GB1199648A - Doping of Silicon Discs for Semi-Conductors - Google Patents
Doping of Silicon Discs for Semi-ConductorsInfo
- Publication number
- GB1199648A GB1199648A GB5828967A GB5828967A GB1199648A GB 1199648 A GB1199648 A GB 1199648A GB 5828967 A GB5828967 A GB 5828967A GB 5828967 A GB5828967 A GB 5828967A GB 1199648 A GB1199648 A GB 1199648A
- Authority
- GB
- United Kingdom
- Prior art keywords
- discs
- row
- aluminium
- semi
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 3
- 229910052710 silicon Inorganic materials 0.000 title abstract 3
- 239000010703 silicon Substances 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 4
- 229910052782 aluminium Inorganic materials 0.000 abstract 4
- 239000004411 aluminium Substances 0.000 abstract 4
- 239000010453 quartz Substances 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 3
- 230000008016 vaporization Effects 0.000 abstract 1
- 238000009834 vaporization Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
- C30B31/165—Diffusion sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE1773066A SE322847B (enrdf_load_stackoverflow) | 1966-12-27 | 1966-12-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1199648A true GB1199648A (en) | 1970-07-22 |
Family
ID=20303918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5828967A Expired GB1199648A (en) | 1966-12-27 | 1967-12-22 | Doping of Silicon Discs for Semi-Conductors |
Country Status (3)
Country | Link |
---|---|
FR (1) | FR1549051A (enrdf_load_stackoverflow) |
GB (1) | GB1199648A (enrdf_load_stackoverflow) |
SE (1) | SE322847B (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4082865A (en) * | 1976-11-19 | 1978-04-04 | Rca Corporation | Method for chemical vapor deposition |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2126904B1 (enrdf_load_stackoverflow) * | 1970-12-07 | 1974-04-26 | Silec Semi Conducteurs |
-
1966
- 1966-12-27 SE SE1773066A patent/SE322847B/xx unknown
-
1967
- 1967-12-22 GB GB5828967A patent/GB1199648A/en not_active Expired
- 1967-12-26 FR FR1549051D patent/FR1549051A/fr not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4082865A (en) * | 1976-11-19 | 1978-04-04 | Rca Corporation | Method for chemical vapor deposition |
Also Published As
Publication number | Publication date |
---|---|
SE322847B (enrdf_load_stackoverflow) | 1970-04-20 |
FR1549051A (enrdf_load_stackoverflow) | 1968-12-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PLNP | Patent lapsed through nonpayment of renewal fees |