GB1155124A - Method Of and Apparatus for Coating An Article With A MAterial by Evaporation In A Vacuum - Google Patents

Method Of and Apparatus for Coating An Article With A MAterial by Evaporation In A Vacuum

Info

Publication number
GB1155124A
GB1155124A GB1739567A GB1739567A GB1155124A GB 1155124 A GB1155124 A GB 1155124A GB 1739567 A GB1739567 A GB 1739567A GB 1739567 A GB1739567 A GB 1739567A GB 1155124 A GB1155124 A GB 1155124A
Authority
GB
United Kingdom
Prior art keywords
laser
mirror
source
substrate
source material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1739567A
Inventor
John Rupert Davy
Alexander James Napier Hope
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Optronics Ltd
Original Assignee
Thales Optronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Optronics Ltd filed Critical Thales Optronics Ltd
Priority to GB1739567A priority Critical patent/GB1155124A/en
Priority to FR1562371D priority patent/FR1562371A/fr
Publication of GB1155124A publication Critical patent/GB1155124A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

1,155,124. Lasers. BARR & STROUD Ltd. 22 Feb., 1968 [15 April, 1967], No. 17395/67. Heading H1C. [Also in Division C7] In a vacuum vapour deposition process of coating a substrate with a material such as MgF 2 , Na 3 AlF 6 , ZnS, CeO, SiO 2 , SiO, TiO 2 , ThO and thorium oxyfluoride the source material is evaporated by a beam from a CO 2 gas laser. As shown in the drawing the laser 10 is energized by electrodes 14, gas is supplied through tube 16 and cooling water via 18 and 19. Mirrors 20, 21 are located at each end of the laser, mirror 21 having an aperture through which the beam passes and enters the vacuum chamber 12 via window 33. The substrate is located on holder 30 and the source material in boats 31. The laser produces radiant energy at a wavelength of 10À6 microns in the form of a beam approx. 0À25 inch dia. which is reflected and focused by mirror 32 on to source material 31. The mirror is adjustable for focusing the beam in any source and simultaneous evaporation from a number of sources may be achieved by rapid oscillation of the mirror or by any conventional beam splitting technique. The laser beam may also be used for degassing the chamber, substrate and source.
GB1739567A 1967-04-15 1967-04-15 Method Of and Apparatus for Coating An Article With A MAterial by Evaporation In A Vacuum Expired GB1155124A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB1739567A GB1155124A (en) 1967-04-15 1967-04-15 Method Of and Apparatus for Coating An Article With A MAterial by Evaporation In A Vacuum
FR1562371D FR1562371A (en) 1967-04-15 1968-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1739567A GB1155124A (en) 1967-04-15 1967-04-15 Method Of and Apparatus for Coating An Article With A MAterial by Evaporation In A Vacuum

Publications (1)

Publication Number Publication Date
GB1155124A true GB1155124A (en) 1969-06-18

Family

ID=10094452

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1739567A Expired GB1155124A (en) 1967-04-15 1967-04-15 Method Of and Apparatus for Coating An Article With A MAterial by Evaporation In A Vacuum

Country Status (2)

Country Link
FR (1) FR1562371A (en)
GB (1) GB1155124A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS508127A (en) * 1973-05-25 1975-01-28
JPS5010595A (en) * 1973-05-25 1975-02-03
US4212900A (en) * 1978-08-14 1980-07-15 Serlin Richard A Surface alloying method and apparatus using high energy beam
GB2155042A (en) * 1984-02-21 1985-09-18 Hughes Technology Pty Ltd Laser induced ion beam generator
GB2182525A (en) * 1985-10-14 1987-05-13 Mitsubishi Electric Corp Method of manufacturing ceramic vibration plate for speaker

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS508127A (en) * 1973-05-25 1975-01-28
JPS5010595A (en) * 1973-05-25 1975-02-03
US4212900A (en) * 1978-08-14 1980-07-15 Serlin Richard A Surface alloying method and apparatus using high energy beam
GB2155042A (en) * 1984-02-21 1985-09-18 Hughes Technology Pty Ltd Laser induced ion beam generator
GB2182525A (en) * 1985-10-14 1987-05-13 Mitsubishi Electric Corp Method of manufacturing ceramic vibration plate for speaker
US4758388A (en) * 1985-10-14 1988-07-19 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing ceramic vibration plate for speaker

Also Published As

Publication number Publication date
FR1562371A (en) 1969-04-04

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