GB1225856A - - Google Patents

Info

Publication number
GB1225856A
GB1225856A GB4157268A GB1225856DA GB1225856A GB 1225856 A GB1225856 A GB 1225856A GB 4157268 A GB4157268 A GB 4157268A GB 1225856D A GB1225856D A GB 1225856DA GB 1225856 A GB1225856 A GB 1225856A
Authority
GB
United Kingdom
Prior art keywords
specimen
holder
levers
blocks
imparted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4157268A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1225856A publication Critical patent/GB1225856A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
GB4157268A 1968-08-30 1968-08-30 Expired GB1225856A (cs)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4157268 1968-08-30

Publications (1)

Publication Number Publication Date
GB1225856A true GB1225856A (cs) 1971-03-24

Family

ID=10420318

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4157268A Expired GB1225856A (cs) 1968-08-30 1968-08-30

Country Status (2)

Country Link
US (1) US3643091A (cs)
GB (1) GB1225856A (cs)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3885157A (en) * 1973-12-12 1975-05-20 Electron Optical Research And Electron beam image processing device
US4013262A (en) * 1974-12-13 1977-03-22 Varian Associates Rotary apparatus for moving workpieces through treatment beam with controlled angle of orientation and ion implanter incorporating such apparatus
US4996433A (en) * 1989-11-06 1991-02-26 Gatan, Inc. Specimen heating holder for electron microscopes
JPH07122218A (ja) * 1993-10-26 1995-05-12 Ryoden Semiconductor Syst Eng Kk 走査プローブ顕微鏡ヘッドの試料台
JPH07335165A (ja) * 1994-06-10 1995-12-22 Hitachi Ltd 格子欠陥観察用電子顕微鏡
US5698856A (en) * 1996-08-05 1997-12-16 Frasca; Peter Specimen holder for electron microscope
US6002136A (en) * 1998-05-08 1999-12-14 International Business Machines Corporation Microscope specimen holder and grid arrangement for in-situ and ex-situ repeated analysis
JP2002025490A (ja) * 2000-07-13 2002-01-25 Mitsubishi Electric Corp 電子顕微鏡の試料ホルダー、試料台および試料台用治具
EP1753122A1 (en) * 2005-08-12 2007-02-14 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Movement platform for carrier with five degrees of freedom
DE102009001587A1 (de) * 2009-01-06 2010-07-08 Carl Zeiss Nts Gmbh Verfahren zur Einstellung eines Betriebsparameters eines Teilchenstrahlgeräts sowie Probenhalter zur Durchführung des Verfahrens
JP5250470B2 (ja) * 2009-04-22 2013-07-31 株式会社日立ハイテクノロジーズ 試料ホールダ，該試料ホールダの使用法、及び荷電粒子装置
JP5532425B2 (ja) * 2010-08-27 2014-06-25 株式会社日立ハイテクノロジーズ 荷電粒子装置用試料ホルダ
US20150022807A1 (en) * 2012-03-12 2015-01-22 Ecole Polytechnique Federale De Lausanne (Epfl) Universal sample holder
US10312162B2 (en) * 2016-06-21 2019-06-04 Fei Company Methods and apparatus for semiconductor sample workflow

Also Published As

Publication number Publication date
US3643091A (en) 1972-02-15

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee