SE322847B - - Google Patents

Info

Publication number
SE322847B
SE322847B SE1773066A SE1773066A SE322847B SE 322847 B SE322847 B SE 322847B SE 1773066 A SE1773066 A SE 1773066A SE 1773066 A SE1773066 A SE 1773066A SE 322847 B SE322847 B SE 322847B
Authority
SE
Sweden
Application number
SE1773066A
Inventor
E Spicar
Original Assignee
Asea Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asea Ab filed Critical Asea Ab
Priority to SE1773066A priority Critical patent/SE322847B/xx
Priority to GB5828967A priority patent/GB1199648A/en
Priority to FR1549051D priority patent/FR1549051A/fr
Publication of SE322847B publication Critical patent/SE322847B/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16—Feed and outlet means for the gases; Modifying the flow of the gases
    • C30B31/165—Diffusion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
SE1773066A 1966-12-27 1966-12-27 SE322847B (enrdf_load_stackoverflow)

Priority Applications (3)

Application Number Priority Date Filing Date Title
SE1773066A SE322847B (enrdf_load_stackoverflow) 1966-12-27 1966-12-27
GB5828967A GB1199648A (en) 1966-12-27 1967-12-22 Doping of Silicon Discs for Semi-Conductors
FR1549051D FR1549051A (enrdf_load_stackoverflow) 1966-12-27 1967-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE1773066A SE322847B (enrdf_load_stackoverflow) 1966-12-27 1966-12-27

Publications (1)

Publication Number Publication Date
SE322847B true SE322847B (enrdf_load_stackoverflow) 1970-04-20

Family

ID=20303918

Family Applications (1)

Application Number Title Priority Date Filing Date
SE1773066A SE322847B (enrdf_load_stackoverflow) 1966-12-27 1966-12-27

Country Status (3)

Country Link
FR (1) FR1549051A (enrdf_load_stackoverflow)
GB (1) GB1199648A (enrdf_load_stackoverflow)
SE (1) SE322847B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2126904B1 (enrdf_load_stackoverflow) * 1970-12-07 1974-04-26 Silec Semi Conducteurs
US4062318A (en) * 1976-11-19 1977-12-13 Rca Corporation Apparatus for chemical vapor deposition

Also Published As

Publication number Publication date
GB1199648A (en) 1970-07-22
FR1549051A (enrdf_load_stackoverflow) 1968-12-06

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