NL163897C - APPARATUS PROVIDED WITH A SOURCE FOR A BUNDLE LOADED PARTICULARS AND A MAGNETIC LENS FOR FOCUSING THE BUNDLE ON A TREATING PLATE. - Google Patents
APPARATUS PROVIDED WITH A SOURCE FOR A BUNDLE LOADED PARTICULARS AND A MAGNETIC LENS FOR FOCUSING THE BUNDLE ON A TREATING PLATE.Info
- Publication number
- NL163897C NL163897C NL6815642A NL6815642A NL163897C NL 163897 C NL163897 C NL 163897C NL 6815642 A NL6815642 A NL 6815642A NL 6815642 A NL6815642 A NL 6815642A NL 163897 C NL163897 C NL 163897C
- Authority
- NL
- Netherlands
- Prior art keywords
- bundle
- particulars
- focusing
- source
- apparatus provided
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/002—Cooling arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/10—Lenses
- H01J2237/14—Lenses magnetic
- H01J2237/142—Lenses magnetic with superconducting coils
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Particle Accelerators (AREA)
- Electron Beam Exposure (AREA)
- Magnetic Resonance Imaging Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5014867A GB1253652A (en) | 1967-11-03 | 1967-11-03 | Improvements in or relating to magnetic lenses |
Publications (3)
Publication Number | Publication Date |
---|---|
NL6815642A NL6815642A (en) | 1969-05-06 |
NL163897B NL163897B (en) | 1980-05-16 |
NL163897C true NL163897C (en) | 1980-10-15 |
Family
ID=10454847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL6815642A NL163897C (en) | 1967-11-03 | 1968-11-01 | APPARATUS PROVIDED WITH A SOURCE FOR A BUNDLE LOADED PARTICULARS AND A MAGNETIC LENS FOR FOCUSING THE BUNDLE ON A TREATING PLATE. |
Country Status (4)
Country | Link |
---|---|
DE (1) | DE1806891C3 (en) |
FR (1) | FR1591233A (en) |
GB (1) | GB1253652A (en) |
NL (1) | NL163897C (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7345287B2 (en) * | 2005-09-30 | 2008-03-18 | Applied Materials, Inc. | Cooling module for charged particle beam column elements |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE898637C (en) * | 1942-06-03 | 1953-12-03 | Siemens Reiniger Werke Ag | Electron discharge tubes, in particular X-ray tubes |
DE1251828B (en) * | 1957-09-11 |
-
1967
- 1967-11-03 GB GB5014867A patent/GB1253652A/en not_active Expired
-
1968
- 1968-10-31 FR FR1591233D patent/FR1591233A/fr not_active Expired
- 1968-11-01 NL NL6815642A patent/NL163897C/en not_active IP Right Cessation
- 1968-11-04 DE DE19681806891 patent/DE1806891C3/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL163897B (en) | 1980-05-16 |
NL6815642A (en) | 1969-05-06 |
FR1591233A (en) | 1970-04-27 |
DE1806891B2 (en) | 1981-06-11 |
GB1253652A (en) | 1971-11-17 |
DE1806891C3 (en) | 1982-03-04 |
DE1806891A1 (en) | 1969-06-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
V1 | Lapsed because of non-payment of the annual fee |