GB954847A - Improvements relating to high vacuum electron or ion beam devices - Google Patents

Improvements relating to high vacuum electron or ion beam devices

Info

Publication number
GB954847A
GB954847A GB2374261A GB2374261A GB954847A GB 954847 A GB954847 A GB 954847A GB 2374261 A GB2374261 A GB 2374261A GB 2374261 A GB2374261 A GB 2374261A GB 954847 A GB954847 A GB 954847A
Authority
GB
United Kingdom
Prior art keywords
diaphragm body
ion beam
high vacuum
improvements relating
june
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2374261A
Inventor
John Alfred Griffiths
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to NL280401D priority Critical patent/NL280401A/xx
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Priority to GB2374261A priority patent/GB954847A/en
Priority to FR902525A priority patent/FR1327522A/en
Publication of GB954847A publication Critical patent/GB954847A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

954,847. Electron microscopes. ASSOCIATED ELECTRICAL INDUSTRIES Ltd. June 19, 1962 [June 30, 1961], No. 23742/61. Heading H1D. An aperture diaphragm of good thermally conducting material in an electron microscope or mass spectrometer is supported by poor thermally conducting material and is heated to prevent contamination by the condensation for example of hydrocarbon vapours by means of an electrical heater in good thermal contact with the diaphragm body. As shown the diaphragm body 1 is provided with a number of apertures 2 which may be of different sizes is supported by two tubular members, e.g. of stainless steel, one of which, 5, contains the leads to a heater coil 31 located in an extension of the diaphragm body. The tubular member 5 can be moved longitudinally by means of the knob 24.
GB2374261A 1961-06-30 1961-06-30 Improvements relating to high vacuum electron or ion beam devices Expired GB954847A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
NL280401D NL280401A (en) 1961-06-30
GB2374261A GB954847A (en) 1961-06-30 1961-06-30 Improvements relating to high vacuum electron or ion beam devices
FR902525A FR1327522A (en) 1961-06-30 1962-06-29 Improvements to high vacuum devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2374261A GB954847A (en) 1961-06-30 1961-06-30 Improvements relating to high vacuum electron or ion beam devices

Publications (1)

Publication Number Publication Date
GB954847A true GB954847A (en) 1964-04-08

Family

ID=10200566

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2374261A Expired GB954847A (en) 1961-06-30 1961-06-30 Improvements relating to high vacuum electron or ion beam devices

Country Status (2)

Country Link
GB (1) GB954847A (en)
NL (1) NL280401A (en)

Also Published As

Publication number Publication date
NL280401A (en)

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