GB1251675A - - Google Patents
Info
- Publication number
- GB1251675A GB1251675A GB2923871A GB2923871A GB1251675A GB 1251675 A GB1251675 A GB 1251675A GB 2923871 A GB2923871 A GB 2923871A GB 2923871 A GB2923871 A GB 2923871A GB 1251675 A GB1251675 A GB 1251675A
- Authority
- GB
- United Kingdom
- Prior art keywords
- conductor
- diaphragm
- semi
- support
- regrowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
1,251,675. Semi-conductor force transducers. CONRAC CORP. 15 Oct., 1968, No. 29238/71. Divided out of 1,251,674. Heading H1K. The claims of this specification the subject matter of which has been divided from Specification 48784/68 are directed to formation of a force transducer by placing an annular semi-conductor support member on the edge of a monocrystalline semi-conductor diaphragm and regrowing it thereon by interposing a metal in which the semi-conductor is soluble between support and diaphragm and subjecting the assembly to temperature gradient zone melting, or where the support is monocrystalline by correspondingly regrowing the periphery of the diaphragm on it. With sensors formed in the diaphragm electrically connected and the support clamped the resulting assembly can be used as a force transducer. Further processing leading to formation of pressure transducers are described also in Specification 48784/68.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2923871A GB1251675A (en) | 1968-10-15 | 1968-10-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2923871A GB1251675A (en) | 1968-10-15 | 1968-10-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1251675A true GB1251675A (en) | 1971-10-27 |
Family
ID=45317189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2923871A Expired GB1251675A (en) | 1968-10-15 | 1968-10-15 |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1251675A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2470373A1 (en) * | 1979-07-17 | 1981-05-29 | Data Instr Inc | METHOD OF FORMING A FLEXIBLE DIAPHRAGM USED IN A PRESSURE TRANSDUCER |
-
1968
- 1968-10-15 GB GB2923871A patent/GB1251675A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2470373A1 (en) * | 1979-07-17 | 1981-05-29 | Data Instr Inc | METHOD OF FORMING A FLEXIBLE DIAPHRAGM USED IN A PRESSURE TRANSDUCER |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |