GB1032446A - Method and apparatus for producing an electrically conductive structure in an enclosure under vacuum - Google Patents

Method and apparatus for producing an electrically conductive structure in an enclosure under vacuum

Info

Publication number
GB1032446A
GB1032446A GB42267/63A GB4226763A GB1032446A GB 1032446 A GB1032446 A GB 1032446A GB 42267/63 A GB42267/63 A GB 42267/63A GB 4226763 A GB4226763 A GB 4226763A GB 1032446 A GB1032446 A GB 1032446A
Authority
GB
United Kingdom
Prior art keywords
electrodes
powder
oct
produced
stream
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB42267/63A
Other languages
English (en)
Inventor
Marcel Haegi
Charles Maisonnier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
European Atomic Energy Community Euratom
Original Assignee
European Atomic Energy Community Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by European Atomic Energy Community Euratom filed Critical European Atomic Energy Community Euratom
Publication of GB1032446A publication Critical patent/GB1032446A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/54—Plasma accelerators
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F6/00—Superconducting magnets; Superconducting coils
    • H01F6/06—Coils, e.g. winding, insulating, terminating or casing arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
GB42267/63A 1962-10-29 1963-10-25 Method and apparatus for producing an electrically conductive structure in an enclosure under vacuum Expired GB1032446A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE498951 1962-10-29

Publications (1)

Publication Number Publication Date
GB1032446A true GB1032446A (en) 1966-06-08

Family

ID=3844717

Family Applications (1)

Application Number Title Priority Date Filing Date
GB42267/63A Expired GB1032446A (en) 1962-10-29 1963-10-25 Method and apparatus for producing an electrically conductive structure in an enclosure under vacuum

Country Status (6)

Country Link
US (1) US3395307A (id)
BE (1) BE624165A (id)
DE (1) DE1230147B (id)
GB (1) GB1032446A (id)
LU (1) LU44422A1 (id)
NL (1) NL299056A (id)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2566620C2 (ru) * 2013-12-24 2015-10-27 Сергей Николаевич Зубов Способ и топливо для компаунд-синтеза, воздушно-реактивный двигатель на компаунд-синтезе и турбоэлектромашинный агрегат для него (варианты)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA976599A (en) * 1971-04-08 1975-10-21 Senichi Masuda Electrified particles generating apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3239717A (en) * 1962-02-26 1966-03-08 Goodrich High Voltage Astronau Method and apparatus for dispersing glomerate particles

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2566620C2 (ru) * 2013-12-24 2015-10-27 Сергей Николаевич Зубов Способ и топливо для компаунд-синтеза, воздушно-реактивный двигатель на компаунд-синтезе и турбоэлектромашинный агрегат для него (варианты)

Also Published As

Publication number Publication date
LU44422A1 (id) 1963-11-13
BE624165A (id)
US3395307A (en) 1968-07-30
DE1230147B (de) 1966-12-08
NL299056A (id)

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