GB1129465A - Method for oxidizing silicon - Google Patents
Method for oxidizing siliconInfo
- Publication number
- GB1129465A GB1129465A GB5753/66A GB575366A GB1129465A GB 1129465 A GB1129465 A GB 1129465A GB 5753/66 A GB5753/66 A GB 5753/66A GB 575366 A GB575366 A GB 575366A GB 1129465 A GB1129465 A GB 1129465A
- Authority
- GB
- United Kingdom
- Prior art keywords
- silicon
- feb
- bath
- water
- solvent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052710 silicon Inorganic materials 0.000 title abstract 4
- 239000010703 silicon Substances 0.000 title abstract 4
- 230000001590 oxidative effect Effects 0.000 title 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract 2
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Chemical compound [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 2
- CSDQQAQKBAQLLE-UHFFFAOYSA-N 4-(4-chlorophenyl)-4,5,6,7-tetrahydrothieno[3,2-c]pyridine Chemical compound C1=CC(Cl)=CC=C1C1C(C=CS2)=C2CCN1 CSDQQAQKBAQLLE-UHFFFAOYSA-N 0.000 abstract 1
- OHLUUHNLEMFGTQ-UHFFFAOYSA-N N-methylacetamide Chemical compound CNC(C)=O OHLUUHNLEMFGTQ-UHFFFAOYSA-N 0.000 abstract 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 abstract 1
- 238000007743 anodising Methods 0.000 abstract 1
- 239000003125 aqueous solvent Substances 0.000 abstract 1
- 238000001035 drying Methods 0.000 abstract 1
- 230000007935 neutral effect Effects 0.000 abstract 1
- 229910052697 platinum Inorganic materials 0.000 abstract 1
- 239000011591 potassium Substances 0.000 abstract 1
- 229910052700 potassium Inorganic materials 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 abstract 1
- 235000010344 sodium nitrate Nutrition 0.000 abstract 1
- 239000004317 sodium nitrate Substances 0.000 abstract 1
- 239000002904 solvent Substances 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
- H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
- H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02258—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by anodic treatment, e.g. anodic oxidation
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR5129A FR1432750A (fr) | 1965-02-11 | 1965-02-11 | Procédé d'oxydation du silicium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1129465A true GB1129465A (en) | 1968-10-09 |
Family
ID=8570672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5753/66A Expired GB1129465A (en) | 1965-02-11 | 1966-02-09 | Method for oxidizing silicon |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1496762A1 (cs) |
| FR (1) | FR1432750A (cs) |
| GB (1) | GB1129465A (cs) |
| NL (1) | NL6601694A (cs) |
-
1965
- 1965-02-11 FR FR5129A patent/FR1432750A/fr not_active Expired
-
1966
- 1966-02-09 GB GB5753/66A patent/GB1129465A/en not_active Expired
- 1966-02-10 NL NL6601694A patent/NL6601694A/xx unknown
- 1966-02-10 DE DE19661496762 patent/DE1496762A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| NL6601694A (cs) | 1966-08-12 |
| DE1496762A1 (de) | 1969-08-07 |
| FR1432750A (fr) | 1966-03-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| FI49111C (fi) | Elektrodi, joka on tarkoitettu käytettäväksi anodina elektrolyysissä. | |
| SE426407B (sv) | Katod for elektrolys av vatten eller en vattenhaltig alkalimetallhalogenidlosning, elektrolyscell omfattande en sadan katod samt forfarande for framstellning av katoden | |
| AT274349B (de) | Verfahren zur Herstellung wässeriger Lösungen, die hochmolekulares Polyacrylamid und Natriumpolyacrylat enthalten | |
| GB1129465A (en) | Method for oxidizing silicon | |
| ES344026A1 (es) | Procedimiento para preparar una suspension neutra acuosa decloruro cianurico. | |
| GB1005478A (en) | Process for electrodeposition of a platinum coating and electrolyte for the application of said process | |
| FR2015295A1 (fr) | Procede perfectionne de production d'aluminium par electrolyse | |
| CA947913A (en) | Stable, concentrated solutions of complex metal compounds of azo dyestuffs | |
| GB1101127A (en) | Electrolytic recording process | |
| KR890000246A (ko) | 인쇄판 지지체에서 사용되는 알루미늄의 전기화학적 입상화 방법 | |
| SU462851A1 (ru) | Способ получени выпускной формы сернистых красителей | |
| SU477811A1 (ru) | Электролит дл электрохимической обработки | |
| FR2028157A1 (en) | Preparation of solutions of hydroxylamine - salts from nitric oxide | |
| DK128608B (da) | Fremgangsmåde til elektrolytisk oxidation af diacetone-sorbose til diacetone-2-keto-gulonsyre. | |
| JPS5218498A (en) | Process for electrolysis of alkal metal salt | |
| JPS533006A (en) | Subscriber line multiplication system | |
| JPS5282678A (en) | Skimming separation by the aid of electrolysis | |
| JPS5227739A (en) | Process for preparation of 3-substituted or non-substituted-4-hydroxyb enzaldehyde by electrolytic oxidation | |
| AU274528B2 (en) | Improvements relating to electrolytic cells having flowing mercury cathodes | |
| CA799457A (en) | Desalination of electrolytes by differential redox method | |
| JPS52111820A (en) | Electro-deposition of zinc | |
| Shah et al. | Azoles as Corrosion Inhibitors Towards 3 S Al in Trichloracetic Acid Solutions | |
| AU3313363A (en) | Improvements relating to electrolytic cells having flowing mercury cathodes | |
| ES308953A1 (es) | Mejoras introducidas en la preparacion de electrolitos liquidos | |
| JPS5275051A (en) | Apparatus for decoloring waste dyeing water |