GB1114598A - Improvements in and relating to methods of measuring carrier concentration in semiconductors - Google Patents
Improvements in and relating to methods of measuring carrier concentration in semiconductorsInfo
- Publication number
- GB1114598A GB1114598A GB3690465A GB3690465A GB1114598A GB 1114598 A GB1114598 A GB 1114598A GB 3690465 A GB3690465 A GB 3690465A GB 3690465 A GB3690465 A GB 3690465A GB 1114598 A GB1114598 A GB 1114598A
- Authority
- GB
- United Kingdom
- Prior art keywords
- carrier concentration
- temperature
- semi
- conductor
- sign
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/002—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the work function voltage
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
Landscapes
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
1,114,598. Measuring semi-conductor carrier concentration. ASSOCIATED SEMI-CONDUCTOR MANUFACTURERS Ltd. Aug. 12, 1966[Aug. 27, 1965], No. 36904/65. Heading G1U. In a non destructive method of measuring carrier concentration in a semi-conductor body which is p type at a lower temperature and n type at a higher, the body is cooled and/or heated through a temperature range where the thermoelectric effect changes sign. The temperature at which this sign change occurs is detected and uniquely indicates the carrier concentration. To carry out the method slice 8 of e.g. indium antimonide is clamped on the flat top of a vertical copper rod 4 and is heated and cooled by raising and lowering the rod relative to a liquid nitrogen refrigerant 2 in a flask 1. The temperature at the end surface is measured by a thermocouple 7 and the sign of the thermoelectric effect is monitored by deriving an output across a probe 11 and a clamping spring 9 secured to the rod 4, the probe being at the higher temperature of its holder 12.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3690465A GB1114598A (en) | 1965-08-27 | 1965-08-27 | Improvements in and relating to methods of measuring carrier concentration in semiconductors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3690465A GB1114598A (en) | 1965-08-27 | 1965-08-27 | Improvements in and relating to methods of measuring carrier concentration in semiconductors |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1114598A true GB1114598A (en) | 1968-05-22 |
Family
ID=10392106
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB3690465A Expired GB1114598A (en) | 1965-08-27 | 1965-08-27 | Improvements in and relating to methods of measuring carrier concentration in semiconductors |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1114598A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0634056A1 (en) * | 1992-04-03 | 1995-01-18 | TALLON, Jeffery Lewis | Thermopower mapping of superconducting cuprates |
CN103868952A (en) * | 2014-02-27 | 2014-06-18 | 中国电子科技集团公司第十一研究所 | Carrier concentration testing method of ion implanted layer |
-
1965
- 1965-08-27 GB GB3690465A patent/GB1114598A/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0634056A1 (en) * | 1992-04-03 | 1995-01-18 | TALLON, Jeffery Lewis | Thermopower mapping of superconducting cuprates |
EP0634056A4 (en) * | 1992-04-03 | 1997-03-05 | Jeffery Lewis Tallon | Thermopower mapping of superconducting cuprates. |
CN103868952A (en) * | 2014-02-27 | 2014-06-18 | 中国电子科技集团公司第十一研究所 | Carrier concentration testing method of ion implanted layer |
CN103868952B (en) * | 2014-02-27 | 2016-05-25 | 中国电子科技集团公司第十一研究所 | Ion implanted layer carrier concentration method of testing |
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