GB1263599A - Improvements in or relating to pressure-sensitive electric transducers - Google Patents

Improvements in or relating to pressure-sensitive electric transducers

Info

Publication number
GB1263599A
GB1263599A GB62304/69A GB6230469A GB1263599A GB 1263599 A GB1263599 A GB 1263599A GB 62304/69 A GB62304/69 A GB 62304/69A GB 6230469 A GB6230469 A GB 6230469A GB 1263599 A GB1263599 A GB 1263599A
Authority
GB
United Kingdom
Prior art keywords
layer
core
electrode layer
bonded
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB62304/69A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Publication of GB1263599A publication Critical patent/GB1263599A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/006—Transducers other than those covered by groups H04R9/00 - H04R21/00 using solid state devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
GB62304/69A 1968-12-27 1969-12-22 Improvements in or relating to pressure-sensitive electric transducers Expired GB1263599A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP44000437A JPS497635B1 (https=) 1968-12-27 1968-12-27

Publications (1)

Publication Number Publication Date
GB1263599A true GB1263599A (en) 1972-02-09

Family

ID=11473774

Family Applications (1)

Application Number Title Priority Date Filing Date
GB62304/69A Expired GB1263599A (en) 1968-12-27 1969-12-22 Improvements in or relating to pressure-sensitive electric transducers

Country Status (6)

Country Link
US (1) US3686545A (https=)
JP (1) JPS497635B1 (https=)
DE (1) DE1963756C3 (https=)
FR (1) FR2027237A1 (https=)
GB (1) GB1263599A (https=)
NL (1) NL153725B (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3115565A1 (de) * 1981-04-16 1982-11-11 Nina Vladimirovna Moskva Alpatova Verfahren und einrichtung zur elektromechanischen stromsteuerung
GB2253276A (en) * 1991-01-31 1992-09-02 Rolls Royce Plc Fluid shear stress transducer

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA920280A (en) * 1970-11-16 1973-01-30 Omron Tateisi Electronics Co. Semiconductive transducer
US4523261A (en) * 1982-08-05 1985-06-11 West Philip G Light source, manually operated
US4843453A (en) * 1985-05-10 1989-06-27 Texas Instruments Incorporated Metal contacts and interconnections for VLSI devices
JPH04131722A (ja) * 1990-09-21 1992-05-06 Toyota Motor Corp 圧力センサ及び圧力センサの製造方法
DE4425318A1 (de) * 1994-07-18 1996-01-25 Reinhold Lang Spielgerät mit Würfeln oder dergleichen
US6232150B1 (en) 1998-12-03 2001-05-15 The Regents Of The University Of Michigan Process for making microstructures and microstructures made thereby
KR100499134B1 (ko) * 2002-10-28 2005-07-04 삼성전자주식회사 압축 접합 방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL284622A (https=) * 1961-10-24
DE1251871B (https=) * 1962-02-06 1900-01-01
US3241011A (en) * 1962-12-26 1966-03-15 Hughes Aircraft Co Silicon bonding technology
US3443041A (en) * 1965-06-28 1969-05-06 Bell Telephone Labor Inc Surface-barrier diode transducer using high dielectric semiconductor material
US3518508A (en) * 1965-12-10 1970-06-30 Matsushita Electric Industrial Co Ltd Transducer
US3458778A (en) * 1967-05-29 1969-07-29 Microwave Ass Silicon semiconductor with metal-silicide heterojunction
US3535773A (en) * 1968-04-03 1970-10-27 Itt Method of manufacturing semiconductor devices
US3566459A (en) * 1968-06-19 1971-03-02 Nasa Pressure sensitive transducers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3115565A1 (de) * 1981-04-16 1982-11-11 Nina Vladimirovna Moskva Alpatova Verfahren und einrichtung zur elektromechanischen stromsteuerung
GB2253276A (en) * 1991-01-31 1992-09-02 Rolls Royce Plc Fluid shear stress transducer

Also Published As

Publication number Publication date
NL6919004A (https=) 1970-06-30
NL153725B (nl) 1977-06-15
DE1963756C3 (de) 1979-04-19
FR2027237A1 (https=) 1970-09-25
US3686545A (en) 1972-08-22
JPS497635B1 (https=) 1974-02-21
DE1963756A1 (de) 1970-07-16
DE1963756B2 (de) 1972-08-03

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