GB1232115A - - Google Patents

Info

Publication number
GB1232115A
GB1232115A GB1232115DA GB1232115A GB 1232115 A GB1232115 A GB 1232115A GB 1232115D A GB1232115D A GB 1232115DA GB 1232115 A GB1232115 A GB 1232115A
Authority
GB
United Kingdom
Prior art keywords
resonator
semi
transducer
conductor
piezo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1232115A publication Critical patent/GB1232115A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/50—Mechanical coupling means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02519—Torsional
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
    • H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
GB1232115D 1967-05-31 1968-05-27 Expired GB1232115A (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DET0033983 1967-05-31

Publications (1)

Publication Number Publication Date
GB1232115A true GB1232115A (https=) 1971-05-19

Family

ID=7558170

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1232115D Expired GB1232115A (https=) 1967-05-31 1968-05-27

Country Status (3)

Country Link
US (1) US3566166A (https=)
DE (1) DE1591677A1 (https=)
GB (1) GB1232115A (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4054807A (en) * 1973-03-29 1977-10-18 Kabushiki Kaisha Daini Seikosha Quartz oscillator mountings
US4517486A (en) * 1984-02-21 1985-05-14 The United States Of America As Represented By The Secretary Of The Army Monolitic band-pass filter using piezoelectric cantilevers
US5114777B2 (en) * 1985-08-05 1997-11-18 Wangner Systems Corp Woven multilayer papermaking fabric having increased stability and permeability and method
US5367217A (en) * 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer
US5552655A (en) * 1994-05-04 1996-09-03 Trw Inc. Low frequency mechanical resonator
US5856722A (en) * 1996-01-02 1999-01-05 Cornell Research Foundation, Inc. Microelectromechanics-based frequency signature sensor
WO2010150866A1 (ja) * 2009-06-26 2010-12-29 株式会社村田製作所 圧電発電装置及び無線センサネットワーク装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3209178A (en) * 1965-09-28 Fig.ii
US3071736A (en) * 1961-04-13 1963-01-01 Friedrich O Vonbun Heat sinks for crystal oscillators
GB1001714A (en) * 1961-08-22 1965-08-18 Toko Radio Coil Kenkyusho Kk Electromechanical filter
GB1051575A (https=) * 1963-11-02
US3294988A (en) * 1964-09-24 1966-12-27 Hewlett Packard Co Transducers
US3414832A (en) * 1964-12-04 1968-12-03 Westinghouse Electric Corp Acoustically resonant device
US3411048A (en) * 1965-05-19 1968-11-12 Bell Telephone Labor Inc Semiconductor integrated circuitry with improved isolation between active and passive elements
US3395265A (en) * 1965-07-26 1968-07-30 Teledyne Inc Temperature controlled microcircuit
US3453711A (en) * 1966-08-24 1969-07-08 Corning Glass Works Method of connecting together a plurality of transducer segments
US3446975A (en) * 1966-11-07 1969-05-27 Zenith Radio Corp Acousto-electric filter utilizing surface wave propagation in which the center frequency is determined by a conductivity pattern resulting from an optical image
US3437849A (en) * 1966-11-21 1969-04-08 Motorola Inc Temperature compensation of electrical devices

Also Published As

Publication number Publication date
US3566166A (en) 1971-02-23
DE1591677A1 (de) 1971-01-14

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees