GB1256895A - - Google Patents

Info

Publication number
GB1256895A
GB1256895A GB1256895DA GB1256895A GB 1256895 A GB1256895 A GB 1256895A GB 1256895D A GB1256895D A GB 1256895DA GB 1256895 A GB1256895 A GB 1256895A
Authority
GB
United Kingdom
Prior art keywords
plate
work chamber
secured
plates
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1256895A publication Critical patent/GB1256895A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Butt Welding And Welding Of Specific Article (AREA)
GB1256895D 1968-09-03 1968-09-03 Expired GB1256895A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4193168 1968-09-03

Publications (1)

Publication Number Publication Date
GB1256895A true GB1256895A (enrdf_load_stackoverflow) 1971-12-15

Family

ID=10422034

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1256895D Expired GB1256895A (enrdf_load_stackoverflow) 1968-09-03 1968-09-03

Country Status (1)

Country Link
GB (1) GB1256895A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023094088A1 (en) * 2021-11-29 2023-06-01 Asml Netherlands B.V. Platform for charged particle apparatus and components within a charged particle apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023094088A1 (en) * 2021-11-29 2023-06-01 Asml Netherlands B.V. Platform for charged particle apparatus and components within a charged particle apparatus

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees