GB1065745A - Improvements in and relating to the deposition of substances on insulating bases by evaporation by means of an electron beam - Google Patents
Improvements in and relating to the deposition of substances on insulating bases by evaporation by means of an electron beamInfo
- Publication number
- GB1065745A GB1065745A GB790465A GB790465A GB1065745A GB 1065745 A GB1065745 A GB 1065745A GB 790465 A GB790465 A GB 790465A GB 790465 A GB790465 A GB 790465A GB 1065745 A GB1065745 A GB 1065745A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electron beam
- substrate
- deposition
- evaporation
- relating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000008021 deposition Effects 0.000 title abstract 2
- 238000010894 electron beam technology Methods 0.000 title abstract 2
- 230000008020 evaporation Effects 0.000 title 1
- 238000001704 evaporation Methods 0.000 title 1
- 239000000126 substance Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 4
- 230000005684 electric field Effects 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 abstract 1
- 229910052763 palladium Inorganic materials 0.000 abstract 1
- 229910052703 rhodium Inorganic materials 0.000 abstract 1
- 238000012216 screening Methods 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
In the vapour deposition of oxides or metals e.g. Zr, W, Mo, Pt, Rh, and Pd on a substrate of e.g. glass or ceramic, in which the source material is heated by electron beam, an electric field is maintained to prevent stray electrons from reaching the substrate. The electric field may be provided by either an electrode between the source and the substrate or on top of the evaporator or the stray electrons may be used to charge a grid. The support for the substrate may be constructed to act as the screening electrode, and may be rotatably mounted.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH300364A CH441928A (en) | 1964-03-09 | 1964-03-09 | Arrangement for electronic vapor deposition of substances on insulating substrates |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1065745A true GB1065745A (en) | 1967-04-19 |
Family
ID=4246434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB790465A Expired GB1065745A (en) | 1964-03-09 | 1965-02-26 | Improvements in and relating to the deposition of substances on insulating bases by evaporation by means of an electron beam |
Country Status (6)
| Country | Link |
|---|---|
| AT (1) | AT252682B (en) |
| CH (1) | CH441928A (en) |
| DE (1) | DE1270354C2 (en) |
| FR (1) | FR1428330A (en) |
| GB (1) | GB1065745A (en) |
| NL (1) | NL6404974A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4013463A (en) | 1975-08-15 | 1977-03-22 | Leder Lewis B | Photoreceptor fabrication utilizing AC ion plating |
| US4099969A (en) * | 1974-10-10 | 1978-07-11 | Xerox Corporation | Coating method to improve adhesion of photoconductors |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE875249C (en) * | 1950-12-05 | 1953-04-30 | Sueddeutsche Lab G M B H | Steaming device |
-
1964
- 1964-03-09 CH CH300364A patent/CH441928A/en unknown
- 1964-05-05 NL NL6404974A patent/NL6404974A/xx unknown
-
1965
- 1965-02-25 DE DE19651270354 patent/DE1270354C2/en not_active Expired
- 1965-02-26 GB GB790465A patent/GB1065745A/en not_active Expired
- 1965-03-04 AT AT189765A patent/AT252682B/en active
- 1965-03-09 FR FR8381A patent/FR1428330A/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4099969A (en) * | 1974-10-10 | 1978-07-11 | Xerox Corporation | Coating method to improve adhesion of photoconductors |
| US4013463A (en) | 1975-08-15 | 1977-03-22 | Leder Lewis B | Photoreceptor fabrication utilizing AC ion plating |
Also Published As
| Publication number | Publication date |
|---|---|
| CH441928A (en) | 1967-08-15 |
| DE1270354B (en) | 1968-06-12 |
| AT252682B (en) | 1967-03-10 |
| NL6404974A (en) | 1965-09-10 |
| FR1428330A (en) | 1966-02-11 |
| DE1270354C2 (en) | 1977-02-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US2835835A (en) | Ion source | |
| ES320887A1 (en) | Improvements in the appliances to generate fects of electrons. (Machine-translation by Google Translate, not legally binding) | |
| GB1114644A (en) | Sputtering apparatus | |
| US3115591A (en) | Ion source for mass spectrometer | |
| GB1065745A (en) | Improvements in and relating to the deposition of substances on insulating bases by evaporation by means of an electron beam | |
| GB1105989A (en) | Improvements in and relating to the evaporation of substances in vacuo | |
| FR1454765A (en) | Improvements to electrical vapor detectors | |
| Dworetsky et al. | Electron bombardment ion source for low energy beams | |
| US3229157A (en) | Crucible surface ionization source | |
| GB1303136A (en) | ||
| GB1076331A (en) | Improvements in and relating to electron microscopes | |
| GB1420545A (en) | Evaporation by electron beans | |
| GB1152757A (en) | Improvements in and relating to Ion Sources for Mass Spectrometers | |
| GB877112A (en) | Improvements in ion sources | |
| GB1093525A (en) | Improvements in or relating to arrangements for the manufacture of electronic element s | |
| GB1010456A (en) | Means for measuring and/or controlling the evaporation rate in vacuum evaporation processes | |
| GB975023A (en) | Cathode grid assembly for electron gun | |
| Andersen et al. | Diffusion of rare earths through tantalum | |
| JPS5833649B2 (en) | ion generator | |
| GB1106708A (en) | Improvements in or relating to electrodes for fuel cells | |
| GB961334A (en) | Improvements relating to ion sources for mass spectrometers | |
| GB1094561A (en) | Improvements in and relating to vapour deposition and evaporation sources | |
| GB681272A (en) | Improvements in or relating to photo-electric devices | |
| GB1158276A (en) | Mass Spectrometers Using Electrically Adjustable Slits. | |
| GB1071645A (en) | Apparatus for measuring weak ion currents |