Verplaatsingsinrichting, in het bijzonder voor het stralingslithografisch behandelen van een substraat.
US5140242A (en) * 1990-04-30 1992-08-18 International Business Machines Corporation Servo guided stage system
ATE175089T1 (de) * 1992-11-16 1999-01-15 Winterhalter Gastronom Gmbh Geschirrspülmaschine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2133930A (en) * 1983-01-08 1984-08-01 Canon Kk Workpiece carriages
WO2007001900A1 (en) * 2005-06-23 2007-01-04 Lewis George C System and method for positioning an object
US7298495B2 (en) 2005-06-23 2007-11-20 Lewis George C System and method for positioning an object through use of a rotating laser metrology system
CN107665827A (zh) * 2016-07-29 2018-02-06 上海微电子装备（集团）股份有限公司 芯片键合装置和方法
CN107665827B (zh) * 2016-07-29 2020-01-24 上海微电子装备（集团）股份有限公司 芯片键合装置和方法

Also Published As

Publication number Publication date
FR1587573A (xx) 1970-03-20
SE362987B (xx) 1973-12-27
DE1953712B2 (de) 1979-09-06
DE1953712C3 (de) 1980-06-26
DE1953712A1 (de) 1970-06-18

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee