GB1254911A - Method and apparatus for interferometric measurement - Google Patents

Method and apparatus for interferometric measurement

Info

Publication number
GB1254911A
GB1254911A GB0855/69A GB185569A GB1254911A GB 1254911 A GB1254911 A GB 1254911A GB 0855/69 A GB0855/69 A GB 0855/69A GB 185569 A GB185569 A GB 185569A GB 1254911 A GB1254911 A GB 1254911A
Authority
GB
United Kingdom
Prior art keywords
light
pair
axis
paths
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB0855/69A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Guidance and Electronics Co Inc
Original Assignee
Itek Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Itek Corp filed Critical Itek Corp
Publication of GB1254911A publication Critical patent/GB1254911A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB0855/69A 1968-01-18 1969-01-13 Method and apparatus for interferometric measurement Expired GB1254911A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US69882168A 1968-01-18 1968-01-18

Publications (1)

Publication Number Publication Date
GB1254911A true GB1254911A (en) 1971-11-24

Family

ID=24806795

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0855/69A Expired GB1254911A (en) 1968-01-18 1969-01-13 Method and apparatus for interferometric measurement

Country Status (9)

Country Link
US (1) US3597091A (https=)
JP (1) JPS4832139B1 (https=)
BE (1) BE727001A (https=)
CH (1) CH506047A (https=)
DE (1) DE1902290A1 (https=)
FR (1) FR2000401A1 (https=)
GB (1) GB1254911A (https=)
IL (1) IL31441A0 (https=)
NL (1) NL6900796A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2348515A (en) * 1999-03-29 2000-10-04 Ando Electric Michelson interferometer with mirrors moved by pulleys
US9046412B2 (en) 2010-01-18 2015-06-02 The Science And Technology Facilities Council Compact interferometer spectrometer

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3941480A (en) * 1974-02-08 1976-03-02 The Gerber Scientific Instrument Company Work locating system and method with temperature and other compensation capabilities
US4056323A (en) * 1975-04-02 1977-11-01 Ludman Jacques E Interferometer optical system
US4280054A (en) * 1979-04-30 1981-07-21 Varian Associates, Inc. X-Y Work table
EP0341960A3 (en) * 1988-05-10 1990-10-03 Hewlett-Packard Company Method for improving performance of a laser interferometer in the presence of wavefront distortion
DE10118392A1 (de) * 2001-04-13 2002-11-07 Zeiss Carl System und Verfahren zum Bestimmen einer Position oder/und Orientierung zweier Objekte relativ zueinander sowie Strahlführungsanordnung, Interferometeranordnung und Vorrichtung zum Ändern einer optischen Weglänge zum Einsatz in einem solchen System und Verfahren
JP4198929B2 (ja) * 2002-03-27 2008-12-17 パイオニア株式会社 レーザ測長器及びレーザ測長方法
US8004664B2 (en) 2002-04-18 2011-08-23 Chang Type Industrial Company Power tool control system
US7359762B2 (en) 2002-04-18 2008-04-15 Black & Decker Inc. Measurement and alignment device including a display system
US7073268B1 (en) 2002-04-18 2006-07-11 Black & Decker Inc. Level apparatus
US20060076385A1 (en) 2002-04-18 2006-04-13 Etter Mark A Power tool control system
US7369916B2 (en) 2002-04-18 2008-05-06 Black & Decker Inc. Drill press
US6937336B2 (en) * 2002-08-15 2005-08-30 Black & Decker, Inc. Optical alignment system for power tool
US20030233921A1 (en) 2002-06-19 2003-12-25 Garcia Jaime E. Cutter with optical alignment system
US7137327B2 (en) 2002-10-31 2006-11-21 Black & Decker Inc. Riving knife assembly for a dual bevel table saw
US7290474B2 (en) 2003-04-29 2007-11-06 Black & Decker Inc. System for rapidly stopping a spinning table saw blade
US20050113701A1 (en) * 2003-11-26 2005-05-26 Scimed Life Systems, Inc. Rotating measuring device
US7243440B2 (en) 2004-10-06 2007-07-17 Black & Decker Inc. Gauge for use with power tools
DE102008001473B3 (de) * 2008-04-30 2009-12-31 Robert Bosch Gmbh Optische Anordnung zur Beleuchtung eines Messobjektes, interferometrische Anordnung zur Vermessung von Flächen eines Messobjektes
DE102008001482A1 (de) * 2008-04-30 2009-11-05 Robert Bosch Gmbh Interferometrische Anordnung sowie Verfahren zum Einstellen eines Gangunterschieds
JP2011215016A (ja) * 2010-03-31 2011-10-27 Fujifilm Corp 非球面形状測定装置
DE102011101415A1 (de) * 2011-05-10 2012-11-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optische Anordnung zur Laserinterferenzstrukturierung einer Probe mit Strahlführung gleicher Weglänge

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2151631A (en) * 1936-05-07 1939-03-21 Williams William Ewart Optical interferometer
US2527338A (en) * 1946-10-12 1950-10-24 American Cyanamid Co Diffraction grating ruling engine
US2841049A (en) * 1955-03-30 1958-07-01 Perkin Elmer Corp Interferometer
US3409375A (en) * 1964-10-21 1968-11-05 Cutler Hammer Inc Gauging interferometer systems

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2348515A (en) * 1999-03-29 2000-10-04 Ando Electric Michelson interferometer with mirrors moved by pulleys
US6570658B1 (en) 1999-03-29 2003-05-27 Ando Electric Co., Ltd. Optical part driving device incorporated into a detachable block and optical interferometer including same
US9046412B2 (en) 2010-01-18 2015-06-02 The Science And Technology Facilities Council Compact interferometer spectrometer

Also Published As

Publication number Publication date
JPS4832139B1 (https=) 1973-10-04
CH506047A (fr) 1971-04-15
IL31441A0 (en) 1969-03-27
US3597091A (en) 1971-08-03
DE1902290A1 (de) 1969-09-04
BE727001A (https=) 1969-07-17
FR2000401A1 (https=) 1969-09-05
NL6900796A (https=) 1969-07-22

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