GB1150968A - Improvements in or relating to the Manufacture of Semiconductor Components - Google Patents
Improvements in or relating to the Manufacture of Semiconductor ComponentsInfo
- Publication number
- GB1150968A GB1150968A GB52225/66A GB5222566A GB1150968A GB 1150968 A GB1150968 A GB 1150968A GB 52225/66 A GB52225/66 A GB 52225/66A GB 5222566 A GB5222566 A GB 5222566A GB 1150968 A GB1150968 A GB 1150968A
- Authority
- GB
- United Kingdom
- Prior art keywords
- photo
- semi
- exposed
- diffusion
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 abstract 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 2
- 239000002966 varnish Substances 0.000 abstract 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 abstract 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910052796 boron Inorganic materials 0.000 abstract 1
- 239000000075 oxide glass Substances 0.000 abstract 1
- 229910052698 phosphorus Inorganic materials 0.000 abstract 1
- 239000011574 phosphorus Substances 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
- Springs (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DES100614A DE1283400B (de) | 1965-11-23 | 1965-11-23 | Verfahren zum Herstellen einer Vielzahl von Siliciumplanartransistoren |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1150968A true GB1150968A (en) | 1969-05-07 |
Family
ID=7523184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB52225/66A Expired GB1150968A (en) | 1965-11-23 | 1966-11-22 | Improvements in or relating to the Manufacture of Semiconductor Components |
Country Status (6)
| Country | Link |
|---|---|
| AT (1) | AT263087B (enrdf_load_stackoverflow) |
| CH (1) | CH464360A (enrdf_load_stackoverflow) |
| DE (1) | DE1283400B (enrdf_load_stackoverflow) |
| FR (1) | FR1501444A (enrdf_load_stackoverflow) |
| GB (1) | GB1150968A (enrdf_load_stackoverflow) |
| NL (1) | NL6615690A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3615942A (en) * | 1969-06-05 | 1971-10-26 | Rca Corp | Method of making a phosphorus glass passivated transistor |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL251064A (enrdf_load_stackoverflow) * | 1955-11-04 | |||
| BE570182A (enrdf_load_stackoverflow) * | 1957-08-07 | 1900-01-01 |
-
1965
- 1965-11-23 DE DES100614A patent/DE1283400B/de active Pending
-
1966
- 1966-11-07 NL NL6615690A patent/NL6615690A/xx unknown
- 1966-11-21 AT AT1074266A patent/AT263087B/de active
- 1966-11-21 CH CH1673566A patent/CH464360A/de unknown
- 1966-11-22 GB GB52225/66A patent/GB1150968A/en not_active Expired
- 1966-11-22 FR FR84530A patent/FR1501444A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CH464360A (de) | 1968-10-31 |
| AT263087B (de) | 1968-07-10 |
| FR1501444A (fr) | 1967-11-10 |
| NL6615690A (enrdf_load_stackoverflow) | 1967-05-24 |
| DE1283400B (de) | 1968-11-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |