GB1067021A - Specimen tilting devices for electron microscopes - Google Patents

Abstract

1,067,021. Electron microscopes. HITACHI Ltd. April 8, 1964 [May 24, 1963], No. 14509/64. Heading H1D. A specimen tilting device for an electron microscope includes means for producing an alternating deflection of the electron beam in a direction parallel, or perpendicular, to the axis about which the specimen tilts, thereby facilitating adjustment of the specimen to ensure that it may be tilted about an axis which corresponds to a given line in the image of the specimen formed on a viewing screen, by observation of the direction of oscillation of the image on the screen, and rotation of the specimen about an axis perpendicular to the tilting axis until the direction of oscillation of the image is either parallel or perpendicular, respectively, to the given line in the image. For producing the deflection of the irradiating beam when adjusting the specimen, the specimen holder includes either a pair of coils (6, Fig. 2, not shown), mounted to provide a magnetic field perpendicular to the axis (3) about which the holder can tilt, or parallel to that axis, as in Fig. 2 (not shown). Alternatively, a ring-shaped electrode (8, Fig. 3, not shown), may be mounted on that portion (2) of the holder which tilts with the specimen, to produce a deflection of the irradiating beam in a direction perpendicular to the tilting axis (3) when the holder is tilted out of alignment with the optical axis of the microscope. The latter arrangement may be calibrated to permit the deduction of the angle of tilt about the tilting axis from the amplitude of the image oscillation. Reference is also made to the use of a coil rather than an electrode in the arrangement of Fig. 3 (not shown).