GB1240399A - An electrostatic accelerator - Google Patents

An electrostatic accelerator

Info

Publication number
GB1240399A
GB1240399A GB5304669A GB5304669A GB1240399A GB 1240399 A GB1240399 A GB 1240399A GB 5304669 A GB5304669 A GB 5304669A GB 5304669 A GB5304669 A GB 5304669A GB 1240399 A GB1240399 A GB 1240399A
Authority
GB
United Kingdom
Prior art keywords
valve
enclosure
source
atmosphere
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5304669A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CIE GENERALE DE SYSTEMES ET DE
Original Assignee
CIE GENERALE DE SYSTEMES ET DE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CIE GENERALE DE SYSTEMES ET DE filed Critical CIE GENERALE DE SYSTEMES ET DE
Publication of GB1240399A publication Critical patent/GB1240399A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/86—Vessels; Containers; Vacuum locks
    • H01J29/865—Vacuum locks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)

Abstract

1,240,399. Discharge apparatus. COMPAGNIE GENERALE DE SYSTEMES ET DE PROJETS AVANCES. 29 Oct., 1969 [30 Oct., 1968], No. 53046/69. Heading H1D. An electrostatic accelerator for charged particles, e.g. for an electron microscope assembly, comprises, within a general enclosure 1 containing a dielectric fluid under pressure, e.g. sulphur hexafluoride at 3 Bar, a charged particle source 3 and an accelerator tube 11 with a slide valve 13 disposed between them which may be closed by a valve control device to isolate them, so that the source may be repaired, for example, without causing air to enter the accelerator tube. The source 3 is located in flange 5 within the general enclosure which together with a movable mating tube 9 forms a separate air lock enclosure isolated from the atmosphere of the general enclosure and which can then be evacuated and brought to the ambient atmosphere. The valve control device comprises a piston 19, coupled via a lever 15 to the valve 13, sliding in a cylinder 21 within which it is constrained to the valve open position by a spring 23. The cylinder 21 is open at one end to the atmosphere of the general enclosure 1 and at its other end normally communicates with the atmosphere of the enclosure formed by tube 9 and flange 5 and when this airlock enclosure is reduced to ambient atmosphere (1 Bar pressure) the resulting unequal pressures on opposite sides of piston 19 cause it to move in the cylinder 21 against spring 23 to close the valve 13. The source 3 can now be repaired or replaced without affecting the remainder of the tube. After evacuation and sealing of source 3, the air lock enclosure is evacuated and refilled with the dielectric fluid under pressure. This will equalize the pressures on either side of piston 19 but the valve 13 will open under the action of spring 23. If access to the accelerator tube 11 is required during repair of the source 3 the valve 13 may be opened by changing the direction of the valve 25 to place the right-hand end of cylinder 21 in communication with the atmosphere of the general enclosure 1 again.
GB5304669A 1968-10-30 1969-10-29 An electrostatic accelerator Expired GB1240399A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR172046 1968-10-30

Publications (1)

Publication Number Publication Date
GB1240399A true GB1240399A (en) 1971-07-21

Family

ID=8656330

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5304669A Expired GB1240399A (en) 1968-10-30 1969-10-29 An electrostatic accelerator

Country Status (4)

Country Link
CH (1) CH499199A (en)
DE (1) DE1954715A1 (en)
FR (1) FR1590376A (en)
GB (1) GB1240399A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5010229A (en) * 1987-11-30 1991-04-23 Siemens Aktiengesellschaft Apparatus for electron beam welding of workpieces

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5010229A (en) * 1987-11-30 1991-04-23 Siemens Aktiengesellschaft Apparatus for electron beam welding of workpieces

Also Published As

Publication number Publication date
FR1590376A (en) 1970-04-13
CH499199A (en) 1970-11-15
DE1954715A1 (en) 1970-05-06

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