GB1251675A - - Google Patents

Info

Publication number
GB1251675A
GB1251675A GB2923871A GB2923871A GB1251675A GB 1251675 A GB1251675 A GB 1251675A GB 2923871 A GB2923871 A GB 2923871A GB 2923871 A GB2923871 A GB 2923871A GB 1251675 A GB1251675 A GB 1251675A
Authority
GB
United Kingdom
Prior art keywords
conductor
diaphragm
semi
support
regrowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2923871A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to GB2923871A priority Critical patent/GB1251675A/en
Publication of GB1251675A publication Critical patent/GB1251675A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

1,251,675. Semi-conductor force transducers. CONRAC CORP. 15 Oct., 1968, No. 29238/71. Divided out of 1,251,674. Heading H1K. The claims of this specification the subject matter of which has been divided from Specification 48784/68 are directed to formation of a force transducer by placing an annular semi-conductor support member on the edge of a monocrystalline semi-conductor diaphragm and regrowing it thereon by interposing a metal in which the semi-conductor is soluble between support and diaphragm and subjecting the assembly to temperature gradient zone melting, or where the support is monocrystalline by correspondingly regrowing the periphery of the diaphragm on it. With sensors formed in the diaphragm electrically connected and the support clamped the resulting assembly can be used as a force transducer. Further processing leading to formation of pressure transducers are described also in Specification 48784/68.
GB2923871A 1968-10-15 1968-10-15 Expired GB1251675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB2923871A GB1251675A (en) 1968-10-15 1968-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2923871A GB1251675A (en) 1968-10-15 1968-10-15

Publications (1)

Publication Number Publication Date
GB1251675A true GB1251675A (en) 1971-10-27

Family

ID=45317189

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2923871A Expired GB1251675A (en) 1968-10-15 1968-10-15

Country Status (1)

Country Link
GB (1) GB1251675A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2470373A1 (en) * 1979-07-17 1981-05-29 Data Instr Inc METHOD OF FORMING A FLEXIBLE DIAPHRAGM USED IN A PRESSURE TRANSDUCER

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2470373A1 (en) * 1979-07-17 1981-05-29 Data Instr Inc METHOD OF FORMING A FLEXIBLE DIAPHRAGM USED IN A PRESSURE TRANSDUCER

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee