GB1124894A - Improvements in methods of forming film materials - Google Patents
Improvements in methods of forming film materialsInfo
- Publication number
- GB1124894A GB1124894A GB35674/66A GB3567466A GB1124894A GB 1124894 A GB1124894 A GB 1124894A GB 35674/66 A GB35674/66 A GB 35674/66A GB 3567466 A GB3567466 A GB 3567466A GB 1124894 A GB1124894 A GB 1124894A
- Authority
- GB
- United Kingdom
- Prior art keywords
- methods
- pattern
- forming film
- film materials
- halide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Weting (AREA)
- Surface Treatment Of Glass (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US50982565A | 1965-11-26 | 1965-11-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1124894A true GB1124894A (en) | 1968-08-21 |
Family
ID=24028228
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB35674/66A Expired GB1124894A (en) | 1965-11-26 | 1966-08-09 | Improvements in methods of forming film materials |
Country Status (10)
Country | Link |
---|---|
US (1) | USB509825I5 (nl) |
BE (1) | BE687592A (nl) |
CH (1) | CH480448A (nl) |
DE (1) | DE1521255B2 (nl) |
DK (1) | DK121522B (nl) |
ES (1) | ES333330A1 (nl) |
FR (1) | FR1504611A (nl) |
GB (1) | GB1124894A (nl) |
NL (1) | NL6612593A (nl) |
SE (1) | SE319824B (nl) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0199114A2 (de) * | 1985-04-16 | 1986-10-29 | Schering Aktiengesellschaft | Herstellung metallischer Strukturen auf anorganischen Nichtleitern |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH507542A (de) * | 1969-02-17 | 1970-12-31 | Liss S A | Verfahren zur Herstellung von Zifferblättern |
JPS5846193B2 (ja) * | 1980-07-15 | 1983-10-14 | 株式会社東芝 | 半導体装置 |
-
0
- US US509825D patent/USB509825I5/en active Pending
-
1966
- 1966-08-09 GB GB35674/66A patent/GB1124894A/en not_active Expired
- 1966-09-07 NL NL6612593A patent/NL6612593A/xx unknown
- 1966-09-27 FR FR77783A patent/FR1504611A/fr not_active Expired
- 1966-09-29 BE BE687592D patent/BE687592A/xx unknown
- 1966-10-18 DE DE19661521255 patent/DE1521255B2/de active Pending
- 1966-10-21 CH CH1525366A patent/CH480448A/de not_active IP Right Cessation
- 1966-11-14 ES ES0333330A patent/ES333330A1/es not_active Expired
- 1966-11-24 SE SE16061/66A patent/SE319824B/xx unknown
- 1966-11-24 DK DK608366AA patent/DK121522B/da unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0199114A2 (de) * | 1985-04-16 | 1986-10-29 | Schering Aktiengesellschaft | Herstellung metallischer Strukturen auf anorganischen Nichtleitern |
EP0199114A3 (en) * | 1985-04-16 | 1988-10-19 | Schering Aktiengesellschaft Berlin Und Bergkamen | Manufacture of metallic structures on inorganic non-condmanufacture of metallic structures on inorganic non-conductors uctors |
Also Published As
Publication number | Publication date |
---|---|
BE687592A (nl) | 1967-03-01 |
NL6612593A (nl) | 1967-05-29 |
DE1521255B2 (de) | 1971-03-11 |
DK121522B (da) | 1971-10-25 |
SE319824B (nl) | 1970-01-26 |
CH480448A (de) | 1969-10-31 |
FR1504611A (fr) | 1967-12-08 |
ES333330A1 (es) | 1967-08-16 |
DE1521255A1 (de) | 1970-02-12 |
USB509825I5 (nl) |
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