GB1197362A - Gas Plasma Apparatus - Google Patents

Gas Plasma Apparatus

Info

Publication number
GB1197362A
GB1197362A GB2257/68A GB225768A GB1197362A GB 1197362 A GB1197362 A GB 1197362A GB 2257/68 A GB2257/68 A GB 2257/68A GB 225768 A GB225768 A GB 225768A GB 1197362 A GB1197362 A GB 1197362A
Authority
GB
United Kingdom
Prior art keywords
tube
xenon
argon
generator
square wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2257/68A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1197362A publication Critical patent/GB1197362A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0975—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser using inductive or capacitive excitation

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
GB2257/68A 1967-04-26 1968-01-16 Gas Plasma Apparatus Expired GB1197362A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63396467A 1967-04-26 1967-04-26

Publications (1)

Publication Number Publication Date
GB1197362A true GB1197362A (en) 1970-07-01

Family

ID=24541882

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2257/68A Expired GB1197362A (en) 1967-04-26 1968-01-16 Gas Plasma Apparatus

Country Status (5)

Country Link
US (1) US3509490A (de)
JP (1) JPS503629B1 (de)
DE (1) DE1639273B2 (de)
FR (1) FR1549855A (de)
GB (1) GB1197362A (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4295103A (en) * 1978-03-23 1981-10-13 Ariold Ljudmirsky Metal vapor laser
JPS56130387A (en) * 1980-03-18 1981-10-13 Haezuka Yoshiro Printing method for silk cloth and the like
CZ300556B6 (cs) * 2002-03-20 2009-06-17 Ceské vysoké ucení technické v Praze Fakulta elektrotechnická Výbojka s nežhavenou katodou
US7307375B2 (en) * 2004-07-09 2007-12-11 Energetiq Technology Inc. Inductively-driven plasma light source
EP2187711B1 (de) * 2004-07-09 2012-01-18 Energetiq Technology Inc. Induktiv angesteuerte Plasma-Lichtquelle
US7948185B2 (en) * 2004-07-09 2011-05-24 Energetiq Technology Inc. Inductively-driven plasma light source
US8742665B2 (en) * 2009-11-18 2014-06-03 Applied Materials, Inc. Plasma source design
US8771538B2 (en) 2009-11-18 2014-07-08 Applied Materials, Inc. Plasma source design

Also Published As

Publication number Publication date
DE1639273B2 (de) 1977-04-07
JPS503629B1 (de) 1975-02-07
US3509490A (en) 1970-04-28
DE1639273A1 (de) 1970-02-26
FR1549855A (de) 1968-12-13

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee