GB1253652A - Improvements in or relating to magnetic lenses - Google Patents

Improvements in or relating to magnetic lenses

Info

Publication number
GB1253652A
GB1253652A GB5014867A GB5014867A GB1253652A GB 1253652 A GB1253652 A GB 1253652A GB 5014867 A GB5014867 A GB 5014867A GB 5014867 A GB5014867 A GB 5014867A GB 1253652 A GB1253652 A GB 1253652A
Authority
GB
United Kingdom
Prior art keywords
coil
lens
target
source
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5014867A
Inventor
Thomas Mulvey
Richard Bassett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Development Corp UK
National Research Development Corp of India
Original Assignee
National Research Development Corp UK
National Research Development Corp of India
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Development Corp UK, National Research Development Corp of India filed Critical National Research Development Corp UK
Priority to GB5014867A priority Critical patent/GB1253652A/en
Priority to FR1591233D priority patent/FR1591233A/fr
Priority to NL6815642A priority patent/NL163897C/en
Priority to DE19681806891 priority patent/DE1806891C3/en
Publication of GB1253652A publication Critical patent/GB1253652A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/002—Cooling arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/14—Lenses magnetic
    • H01J2237/142—Lenses magnetic with superconducting coils

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Electron Beam Exposure (AREA)
  • Magnetic Resonance Imaging Apparatus (AREA)

Abstract

1,253,652. Electron beam apparatus. NATIONAL RESEARCH DEVELOPMENT CORP. 4 Nov., 1968 [3 Nov., 1967], No. 50148/67. Heading H1D. A magnetic lens for focusing a beam of charged particles 12 on to a target 16 comprising an electrically conducting circular wire coil 13 is positioned around the beam axis behind the target 16 with respect to the beam by a distance W, from the target position axially to a plane containing the inner diameter of the nearest face of the coil to the source 11, which is less than the mean between the inner and outer diameters (= R 1 + R 2 ) of the coil. Preferably the difference between the inner and outer radii (R 2 -R 1 ) is at least twice the axial thickness T of the coil and R 2 is at least twice and preferably three times R 1 . Also R 2 is preferably not less than 5T. The coil may have a layer 20 of material of high magnetic permeability applied to the side remote from source 11 with, as shown in Fig. 4, a removable central insert 21. The high permeability layer may extend around the edges and front face of the coil, and cooling ducts for the coil may be incorporated in these layers, Fig. 3 (not shown). Alternatively, as shown in Fig. 4, the coil may be formed as a series of alternately axially offset concentric sections 30 with the passages therebetween being used as duets for a cooling fluid, e.g. transformer oil. The coil may be concave towards the source 11, Fig. 2 (not shown). Electrical connection to the inner radius of the coil may be made by using a number of symmetrically distributed connections (23) to a copper foil screen (22) interposed between layer 20 and the coil, Fig. 5 (not shown). As it is employed behind the target the lens may conveniently be housed outside the vacuum envelope, thus facilitating easier cooling in cryogenic apparatus enabling the lens to be operated in a superconducting state. The lens may be used in an electron beam cutting or welding apparatus, in transmission or scanning electron microscopes and in electron probe X- ray microanalysis apparatus.
GB5014867A 1967-11-03 1967-11-03 Improvements in or relating to magnetic lenses Expired GB1253652A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB5014867A GB1253652A (en) 1967-11-03 1967-11-03 Improvements in or relating to magnetic lenses
FR1591233D FR1591233A (en) 1967-11-03 1968-10-31
NL6815642A NL163897C (en) 1967-11-03 1968-11-01 APPARATUS PROVIDED WITH A SOURCE FOR A BUNDLE LOADED PARTICULARS AND A MAGNETIC LENS FOR FOCUSING THE BUNDLE ON A TREATING PLATE.
DE19681806891 DE1806891C3 (en) 1967-11-03 1968-11-04 Magnetic lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5014867A GB1253652A (en) 1967-11-03 1967-11-03 Improvements in or relating to magnetic lenses

Publications (1)

Publication Number Publication Date
GB1253652A true GB1253652A (en) 1971-11-17

Family

ID=10454847

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5014867A Expired GB1253652A (en) 1967-11-03 1967-11-03 Improvements in or relating to magnetic lenses

Country Status (4)

Country Link
DE (1) DE1806891C3 (en)
FR (1) FR1591233A (en)
GB (1) GB1253652A (en)
NL (1) NL163897C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1943658A2 (en) * 2005-09-30 2008-07-16 Applied Materials, Inc. Cooling module for charged particle beam column elements

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE898637C (en) * 1942-06-03 1953-12-03 Siemens Reiniger Werke Ag Electron discharge tubes, in particular X-ray tubes
DE1251828B (en) * 1957-09-11

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1943658A2 (en) * 2005-09-30 2008-07-16 Applied Materials, Inc. Cooling module for charged particle beam column elements
EP1943658A4 (en) * 2005-09-30 2010-06-16 Applied Materials Inc Cooling module for charged particle beam column elements

Also Published As

Publication number Publication date
NL163897C (en) 1980-10-15
NL6815642A (en) 1969-05-06
FR1591233A (en) 1970-04-27
DE1806891A1 (en) 1969-06-19
NL163897B (en) 1980-05-16
DE1806891C3 (en) 1982-03-04
DE1806891B2 (en) 1981-06-11

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