GB1008545A - Analyzing device for electron beam micro-probe - Google Patents

Analyzing device for electron beam micro-probe

Info

Publication number
GB1008545A
GB1008545A GB3534962A GB3534962A GB1008545A GB 1008545 A GB1008545 A GB 1008545A GB 3534962 A GB3534962 A GB 3534962A GB 3534962 A GB3534962 A GB 3534962A GB 1008545 A GB1008545 A GB 1008545A
Authority
GB
United Kingdom
Prior art keywords
plate
electron
samples
electron beam
sample carrying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3534962A
Inventor
Roger Theisen
Jacques Lemaitre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
European Atomic Energy Community Euratom
Original Assignee
European Atomic Energy Community Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by European Atomic Energy Community Euratom filed Critical European Atomic Energy Community Euratom
Publication of GB1008545A publication Critical patent/GB1008545A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Abstract

1,008,545. X-ray tubes; electron beam apparatus. COMMUNAUTE EUROPEENE DE L'ENERGIE ATOMIQUE (EURATOM). Sept. 17, 1962 [Sept. 29, 1961], No. 35349/62. Heading H1D. An electron beam microprobe for X-ray and electron diffraction analysis has a specimen holder which comprises (a) a base-plate 1 provided with slideways 2, 3 and a stop 4, (b) an insulating plate 7, and (c) a metallic mounting plate 17 carrying an electron trap 29 and a plurality of sample carrying subassemblies 20, 21, the plate 17 being provided with apertures for thimble(s) 14, 15, 16 which are supported on plate 7 and which contain massive reference samples. The sample carrying subassemblies 20, 21 comprise non-magnetic flexible blades rigidly fixed at one end. The blades are provided at the other end with flared holes 22 which bear against sample carrying grids 27 resting in holders 26. Set-screws 24 are provided. A central hole 44 is also provided in plate 17 for the passage of the beam for beam centring purposes. A contact screw 33 permits connection of the plate 17 to the base-plate 1, which is earthed. By measurements of the currents taken from the electron trap, massive and thin samples and of the current transmitted through the thin samples, the absorption of electrons in the samples can be determined.
GB3534962A 1961-09-29 1962-09-27 Analyzing device for electron beam micro-probe Expired GB1008545A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE485105 1961-09-29

Publications (1)

Publication Number Publication Date
GB1008545A true GB1008545A (en) 1965-10-27

Family

ID=3844607

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3534962A Expired GB1008545A (en) 1961-09-29 1962-09-27 Analyzing device for electron beam micro-probe

Country Status (1)

Country Link
GB (1) GB1008545A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2133930A (en) * 1983-01-08 1984-08-01 Canon Kk Workpiece carriages

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2133930A (en) * 1983-01-08 1984-08-01 Canon Kk Workpiece carriages

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