NL163897C - APPARATUS PROVIDED WITH A SOURCE FOR A BUNDLE LOADED PARTICULARS AND A MAGNETIC LENS FOR FOCUSING THE BUNDLE ON A TREATING PLATE. - Google Patents

APPARATUS PROVIDED WITH A SOURCE FOR A BUNDLE LOADED PARTICULARS AND A MAGNETIC LENS FOR FOCUSING THE BUNDLE ON A TREATING PLATE.

Info

Publication number
NL163897C
NL163897C NL6815642A NL6815642A NL163897C NL 163897 C NL163897 C NL 163897C NL 6815642 A NL6815642 A NL 6815642A NL 6815642 A NL6815642 A NL 6815642A NL 163897 C NL163897 C NL 163897C
Authority
NL
Netherlands
Prior art keywords
bundle
particulars
focusing
source
apparatus provided
Prior art date
Application number
NL6815642A
Other languages
Dutch (nl)
Other versions
NL163897B (en
NL6815642A (en
Original Assignee
Nat Res Dev
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Res Dev filed Critical Nat Res Dev
Publication of NL6815642A publication Critical patent/NL6815642A/xx
Publication of NL163897B publication Critical patent/NL163897B/en
Application granted granted Critical
Publication of NL163897C publication Critical patent/NL163897C/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/002—Cooling arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/14—Lenses magnetic
    • H01J2237/142—Lenses magnetic with superconducting coils

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Electron Beam Exposure (AREA)
  • Magnetic Resonance Imaging Apparatus (AREA)
NL6815642A 1967-11-03 1968-11-01 APPARATUS PROVIDED WITH A SOURCE FOR A BUNDLE LOADED PARTICULARS AND A MAGNETIC LENS FOR FOCUSING THE BUNDLE ON A TREATING PLATE. NL163897C (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5014867A GB1253652A (en) 1967-11-03 1967-11-03 Improvements in or relating to magnetic lenses

Publications (3)

Publication Number Publication Date
NL6815642A NL6815642A (en) 1969-05-06
NL163897B NL163897B (en) 1980-05-16
NL163897C true NL163897C (en) 1980-10-15

Family

ID=10454847

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6815642A NL163897C (en) 1967-11-03 1968-11-01 APPARATUS PROVIDED WITH A SOURCE FOR A BUNDLE LOADED PARTICULARS AND A MAGNETIC LENS FOR FOCUSING THE BUNDLE ON A TREATING PLATE.

Country Status (4)

Country Link
DE (1) DE1806891C3 (en)
FR (1) FR1591233A (en)
GB (1) GB1253652A (en)
NL (1) NL163897C (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7345287B2 (en) * 2005-09-30 2008-03-18 Applied Materials, Inc. Cooling module for charged particle beam column elements

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE898637C (en) * 1942-06-03 1953-12-03 Siemens Reiniger Werke Ag Electron discharge tubes, in particular X-ray tubes
DE1251828B (en) * 1957-09-11

Also Published As

Publication number Publication date
NL163897B (en) 1980-05-16
NL6815642A (en) 1969-05-06
FR1591233A (en) 1970-04-27
DE1806891B2 (en) 1981-06-11
GB1253652A (en) 1971-11-17
DE1806891C3 (en) 1982-03-04
DE1806891A1 (en) 1969-06-19

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Legal Events

Date Code Title Description
V1 Lapsed because of non-payment of the annual fee